Positioning system using surface pattern recognition and interpolation

Patent metadata

Field	Value
Publication number	US-9726987-B2
Application number	US-201514689570-A
Country	US
Kind code	B2
Filing date	Apr 17, 2015
Priority date	Apr 17, 2014
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.

First claim

What is claimed is:

1. A stage assembly for positioning a device along a first axis, the stage assembly comprising:
a base;
a stage that is adapted to retain the device and moves above the base;
a mover assembly that moves the stage along the first axis relative to the base;
a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy, the first sensor system including at least one optical sensor, the first sensor system capturing a plurality of successive images and monitoring the movement of the stage by comparing at least two images to generate the first signal;
a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and
a control system that controls the mover assembly using at least one of the first signal and the second signal.

2. The stage assembly of claim 1 wherein the second sensor accuracy is greater than the first sensor accuracy.

3. The stage assembly of claim 1 wherein the second sensor system is an encoder system.

4. The stage assembly of claim 1 wherein the second sensor system is an interferometer system.

5. The stage assembly of claim 1 wherein the control system is configured to utilize the second signal to calibrate the first signal.

6. The stage assembly of claim 1 wherein the control system is configured to use the first signal to control the mover assembly during initialization and during a loss of the second signal.

7. The stage assembly of claim 1 wherein the control system is configured to use the first signal to control the mover assembly during coarse movement of the stage.

8. The stage assembly of claim 1 wherein the mover assembly is a planar motor.

9. The stage assembly of claim 1 wherein the mover assembly moves the stage along a second axis, along a third axis, and about the first, second and third axes relative to the stage base, and wherein the first sensor system includes a plurality of spaced apart optical sensors that cooperate to monitor the movement of the stage along the first, second and third axes, and about the first, second and third axes, wherein each optical sensor captures a plurality of successive images.

10. The stage assembly of claim 1 wherein the first axis is vertically oriented, wherein each image of the first sensor system can be analyzed to determine the movement of the stage along the first axis.

11. An exposure apparatus including an illumination system, and the stage assembly of claim 1 that moves the stage relative to the illumination system.

12. A process for manufacturing a device that includes the step of providing a substrate and forming an image to the substrate with the exposure apparatus of claim 11 .

13. A method for positioning a device along a first axis, the method comprising:
providing a base;
retaining the device with a stage;
moving the stage along the first axis relative to the base with a mover assembly;
monitoring the movement of the stage along the first axis with a first sensor system that generates a first signal, the first sensor system having a first sensor accuracy, the first sensor system including at least one optical sensor, the first sensor system capturing a plurality of successive images and monitoring the movement of the stage by comparing at least two images to generate the first signal;
monitoring the movement of the stage along the first axis with a second sensor system that generates a second signal, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy; and
controlling the mover assembly with a control system that uses at least one of the first signal and the second signal.

14. A process for manufacturing a device that includes the step of positioning the device along the first axis of claim 13 .

15. The method of claim 13 wherein the step of moving includes moving the stage along a second axis, along a third axis, and about the first, second and third axes relative to the stage base with the mover assembly; and wherein the step of monitoring the movement of the stage along the first axis with the first sensor system includes monitoring the movement of the stage along the first, second and third axes, and about the first, second and third axes with the first sensor system, the first sensor system including a plurality of spaced apart optical sensors that each captures a plurality of successive images.

16. The method of claim 13 wherein the step of moving includes the first axis being vertically oriented; and wherein the step of monitoring the movement of the stage along the first axis with the first sensor system includes analyzing each image of the first sensor system to determine the movement of the stage along the first axis.

17. The method of claim 13 further comprising the step of calibrating the first signal with the second signal.

18. The method of claim 13 wherein the step of controlling includes controlling the mover assembly with the control system using the first signal during initialization and during a loss of the second signal.

19. The method of claim 13 wherein the step of controlling includes controlling the mover assembly with the control system using the first signal during coarse movement of the stage.

20. A stage assembly for positioning a device along a first axis, the stage assembly comprising:
a base;
a stage that is adapted to retain the device and moves above the base;
a mover assembly that moves the stage along the first axis relative to the base;
a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy;
a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and
a control system that controls the mover assembly using at least one of the first signal and the second signal, the control system being configured to use the first signal to control the mover assembly during initialization and during a loss of the second signal.

Assignees

• Nikon Corp

Inventors

• Coon Paul Derek
• Wells Jonathan K
• Rosa Matthew
• Binnard Michael

Classifications

• G03F7/70725 Primary

  control · CPC title

• G03F7/70716

  Stages · CPC title

• G03F7/70775

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title

• H02K2201/18

  Machines moving with multiple degrees of freedom · CPC title

• G03F9/7034

  Leveling · CPC title