Substrate holder and method of manufacturing a substrate holder

Patent metadata

Field	Value
Publication number	US-9737934-B2
Application number	US-201615296968-A
Country	US
Kind code	B2
Filing date	Oct 18, 2016
Priority date	Feb 3, 2012
Publication date	Aug 22, 2017
Grant date	Aug 22, 2017

Abstract

An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.

First claim

The invention claimed is:

1. A method of repairing an object holder for use in a lithographic apparatus, the object holder having a plurality of burls to support an object and having a damaged burl having a rough upper surface, the method comprising:
grinding the rough upper surface of the damaged burl so as to provide a smooth surface; and
rebuilding the damaged burl to at least its original shape and/or height by adding a layer on top of the smooth surface such that its height is higher than the height of the plurality of burls.

2. The method of claim 1 , wherein the adding the layer on top of the smooth surface comprises laser-sintering.

3. The method of claim 2 , wherein the laser-sintering comprises:
applying a layer of powder on top of the smooth surface; and
selectively irradiating the layer of powder with a radiation beam so as to cause at least partial melting of the powder at irradiated locations.

4. The method of claim 2 , wherein the laser-sintering comprises:
irradiating a location on the smooth surface; and
jetting powder at the irradiated location.

5. The method of claim 1 , wherein the rebuilding the damaged burl comprises laser-sintering.

6. The method of claim 1 , wherein the rebuilding the damaged burl comprises polishing the damaged burl to level match the height of the plurality of burls.

7. The method of claim 1 , further comprising providing a temporary protective coating to cover the plurality of burls during the grinding of the rough upper surface of the damaged burl.

8. The method of claim 1 , further comprising cleaning and/or pre-treating the smooth surface.

9. The method of claim 8 , wherein the smooth surface is cleaned with ozone.

10. The method of claim 8 , wherein the smooth surface is pre-treated by application of a primer.

11. The method of claim 1 , wherein the rebuilt burl comprises at least one material selected from the group consisting of: Ti, Si, fused silica, cordierite, diamond-like carbon, SiC, SiO 2 , AlN, TiN and CrN.

12. The method of claim 1 , wherein the rebuilt burl comprises a matrix material and particles embedded in the matrix material.

13. The method of claim 1 , wherein the rebuilt burl comprises a first layer of a first material and a second layer of a second material that is different from the first material.

14. The method of claim 13 , wherein the first and second materials are different in a property or a component.

15. The method of claim 1 , wherein the object is a substrate or a patterning device.

16. A method of repairing an object holder for use in a lithographic apparatus, the object holder having a plurality of burls to support an object and having a damaged burl having a rough upper surface, the method comprising:
grinding the rough upper surface of the damaged burl so as to provide a smooth surface; and
rebuilding the damaged burl to at least its original shape and/or height by adding a layer on top of the smooth surface by laser-sintering.

17. The method of claim 16 , wherein the laser-sintering comprises:
applying a layer of powder on top of the smooth surface; and
selectively irradiating the layer of powder with a radiation beam so as to cause at least partial melting of the powder at irradiated locations.

18. The method of claim 16 , wherein the laser-sintering comprises:
irradiating a location on the smooth surface; and
jetting powder at the irradiated location.

19. The method of claim 16 , wherein the rebuilt burl comprises a first layer of a first material and a second layer of a second material that is different from the first material.

20. The method of claim 16 , wherein the rebuilt burl comprises a matrix material and particles embedded in the matrix material.

Assignees

• Asml Netherlands Bv

Inventors

• Lafarre Raymond Wilhelmus Louis
• Donders Sjoerd Nicolaas Lambertus
• Ten Kate Nicolaas
• Dziomkina Nina Vladimirovna
• Karade Yogesh Pramod
• Rodenburg Elisabeth Corinne

Classifications

• B22F10/66

  by mechanical means · CPC title

• B22F10/25

  Direct deposition of metal particles, e.g. direct metal deposition [DMD] or laser engineered net shaping [LENS] · CPC title

• B22F10/28

  Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM] · CPC title

• B22F7/062 Primary

  involving the connection or repairing of preformed parts · CPC title

• G03F7/70341 Primary

  Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041) · CPC title