Mask protection device, exposure apparatus, and method for manufacturing device

Patent metadata

Field	Value
Publication number	US-9715175-B2
Application number	US-201214405042-A
Country	US
Kind code	B2
Filing date	Jun 15, 2012
Priority date	Jun 15, 2012
Publication date	Jul 25, 2017
Grant date	Jul 25, 2017

Abstract

A reticle protection device capable of keeping a reticle therein is provided with an inner pod capable of keeping the reticle therein; an outer pod capable of keeping the inner pod therein; an electroconductive movable contact portion provided on at least one of the inner pod and the outer pod and being capable of coming into contact with an electroconductive film of the reticle; and a leaf spring for achieving electric conduction of the contact portion to at least one of the inner pod and the outer pod. The reticle is kept in the inner pod and the inner pod is kept in the outer pod, thereby enabling stable grounding of the reticle.

First claim

The invention claimed is:

1. A mask protection device capable of keeping a mask therein, comprising:
a first housing container capable of keeping the mask therein;
a second housing container capable of keeping the first housing container therein;
an electroconductive movable member provided on at least one of the first housing container and the second housing container and being capable of coming into contact with an electroconductive film of the mask; and
a first electric conduction member for achieving electric conduction of the movable member to at least one of the first housing container and the second housing container.

2. The mask protection device according to claim 1 , wherein
the movable member has an electroconductive resin portion capable of coming into contact with the mask.

3. The mask protection device according to claim 1 , having a connection member which connects the movable member to at least one of the first housing container and the second housing container,
wherein the connection member also serves as the first electric conduction member.

4. The mask protection device according to claim 1 , wherein
the movable member is provided on the first housing container,
wherein the first electric conduction member achieves electric conduction between the movable member and the first housing container, and
wherein the second housing container comprises a second electric conduction member which achieves electric conduction between the first housing container and at least a partial region of an outer surface of the second housing container.

5. The mask protection device according to claim 1 , wherein
the movable member includes:
a first contact portion capable of coming into contact with a pattern surface of the mask; and
a second contact portion capable of coming into contact with a back surface to the pattern surface.

6. The mask protection device according to claim 1 , wherein
the movable member is provided on the first housing container.

7. The mask protection device according to claim 1 , further comprising
a displacing device which brings the movable member into contact with the mask when a pressure around the first housing container becomes higher than a predetermined value and which moves the movable member away from the mask when the pressure around the first housing container becomes lower than the predetermined value.

8. The mask protection device according to claim 1 , further comprising
a displacing device which, while the first housing container keeping the mask therein is kept in the second housing container, brings the movable member into contact with the mask when the second housing container is closed and moves the movable member away from the mask when the second housing container is opened.

9. The mask protection device according to claim 1 , wherein,
after the first housing container keeping the mask therein is brought into the second housing container and after the movable member comes into contact with the mask, the movable member can be moved away from the mask by a manipulation from the outside of the second housing container.

10. An exposure apparatus for illuminating a pattern with an exposure beam to expose an object with the exposure beam via the pattern and via a projection optical system, the exposure apparatus comprising:
the mask protection device as set forth in claim 1 ; and
a mask stage capable of gripping to hold the mask taken out of the mask protection device.

11. The exposure apparatus according to claim 10 , wherein
the exposure beam is EUV light.

12. A method for manufacturing a device, comprising:
forming a pattern on an object with use of the exposure apparatus as set forth in claim 10 ; and
processing the object on which the pattern has been formed.

Assignees

• Ota Kazuya
• Nikon Corp

Inventors

• Ota Kazuya

Classifications

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• G03F7/70741

  Handling masks outside exposure position, e.g. reticle libraries · CPC title

• G02B27/0006

  with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title

• G03F7/70058 Primary

  Mask illumination systems · CPC title

• G03F1/66 Primary

  Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof · CPC title