Systems and methods to determine stiction failures in MEMS devices

Patent metadata

Field	Value
Publication number	US-9733268-B2
Application number	US-201414185672-A
Country	US
Kind code	B2
Filing date	Feb 20, 2014
Priority date	Oct 7, 2013
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

Various embodiments of the invention provide for stiction testing in MEMS devices, such as accelerometers. In certain embodiments, testing is accomplished by a high voltage smart circuit that enables an analog front-end circuit to accurately read the position of a movable proof-mass relative to a biased electrode in order to allow the detection of both contact and release conditions. Testing allows to detect actual or potential stiction failures and to reject defective parts in a Final Test stage of a manufacturing process where no other contributors to stiction issue can occur, thereby, minimizing stiction failure risks and extending the reliability of MEMS devices.

First claim

The invention claimed is:

1. A testing apparatus to determine stiction failure in MEMS devices, the apparatus comprising:
a MEMS device comprising at least a first sensing electrode, at least one stopper electrode that is separate from the first sensing electrode, and a rotatable proof mass;
a first front-end circuit coupled to the MEMS device, the first front-end circuit, in a stiction test mode in which the rotatable proof mass rotates toward the first sensing electrode and contacts the stopper electrode but not the first sensing electrode, detects a change in capacitance between the first sensing electrode and the rotatable proof mass to detect a stiction tendency between the rotatable proof mass and the stopper electrode, the first front-end circuit, in an acceleration reading mode, being decoupled from the MEMS device;
a second front-end circuit coupled to the MEMS device, the second front-end circuit, in the acceleration reading mode, detecting a capacitance between the rotatable proof mass and the first sensing electrode;
a forcing driver circuit that, in the stiction test mode, applies a bias voltage to the first sensing electrode to cause a contact between the stopper electrode and the rotatable proof mass; and
a high-voltage control circuit coupled to the MEMS device, the high-voltage control circuit decoupling and coupling the first front-end circuit from the MEMS device and decoupling and coupling the forcing driver circuit from the first sensing electrode by selectively switching between the acceleration reading and stiction test modes, respectively;
wherein in the stiction test mode the high-voltage control circuit couples the first front-end circuit and the forcing driver circuit to the MEMS device and decouples the second front-end circuit from the MEMS device, and in the acceleration reading mode the high-voltage control circuit decouples the first front-end circuit and the forcing driver circuit from the MEMS device and couples the second front-end circuit to the MEMS device.

2. The testing apparatus according to claim 1 , wherein the first front-end circuit is configured to detect the change in capacitance in response to a decrease in the bias voltage.

3. The testing apparatus according to claim 1 , wherein the first front-end circuit comprises a capacitive sensing circuit that detects a position of the rotatable proof mass.

4. The testing apparatus according to claim 1 , further comprising a second sensing electrode that is grounded during the stiction test mode.

5. The testing apparatus according to claim 1 , further comprising:
a measurement circuit configured to generate C/V curve data; and
a control logic coupled to the measurement circuit, the control logic configured to detect the contact between the stopper electrode and the rotatable proof mass.

6. A testing system to determine stiction failure in MEMS devices, the system comprising:
a MEMS device comprising first and second sensing electrodes, at least one stopper electrode that is separate from the first and second sensing electrodes, and a rotatable proof mass;
a high-voltage control circuit coupled to the MEMS device, the high-voltage control circuit selectively switches between an acceleration reading mode of operation and a stiction test mode of operation, wherein in the stiction test mode the rotatable proof mass rotates toward the first sensing electrode and contacts the stopper electrode but not the first sensing electrode;
a first front-end circuit coupled by the high-voltage control circuit to the MEMS device in the stiction test mode, the first front-end circuit, in the stiction test mode, detects a stiction tendency between the rotatable proof mass and the stopper electrode;
a second front-end circuit coupled by the high-voltage control circuit to the MEMS device in the acceleration reading mode, the second front-end circuit, in the acceleration reading mode, detects a capacitance between the rotatable proof mass and one of the first and second sensing electrodes; and
a forcing driver circuit coupled to the MEMS device, the forcing driver circuit, in the stiction test mode, alternately applies a bias voltage to one of the first and second sensing electrodes to cause contact between the rotatable proof mass and the stopper electrode;
wherein in the stiction test mode the high-voltage control circuit couples the first front-end circuit and the forcing driver circuit to the MEMS device and decouples the second front-end circuit from the MEMS device, and in the acceleration reading mode the high-voltage control circuit decouples the first front-end circuit and the forcing driver circuit from the MEMS device and couples the second front-end circuit to the MEMS device.

7. The testing system according to claim 6 , further comprising a plurality of high-voltage transistors that are configured to withstand the bias voltage, and wherein the second front-end circuit is not configured to withstand the bias voltage.

8. The testing system according to claim 7 , wherein the high-voltage control circuit comprises a first high-voltage source that controls the plurality of high voltage transistors.

9. The testing system according to claim 8 , further comprising a selector to select between the first high-voltage source and a second high-voltage source to drive the forcing driver circuit.

10. The testing system according to claim 9 , wherein the second high-voltage source is external to the testing system.

11. The testing system according to claim 6 , wherein the second front-end circuit comprises circuitry to detect a distance between the rotatable proof mass and one of the first and second sensing electrodes.

12. The testing system according to claim 6 , wherein the first front-end circuit comprises circuitry to detect a capacitance between one of the first and second sensing electrodes and the rotatable proof mass, the capacitance being indicative of whether contact has occurred between the stopper electrode and the rotatable proof mass.

13. The testing system according to claim 6 , wherein the forcing driver circuit is configured to gradually increase and decrease the bias voltage.

14. A method to determine a stiction tendency in MEMS devices, the method comprising:
providing a MEMS device comprising a sensing electrode, at least one stopper electrode that is separate from the sensing electrode, and a rotatable proof mass, the sensing electrode being selectively coupled to first and second front-end circuits to switch between, respectively, a stiction test mode and an acceleration reading mode of operation;
decoupling the MEMS device from the second front-end circuit and coupling the MEMS device to the first front-end circuit and a forcing driver circuit to perform the stiction test mode;
applying a bias voltage with the forcing driver circuit to the sensing electrode of the MEMS device, the bias voltage causes the rotatable proof mass to rotate toward the sensing electrode and contact the stopper electrode but not the sensing electrode;
decreasing the bias voltage applied with the forcing driver circuit;
determining with the first front-end circuit a change in capacitance between the sensing electrode and the rotatable proof mass;
determining a stiction tendency between the stopper electrode and the rotatable proof mass based on the change in capacitance; and
decoupling the MEMS device from the first front-end circuit and the forcing driver circuit and coupling the MEMS device to the second front-end circuit to perform the acceleration reading mode.

15. The method according to claim 14 , wherein determining the stiction tenden

Assignees

• Maxim Integrated Products
• Hanking Electronics Ltd

Inventors

• Membretti Giorgio Massamiliano
• Casiraghi Roberto
• Padovani Igino

Classifications

• G01P2015/0874

  using means for preventing stiction of the seismic mass to the substrate · CPC title

• G01P21/00

  Testing or calibrating of apparatus or devices covered by the preceding groups · CPC title

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01P2015/0871

  using stopper structures for limiting the travel of the seismic mass · CPC title

• B81C1/00976

  Control methods for avoiding stiction, e.g. controlling the bias voltage · CPC title