Systems and methods to determine stiction failures in MEMS devices
US-9733268-B2 · Aug 15, 2017 · US
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Patent family 52775864
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52775864 |
| Family type | — |
| Earliest priority | Oct 7, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9733268B2 — Systems and methods to determine stiction failures in MEMS devices |
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US9733268B2 — Systems and methods to determine stiction failures in MEMS devices (published Aug 15, 2017)
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