Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly

Patent metadata

Field	Value
Publication number	US-9739998-B2
Application number	US-201313894989-A
Country	US
Kind code	B2
Filing date	May 15, 2013
Priority date	May 15, 2012
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A micromechanical assembly having a holder, a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame and which is joined to the holder via at least one frame spring, a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the two mirror springs and being adjustable about a mirror axis of rotation in relation to the drive frame, and the mirror element being suspended from the drive frame asymmetrically relative to the mirror axis of rotation. A method for manufacturing a micromechanical assembly is also described. A method for operating a micromechanical assembly is also described.

First claim

What is claimed is:

1. A micromechanical assembly comprising:
a holder;
a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame, and which is joined to the holder via at least one frame spring, the at least one frame spring configured to bend so that an entire end of the at least one frame spring connected to the drive frame moves, in response to a drive force, with a drive motion having a component perpendicular to a mirror axis of rotation of a mirror element; and
the mirror element, at least partially framed by the drive frame, the mirror element being suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the first mirror spring and the second mirror spring and being adjustable about the mirror axis of rotation in relation to the drive frame, wherein the mirror element is suspended from the drive frame asymmetrically relative to the mirror axis of rotation.

2. The micromechanical assembly as recited in claim 1 , wherein the mirror element has a center of mass which is set apart from the mirror axis of rotation.

3. The micromechanical assembly as recited in claim 1 , wherein the mirror element includes a disk-shaped mirror plate with an additional mass disposed on the mirror plate asymmetrically relative to the mirror axis of rotation.

4. The micromechanical assembly as recited in claim 1 , wherein the mirror element is suspended from the drive frame by the two mirror springs eccentrically relative to the mirror axis of rotation so that at least one of a mirror central axis and mirror axis of symmetry of the mirror element aligned parallel to the mirror axis of rotation is set apart from the mirror axis of rotation.

5. The micromechanical assembly as recited in claim 1 , wherein the at least one frame spring is a spiral spring able to be bent into an S-shape.

6. The micromechanical assembly as recited in claim 1 , wherein at least one of: a frame central axis and frame axis of symmetry of the drive frame aligned parallel to the mirror axis of rotation, is set apart from the mirror axis of rotation.

7. The micromechanical assembly as recited in claim 1 , wherein the drive frame is suspended from the holder by two frame springs formed symmetrically relative to a frame-spring axis of symmetry, and the mirror axis of rotation is at least one of aligned parallel to the frame-spring axis of symmetry, and lies on the frame-spring axis of symmetry.

8. The micromechanical assembly as recited in claim 1 , wherein at least sub-components of the holder, the drive frame, the at least one frame spring, the first mirror spring, the second mirror spring and the mirror element are patterned out of a semiconductor substrate.

9. The micromechanical assembly as recited in claim 8 , wherein the drive frame, the at least one frame spring, the first mirror spring, the second mirror spring and the mirror element are encapsulated by at least one first cover plate and one at least partially light-transmitting second cover plate.

10. The micromechanical assembly as recited in claim 9 , wherein on the first cover plate, a magnet is disposed which is framed at least partially by a flux-guide plate bent in a U-shape.

11. The micromechanical assembly as recited in claim 1 , wherein the drive frame is configured to move in a substantially linear motion in response to an alternating current being conducted in the coil device in the presence of a magnet.

12. The micromechanical assembly as recited in claim 1 , wherein the at least one frame spring is configured so that a second end connected to the holder remains in a substantially fixed position while the second end moves with the drive motion.

13. The micromechanical assembly as recited in claim 1 , wherein the drive force is a substantially linear drive force.

14. The micromechanical assembly as recited in claim 1 , wherein the drive frame is configured to move with a drive motion having at least one motion component perpendicular to a plane defined by the holder.

15. A method for manufacturing a micromechanical assembly, comprising:
suspending a drive frame, having at least one energizable coil device disposed at least one of on and in the drive frame, from a holder with the aid of at least one frame spring, the at least one frame spring configured to bend so that an entire end of the at least one frame spring connected to the drive frame moves, in response to a drive force, with a drive motion having a component perpendicular to a mirror axis of rotation of a mirror element; and
suspending the mirror element from the drive frame by a first mirror spring and a second mirror spring in such a way that the mirror element is at least partially framed by the drive frame and is situated between the first mirror spring and the second mirror spring, wherein the mirror element is suspended from the drive frame asymmetrically relative to the mirror axis of rotation, about which the mirror element is adjusted in relation to the drive frame with the aid of a drive motion of the drive frame upon operation of the micromechanical assembly.

16. The method as recited in claim 15 , wherein the mirror element has a center of mass which is set apart from the mirror axis of rotation.

17. The method as recited in claim 15 , wherein the mirror element includes a mirror plate with an additional mass disposed on the mirror plate asymmetrically relative to the mirror axis of rotation.

18. A method for operating a micromechanical assembly having a holder, a drive frame which is joined to the holder via at least one frame spring, and a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the first mirror spring and the second mirror spring, and the mirror element being suspended from the drive frame asymmetrically relative to a mirror axis of rotation, the method comprising:
setting the mirror element into a rotational motion, directed about the mirror axis of rotation, in relation to the drive frame, by applying a drive force to set the entire drive frame into a drive motion substantially perpendicular to the mirror axis of rotation,
wherein applying the drive force causes an entire end of the at least one frame spring connected to the drive frame to move with the drive motion substantially perpendicular to the mirror axis of rotation of the mirror element.

19. The method as recited in claim 18 , wherein the mirror element is set into the rotational motion, directed about the mirror axis of rotation, in relation to the drive frame by exciting the drive frame to a pure transversal motion as the drive motion substantially perpendicular to the mirror axis of rotation.

20. The method as recited in claim 18 , wherein the mirror element has a center of mass which is set apart from the mirror axis of rotation.

21. The method as recited in claim 18 , wherein the mirror element includes a mirror plate with an additional mass disposed on the mirror plate asymmetrically relative to the mirror axis of rotation.

22. A micromechanical assembly, comprising:
a holder;
a drive frame having at least one energizable coil device and which is joined to the holder via at least one frame spring, the at least one frame spring configured to bend so that the entire drive frame moves in response to a drive force with a drive motion substantially

Assignees

• Muchow Joerg
• Grutzeck Helmut
• Franz Jochen
• Lestyan Zoltan
• Bosch Gmbh Robert

Inventors

• Muchow Joerg
• Grutzeck Helmut
• Franz Jochen
• Lestyan Zoltan

Classifications

• Y10T29/4902

  Electromagnet, transformer or inductor · CPC title

• B81B2203/0109

  Bridges · CPC title

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• G02B26/085 Primary

  the reflecting means being moved or deformed by electromagnetic means · CPC title

• B81B2203/0154

  Torsion bars · CPC title