Deep silicon via as a drain sinker in integrated vertical DMOS transistor

Patent metadata

Field	Value
Publication number	US-9728632-B2
Application number	US-201414556196-A
Country	US
Kind code	B2
Filing date	Nov 30, 2014
Priority date	May 30, 2012
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

A vertical DMOS device implements one or more deep silicon via (DSV) plugs, thereby significantly reducing the layout area and on-resistance (RDS ON ) of the device. The DSV plugs extend through a semiconductor substrate to contact a conductively doped buried diffusion region, which forms the drain of the vertical DMOS device. Methods for fabricating the vertical DMOS device are compatible with conventional sub-micron VLSI processes, such that the vertical DMOS device can be readily fabricated on the same integrated circuit as CMOS devices and analog devices, such as lateral double-diffused MOS (LDMOS) devices.

First claim

We claim:

1. A semiconductor device comprising:
a first semiconductor well region having a first conductivity type;
a conductively doped buried layer located below, and continuous with, the first semiconductor well region, wherein the conductively doped buried layer has the first conductivity type;
a metal via plug that extends through the first semiconductor well region and into the conductively doped buried layer;
a metal liner layer located between the metal via plug and the first semiconductor well region, wherein the metal liner layer contacts the first semiconductor well region;
a plurality of body regions located in the first semiconductor well region, wherein the plurality of body regions have a second conductivity type, opposite the first conductivity type;
a contact region located in each of the body regions, wherein each contact region has the second conductivity type;
one or more source regions located in each of the body regions, wherein each of the one or more source regions has the first conductivity type; and
a polysilicon gate electrode that includes a plurality of polygonal openings.

2. The semiconductor device of claim 1 , further comprising polysilicon gate electrodes that extend over the first semiconductor well region, the body regions and the source regions.

3. The semiconductor device of claim 2 , wherein each of the polysilicon gate electrodes has a rectangular shape, and wherein the polysilicon gate electrodes are laid out in parallel.

4. The semiconductor device of claim 1 , wherein the plurality of polygonal openings include a first polygonal opening, wherein one of the body regions, one of the contact regions and one of the source regions is located within the first polygonal opening.

5. The semiconductor device of claim 4 , wherein the plurality of polygonal openings include a second polygonal opening, wherein the metal via plug extends through the second polygonal opening.

6. The semiconductor device of claim 1 , further comprising a diffusion region of the first conductivity type located in the conductively doped buried layer, adjacent to the metal via plug.

7. The semiconductor device of claim 1 , further comprising a field insulating structure that extends into the first semiconductor well region, wherein the field insulating structure defines the location of the semiconductor device, and wherein the metal via plug extends through the field insulating structure.

8. The semiconductor device of claim 7 , further comprising a pre-metal dielectric layer located over the field insulating structure, wherein the metal via plug extends through the pre-metal dielectric layer.

9. The semiconductor device of claim 7 , further comprising a diffusion region having the first conductivity type that laterally surrounds the metal via plug within the first semiconductor well region.

Assignees

• Tower Semiconductor Ltd

Inventors

• Levin Sharon
• Lee Zachary K
• Shapira Shye

Classifications

• H01L21/82385

  Electricity · mapped topic

• H01L29/4916

  Electricity · mapped topic

• H01L27/088

  Electricity · mapped topic

• H01L29/41741

  Electricity · mapped topic

• H01L21/823857

  Electricity · mapped topic