Semiconductor structure and methods

Patent metadata

Field	Value
Publication number	US-9728470-B1
Application number	US-201615150885-A
Country	US
Kind code	B1
Filing date	May 10, 2016
Priority date	May 10, 2016
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

In an embodiment, a method for evaluating a surface of a semiconductor substrate includes directing an incident light beam having multiple wavelengths at a position of a layer having a surface profile configured to form an optical diffraction grating, the layer including a Group III nitride, detecting a reflected beam, reflected from the position, and obtaining a spectrum of reflected intensity as a function of wavelength, the spectrum being representative of the surface profile of the position of the layer from which the beam is reflected, comparing the spectrum obtained from the detected beam with one or more reference spectra stored in memory, and estimating at least one parameter of the surface profile.

First claim

What is claimed is:

1. A method for fabricating a semiconductor wafer, the method comprising:
epitaxially depositing at least one Group III nitride layer on a substrate wafer;
forming a test structure in a Group III nitride layer, the test structure having a regular pattern of trenches forming an optical diffraction grating, each trench having a least one dimension corresponding to a dimension of a recess formed in a Group III nitride layer of a Group III nitride-based transistor device;
determining a parameter of the test structure by:
directing an incident light beam having multiple wavelengths between 190 nm and 365 nm at the test structure;
detecting a reflected beam, reflected from the test structure, and obtaining a spectrum of reflected intensity as a function of wavelength, the spectrum being representative of a feature of the test structure;
comparing the spectrum with one or more reference spectra stored in memory,
estimating at least one parameter of the test structure using the one or more reference spectra; and

if the estimated parameter of the test structure is within a tolerance range, further processing the substrate, or
if the estimated parameter of the test structure is outside of a tolerance range, discarding the substrate or adjusting a processing parameter.

2. The method of claim 1 , wherein the surface of the Group III nitride layer is etched to form a barrier recess in a component position and the trenches of the test structure.

3. The method of claim 1 , wherein the surface of the Group III nitride layer is etched to form a mesa in a component position and the trenches of the test structure.

4. The method of claim 1 , wherein the parameter is a depth of the trenches.

5. The method of claim 1 , further comprising comparing the spectrum with one or more reference spectra of a library of reference spectra stored in memory and determining a best fit with one of the reference spectra of the library.

6. The method of claim 5 , further comprising estimating at least one parameter of the test structure using the best fit reference spectrum.

7. The method of claim 1 , wherein the incident light beam is directed with a first polarization at the test structure.

8. The method of claim 7 , further comprising directing the incident light beam with a second polarization different from the first polarization at the test structure and detecting a further reflected beam.

9. The method of claim 1 , further comprising directing the incident light beam at a further test structure configured to form an optical grating and detecting a reflected beam, reflected from the further test structure.

Assignees

• Infineon Technologies Austria Ag

Inventors

• Heider Franz
• Brunner Bernhard
• Ostermaier Clemens

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/27

  Structural arrangements therefor · CPC title

• H10P14/3416 Primary

  Nitrides · CPC title

• G01B11/0633

  using one or more discrete wavelengths · CPC title

• G01B11/24

  for measuring contours or curvatures · CPC title