Chemical mechanical polishing pad, polishing layer analyzer and method

Patent metadata

Field	Value
Publication number	US-9737971-B2
Application number	US-201614993882-A
Country	US
Kind code	B2
Filing date	Jan 12, 2016
Priority date	Jan 12, 2016
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

A chemical mechanical polishing pad, polishing layer analyzer is provided, wherein the analyzer is configured to detect macro inhomogeneities is polymeric sheets and to classify the polymeric sheets as either acceptable or suspect.

First claim

We claim:

1. A chemical mechanical polishing pad, polishing layer analyzer, comprising:
a magazine for holding a plurality of polymeric sheets, wherein each polymeric sheet (i) comprises: a polymer microelement composite, comprising: a polymer and a plurality of microelements, wherein the plurality of microelements are dispersed in the polymer; and, (ii) has a thickness, T S , between a transmission surface and an impinging surface; wherein the transmission surface and the impinging surface are substantially parallel;
a sequencer;
a light source, wherein the light source emits a beam having a luminescence spectrum exhibiting an emission peak wavelength of 460 to 490 nm and a full width at half max, FWHM, of ≦50 nm;
a light detector;
a digital image data acquisition device coupled to the light detector; and,
an image data processing unit coupled to the digital image data acquisition device;
wherein the sequencer is configured to extract from the magazine and convey the plurality of polymeric sheets, one polymeric sheet at a time, to a position interposed between the light source and the light detector; wherein the beam emitted from the light source is oriented to impinge on the impinging surface; and, wherein the light detector is oriented to detect a transmitted light from the beam that is transmitted through the thickness, T S , and out the transmission surface; wherein the light detector is configured to convert an intensity of the transmitted light into an electrical signal; wherein the digital image data acquisition device coupled to the light detector is configured to covert the electrical signal from the light detector into a digital signal; wherein the image data processing unit coupled to the digital image data acquisition device is configured to process the digital signal from the digital image data acquisition device to detect macro inhomogeneities and to classify polymeric sheets as either acceptable for use as a polishing layer in a chemical mechanical polishing pad, or as suspect; wherein the plurality of polymeric sheets is divided into a population of acceptable sheets and a population of suspect sheets.

2. The chemical mechanical polishing pad, polishing layer analyzer of claim 1 , wherein the sequencer is further configured to return the plurality of polymeric sheets to the magazine.

3. The chemical mechanical polishing pad, polishing layer analyzer of claim 2 , wherein the magazine has a design capacity for holding at least 10 polymeric sheets.

4. The chemical mechanical polishing pad, polishing layer analyzer of claim 1 , further comprising:
a display to facilitate visual inspection of the plurality of polymeric sheets.

5. A method for analyzing polymeric sheets for suitability as a polishing layer in a chemical mechanical polishing pad, comprising:
providing a plurality of polymeric sheets, wherein each polymeric sheet (i) comprises: a polymer microelement composite, comprising: a polymer and a plurality of microelements, wherein the plurality of microelements are dispersed in the polymer; and, (ii) has a thickness, T S , between a transmission surface and an impinging surface; wherein the transmission surface and the impinging surface are substantially parallel;
providing an automated inspection system, comprising:
a light source, wherein the light source emits a beam having a luminescence spectrum exhibiting an emission peak wavelength of 460 to 490 nm and a full width at half max, FWHM, of ≦50 nm;
a light detector;
a digital image data acquisition device; and,
an image data processing unit;
conveying the plurality of polymeric sheets, one at a time, between the light source and the light detector; wherein the beam emitted from the light source is oriented to impinge on the impinging surface; and, wherein the light detector is oriented to detect a transmitted light from the beam that is transmitted through the thickness, T S , and out the transmission surface;

wherein the transmitted light has at least one detectable property;
wherein the at least one detectable property includes an intensity of the transmitted light;
wherein the intensity of the transmitted light is converted into an electrical signal by the light detector;
wherein the electrical signal from the light detector is converted into a digital signal by the digital image data acquisition device; and,
wherein the digital signal from the digital image data acquisition device is processed by the image data processing unit, wherein the image data processing unit is configured to detect macro inhomogeneities and to classify polymeric sheets as either acceptable or suspect; and,
wherein the plurality of polymeric sheets is divided into a population of acceptable sheets and a population of suspect sheets.

6. The method of claim 5 , further comprising:
choosing a select sheet from the population of suspect sheets.

7. The method of claim 6 , wherein the automated inspection system, further comprises:
a display;
wherein an image of the select sheet is displayed on the display.

8. The method of claim 7 , further comprising:
performing a visual inspection of the select sheet, wherein the visual inspection is facilitated by the image of the select sheet displayed on the display; and,
either (i) reclassifying the select sheet, based on the visual inspection, as acceptable, wherein the select sheet is then added to the population of acceptable sheets; or, (ii) classifying the select sheet, based on the visual inspection, as a defective, wherein the select sheet is then added to a population of defective sheets.

9. The method of claim 5 , further comprising:
forming a polishing surface by machining at least one groove into an acceptable sheet to form a groove pattern; wherein the groove pattern is adapted for polishing a substrate; and,
incorporating the acceptable sheet into the chemical mechanical polishing pad as the polishing layer.

Assignees

• Rohm & Haas Elect Materials Cmp Holdings Inc
• Dow Global Technologies Llc

Inventors

• Acholla Francis V
• Wank Andrew
• Gazze Mark
• Chang Scott
• Tsai Jeff
• Heeschen William A
• Tate James David
• Chiang Leo H
• Chin Swee-Teng

Classifications

• B24B37/22

  characterised by a multi-layered structure · CPC title

• B24B37/013 Primary

  Devices or means for detecting lapping completion · CPC title