Apparatus for manufacturing display device and method of manufacturing display device

Patent metadata

Field	Value
Publication number	US-9725798-B2
Application number	US-201514598027-A
Country	US
Kind code	B2
Filing date	Jan 15, 2015
Priority date	Aug 4, 2014
Publication date	Aug 8, 2017
Grant date	Aug 8, 2017

Abstract

An apparatus for manufacturing a display device and a method of manufacturing a display device is disclosed. In one aspect, the apparatus includes a guider configured to guide a substrate on which a display portion is formed, a plasma sprayer configured to be spaced apart from the display portion and configured to spray plasma onto the substrate and a mask configured to be arranged over the substrate and cover the display portion. The mask includes a body portion configured to face the display portion and a protrusion portion formed at an end of the body portion and configured to extend towards the substrate.

First claim

What is claimed is:

1. A method of manufacturing a display device, the method comprising:
inserting a substrate on which a display portion is formed on a display area into a chamber, wherein the display portion has top and bottom surfaces opposing each other, and a side surface interconnecting the top and bottom surfaces;
placing a mask over the display area; and
spraying plasma onto the substrate so as to etch a non-display area of the substrate,
wherein the mask comprises:
a body portion arranged over the display area and having first and second ends opposing each other; and
a protrusion portion extending towards the substrate from the first and second ends of the body portion to prevent the plasma from flowing into the space between the substrate and the body portion, wherein the protrusion portion is configured to surround at least a portion of the side surface of the display portion, wherein the mask has upper and lower surfaces opposing each other, wherein the lower surface faces the display portion and the substrate, wherein each of the first and second ends of the body portion has upper and lower portions, wherein the protrusion portion extends from the lower portion of each end, and wherein the upper portion of each end is inclined with respect to the remaining portion of the upper surface of the mask.

2. The method of claim 1 , wherein the protrusion portion has a cross-sectional surface which has a substantially triangular, oval, or circular shape.

3. The method of claim 1 , wherein an insertion groove is formed in one of the first and second ends of the body portion and the protrusion portion, and wherein an insertion protrusion is formed on the other of the first and second ends of the body portion and the protrusion portion.

4. The method of claim 1 , wherein the protrusion portion is formed of a flexible material.

5. The method of claim 1 , wherein the etching of the non-display area is performed in a vacuum state.

6. The method of claim 1 , wherein the protrusion portion does not overlap the display portion in the depth dimension of the display device, and wherein the protrusion portion overlaps the substrate in the depth dimension of the display device.

7. The method of claim 1 , wherein the protrusion portion has a thickness greater than that of the display portion.

8. The method of claim 1 , wherein a gap is formed between the mask and the display portion.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Suhwan
• Kim Eunho

Classifications

• H01J37/32366 Primary

  Localised processing · CPC title

• H01J37/32623

  Mechanical discharge control means · CPC title

• C23C4/127 Primary

  Chemistry & Metallurgy · mapped topic

• H01J37/32385

  Treating the edge of the workpieces · CPC title

• H01J37/32449

  Gas control, e.g. control of the gas flow · CPC title