Damage prevention on EUV mask

Patent metadata

Field	Value
Publication number	US-9740094-B2
Application number	US-201514832099-A
Country	US
Kind code	B2
Filing date	Aug 21, 2015
Priority date	Aug 21, 2015
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A method of cleaning a photomask is disclosed. The method includes mixing a first chemical solution with a second chemical solution; and discharging the mixed chemical solution through an outlet of a nozzle to a surface of the photomask on which includes a ruthenium (Ru) layer, wherein the first chemical solution is configured to dislodge contaminant particles from the surface of the photomask and the second chemical solution is configured to provide an electron to the first chemical solution.

First claim

What is claimed is:

1. A method, comprising:
applying a first chemical solution and a second chemical solution to a photomask to remove contaminant particles from the photomask, wherein the photomask includes a ruthenium (Ru) layer and the second chemical solution prevents the first chemical solution from reacting with the Ru layer; and
mixing the first chemical solution with the second chemical solution to form a mixed solution, and wherein applying the first chemical solution and the second chemical solution to the photomask includes applying the mixed solution.

2. The method of claim 1 , wherein the second chemical solution provides an electron to the first chemical solution to prevent the first chemical solution from reacting with the Ru layer.

3. The method of claim 1 , further comprising applying a third chemical solution to the photomask to remove an organic compound from the photomask.

4. The method of claim 1 , further comprising performing an extreme ultraviolet lithography process using the photomask.

5. The method of claim 1 , wherein the first chemical solution includes at least one of: water, carbonic acid, and hydrogen peroxide.

6. The method of claim 1 , wherein the second chemical solution includes at least one of: haloid, sulfite, sulfate, sodium borohydride, lithium borohydride, lithium aluminum hydride, and ascorbic acid.

7. The method of claim 1 , wherein the applying the first chemical solution and the second chemical solution to the photomask is performed at a temperature ranging from room temperature to 50° C.

8. A method of cleaning a photomask, comprising:
mixing a first chemical solution with a second chemical solution; and
discharging the mixed chemical solution through an outlet of a nozzle to a surface of the photomask on which includes a ruthenium (Ru) layer,
wherein the first chemical solution is configured to dislodge contaminant particles from the surface of the photomask and the second chemical solution is configured to provide an electron to the first chemical solution.

9. The method of claim 8 , wherein the photomask is an extreme ultraviolet lithography (EUVL) mask.

10. The method of claim 8 further comprising prior to mixing the first chemical solution with the second chemical solution, supplying the first chemical solution and the second chemical solution respectively to a first inlet and a second inlet of the nozzle.

11. The method of claim 8 , wherein the first chemical solution includes at least one of: water, carbonic acid, and hydrogen peroxide.

12. The method of claim 8 , wherein the second chemical solution includes at least one of: haloid, sulfite, sulfate, sodium borohydride, lithium borohydride, lithium aluminum hydride, and ascorbic acid.

13. The method of claim 8 further comprising after discharging the mixed chemical solution through the nozzle to the surface of the photomask, exposing the surface of the photomask to a third chemical solution thereby removing an organic compound from the surface of the photomask.

14. The method of claim 13 further comprising after exposing the surface of the photomask to the third chemical solution, discharging the mixed chemical solution through the nozzle to the surface of the photomask.

15. The method of claim 8 , wherein discharging the mixed chemical solution to the surface of the photomask is performed at a temperature ranging from room temperature to 50° C.

16. A method comprising:
mixing a first chemical solution with a second chemical solution to form a mixed solution; and
applying the mixed solution to a photomask that includes a ruthenium (Ru) layer, wherein the first chemical solution is configured to dislodge contaminant particles from the photomask and the second chemical solution is configured to provide an electron to the first chemical solution.

17. The method of claim 16 , further comprising applying a third chemical solution to the photomask after applying the mixed solution to the photomask, the third chemical solution operable to remove an organic compound from the photomask.

18. The method of claim 16 , further comprising applying another portion of the mixed solution to the photomask after applying the third chemical solution to the photomask.

19. The method of claim 16 , wherein the first, second and third chemical solutions are different from each other.

20. The method of claim 19 , wherein the first chemical solution includes a first material selected from the group consisting of water and carbonic acid, and
wherein the second chemical solution includes a second material selected from the group consisting of haloid, sulfite, sodium borohydride, lithium borohydride, lithium aluminum hydride, and ascorbic acid, and
wherein the third chemical solution includes a second material selected from the group consisting of sulfide acid and hydrogen peroxide.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lin Kuan-Wen
• Lu Chi-Lun
• Shen Ching-Wei
• Wu Shu-Hsien

Classifications

• G03F7/2004

  characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light · CPC title

• G03F1/82 Primary

  Auxiliary processes, e.g. cleaning or inspecting · CPC title

• C11D7/34

  containing sulfur · CPC title

• B08B3/10

  with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title