Backing plate-integrated metal sputtering target and method of producing same

Patent metadata

Field	Value
Publication number	US-9711336-B2
Application number	US-201414779345-A
Country	US
Kind code	B2
Filing date	Sep 5, 2014
Priority date	Sep 12, 2013
Publication date	Jul 18, 2017
Grant date	Jul 18, 2017

Abstract

Provided is a backing plate-integrated metal sputtering target comprising a flange part that is formed integrally with a target of which periphery becomes a backing plate, wherein the flange part comprises a structure obtained by repeating partial forging. By increasing the mechanical strength of only the flange part of the target in a backing plate-integrated sputtering target as described above, it is possible to inhibit the deformation of the target during sputtering and a change in the conventional sputtering properties; thereby the formation of thin films having superior uniformity can be realized, and the yield and reliability of semiconductor products, which are being subject to further miniaturization and higher integration, can be improved.

First claim

The invention claimed is:

1. A backing plate-integrated metal sputtering target comprising a sputtering face part and a flange part, said sputtering face and flange parts being formed integrally and said flange part being formed as a backing plate, wherein the flange part has a width of 10 to 30% of a maximum diameter of the sputtering target and a forged metallurgical structure formed by a partial forging which is a forging that forms a fraction of said flange part, the entire flange part being formed by performing a sequence of the partial forgings, and wherein the sputtering face includes a periphery part thereof which is formed by machining to remove distorted portions formed as a result of the partial forgings, the periphery part having a width of within 3 mm.

2. The backing plate-integrated metal sputtering target according to claim 1 , wherein the backing plate-integrated metal sputtering target is of a disk shape, an oval shape or a rectangular shape.

3. The backing plate-integrated metal sputtering target according to claim 2 , wherein the backing plate-integrated metal sputtering target is made of titanium or titanium alloy, and Vickers hardness Hv of the flange part is 110 or more.

4. A method of producing a backing plate-integrated metal sputtering target comprising a sputtering face part and a flange part, said sputtering face and flange parts being formed integrally and said flange part being formed around a perimeter of said sputtering face part, the method comprising the steps of:
providing a blank plate of a metal to be processed into a sputtering target;
selecting a periphery part of the blank plate for being processed into the flange part and being bounded by an entire perimeter of the blank plate, the periphery part having a width that is 10 to 30% of a maximum diameter of the sputtering target;
subjecting the periphery part to a sequence of partial forgings, each of the partial forgings processing a fraction of the peripheral part into a fraction of the flange part and the sequence of the partial forgings processing the entire periphery part into the entire flange part, the sequence of the partial forgings accompanying a formation of distorted portions in a periphery area of the sputtering face part; and
machining the sputtering face part for removing the distorted portions to thereby produce the sputtering target, the periphery area being subject to said machining having a width of within 3 mm.

5. The method of producing a backing plate-integrated metal sputtering target according to claim 4 , wherein the fraction of the periphery part is a part bounded by ⅕ or less of the entire perimeter of the blank plate.

6. The method of producing a backing plate-integrated metal sputtering target according to claim 5 , wherein the backing plate-integrated metal sputtering target is shaped into a disk shape, an oval shape or a rectangular shape.

7. The method of producing a backing plate-integrated metal sputtering target according to claim 6 , wherein the backing plate-integrated metal sputtering target is made of titanium or titanium alloy, and a Vickers hardness Hv of the flange part is 110 or more.

8. The method of producing a backing plate-integrated metal sputtering target according to claim 4 , wherein the backing plate-integrated metal sputtering target is shaped into a disk shape, an oval shape or a rectangular shape.

9. The method of producing a backing plate-integrated metal sputtering target according to claim 4 , wherein the backing plate-integrated metal sputtering target is made of titanium or titanium alloy, and a Vickers hardness Hv of the flange part is 110 or more.

10. The backing plate-integrated metal sputtering target according to claim 1 , wherein the backing plate-integrated metal sputtering target is made of titanium or titanium alloy, and a Vickers hardness Hv of the flange part is 110 or more.

Assignees

• Jx Nippon Mining & Metals Corp

Inventors

• Tsukamoto Shiro

Classifications

• H01J37/3423

  Shape · CPC title

• H01J37/3417 Primary

  Arrangements · CPC title

• C23C14/3414

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• H01J37/3435

  Target holders (includes backing plates and endblocks) · CPC title

• B21K23/04

  flanged articles (B21K1/28 takes precedence; flanging tubes B21D) · CPC title