Apparatus for printing a chemical mechanical polishing pad

Patent metadata

Field	Value
Publication number	US-9744724-B2
Application number	US-201615237140-A
Country	US
Kind code	B2
Filing date	Aug 15, 2016
Priority date	Apr 25, 2012
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a pad material precursor from a nozzle and solidifying the pad material precursor to form a solidified pad material.

First claim

What is claimed is:

1. An apparatus for fabricating at least a polishing layer of a polishing pad, comprising:
a support;
a supply of liquid polishing pad material precursor that becomes a polishing pad material upon curing;
a droplet ejecting printer including a nozzle and configured to deliver the pad material precursor onto the support or an underlying layer of solidified polishing pad material without a powder to successively form a plurality of layers on the support, at least some of the plurality of layers providing the polishing layer;
a computer coupled to the droplet ejecting printer and configured to control the droplet ejecting printer to deposit a first layer of the plurality of layers by ejecting droplets of the pad material precursor onto the support and to deposit each subsequent layer of the plurality layers by ejecting droplets of the pad material precursor directly onto the underlying layer of solidified polishing pad material without a layer of the powder; and
a radiation source to cure the pad material precursor to solidify the liquid polishing pad material precursor so as to form the polishing pad material on the support, and wherein the support is configured for the polishing pad material to be removed from the support to provide at least the polishing layer of the polishing pad.

2. The apparatus of claim 1 , wherein the computer includes a 3D drawing program configured to control the droplet ejection printer to form a pattern in at least some of the plurality of layers to form recesses in the polishing layer by controlling ejection of the pad material precursor.

3. The apparatus of claim 1 , wherein the nozzle is configured to translate across the support.

4. The apparatus of claim 1 , wherein the radiation source comprises a UV radiation source.

5. The apparatus of claim 1 , wherein the radiation source is configured to cure the pad precursor material immediately upon deposition.

6. The apparatus of claim 1 , wherein the radiation source is configured to cure an entire layer of pad precursor material simultaneously after deposition of the layer.

7. The apparatus of claim 1 , wherein the apparatus is configured such at least some of the plurality of layers provide a backing layer of the polishing pad.

8. The apparatus of claim 7 , wherein the supply of liquid polishing pad material precursor includes of a first precursor that becomes the polishing layer upon curing and a second precursor that is a different material than the first precursor that becomes the backing layer upon curing.

9. The apparatus of claim 7 , wherein the droplet ejecting printer is configured to eject the same precursor to form the polishing layer and the backing layer, and the radiation source is configured to cure layers that provide the backing layer by a different degree than the layers providing the polishing layer such that the backing layer is softer than the polishing layer.

10. The apparatus of claim 1 , wherein the support comprises a rigid base.

11. A method of fabricating at least a polishing layer of a polishing pad, comprising:
successively depositing a plurality of layers with a droplet ejecting printer to form a polishing material, at least some of the plurality of layers providing the polishing layer, wherein a first layer of the plurality of layers is deposited by ejecting droplets of liquid pad material precursor from a nozzle on a support, and wherein each subsequently deposited layer of the plurality of layers is deposited by ejecting droplets of the liquid pad material precursor from the nozzle directly onto an underlying layer of solidified pad material without a powder;
solidifying the pad material precursor to form solidified pad material, wherein solidifying the pad material precursor comprises curing the pad material precursor; and
removing the solidified pad material from the support to provide at least the polishing layer of the polishing pad.

12. The method of claim 11 , wherein the pad material precursor comprises a monomer.

13. The method of claim 12 , wherein the pad material precursor comprises a urethane monomer.

14. The method of claim 11 , wherein a thickness of each layer of the plurality of layers is less than 50% of a total thickness of the polishing layer.

15. The method of claim 14 , wherein the thickness of each layer of the plurality of layers is less than 10% of the total thickness of the polishing layer.

16. The method of claim 11 , comprising curing the pad precursor material immediately upon deposition.

17. The method of claim 11 , comprising curing an entire layer of pad precursor material simultaneously after deposition of the layer.

18. The method of claim 11 , at least some of the plurality of layers provide a backing layer of the polishing pad.

19. The method of claim 18 , wherein successively depositing the plurality of layers comprises ejecting droplets of a first precursor that becomes the backing layer upon curing and ejecting droplets of a second precursor that is a different material from the first precursor that becomes the polishing layer upon curing.

20. The method of claim 18 , wherein successively depositing the plurality of layers comprises ejecting the same precursor to form the polishing layer and the backing layer, and curing the pad material precursor includes curing layers that provide the backing layer by a different degree than the layers providing the polishing layer such that the backing layer is softer than the polishing layer.

Assignees

• Applied Materials Inc

Inventors

• Bajaj Rajeev
• Chin Barry Lee
• Lee Terrance Y

Classifications

• B24B37/26 Primary

  characterised by the shape of the lapping pad surface, e.g. grooved · CPC title

• B24D18/00

  Manufacture of grinding tools {or other grinding devices}, e.g. wheels, not otherwise provided for · CPC title

• B24D18/009

  Tools not otherwise provided for · CPC title

• B33Y30/00

  Apparatus for additive manufacturing; Details thereof or accessories therefor · CPC title

• B29K2105/0002

  monomers or prepolymers · CPC title