Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
US-10527927-B2 · Jan 7, 2020 · US
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Usui Yoichi patents
Usui Yoichi is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Usui Yoichi |
| Total patents | 6 |
| First publication | May 5, 2016 |
| Latest publication | Jan 7, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
US-2019155141-A1 · May 23, 2019 · US
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
US-10209614-B2 · Feb 19, 2019 · US
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
US-2017315439-A1 · Nov 2, 2017 · US
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
US-9746762-B2 · Aug 29, 2017 · US
Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method
US-2016124298-A1 · May 5, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Hoya Corp | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/38 | 6 |
| G03F7/20 | 6 |
| G03F1/24 | 6 |
| B32B2551/00 | 6 |
| B32B2307/416 | 6 |