Optical projection array exposure system

Patent metadata

Field	Value
Publication number	US-9733573-B2
Application number	US-201614993071-A
Country	US
Kind code	B2
Filing date	Jan 11, 2016
Priority date	Jun 4, 2012
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

A spatial light modulator imaging system is disclosed. The system comprises an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system, a projection module configured to project the illumination light to a substrate, and an illumination-projection beam separator coupled between the illumination module and the projection module, where the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, and where the illumination optical axis and the projection optical axis are substantially parallel to each other.

First claim

What is claimed is:

1. An illumination-projection assembly, comprising:
a first prism, wherein the first prism comprises:
a first surface;
a second surface; and
a first hypotenuse; and

a second prism, wherein the second prism comprises:
a third surface;
a fourth surface;
a second hypotenuse; wherein the first hypotenuse and the second hypotenuse are facing one another, and wherein the first hypotenuse and the second hypotenuse are separated by an air gap; and
a dig…

Assignees

• Applied Materials Inc

Inventors

• Markle David
• Laidig Thomas
• Kaskey Jeffrey
• Chen Jang Fung

Classifications

• G03F7/7015 Primary

  Physics · mapped topic

• G03F7/70291 Primary

  Physics · mapped topic

• G03B27/42

  Physics · mapped topic

• G02B5/122

  Physics · mapped topic

• G02B5/136

  Physics · mapped topic