Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
US-9739998-B2 · Aug 22, 2017 · US
This page is not indexed by search engines while we improve data quality.
Patent family 49510941
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 49510941 |
| Family type | — |
| Earliest priority | May 15, 2012 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9739998B2 — Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly |
Representative publication
Best representative member for this family based on priority and filing country.
US9739998B2 — Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly (published Aug 22, 2017)
Member publications
Related publications in this family.