Ultra long lifetime gallium arsenide

Patent metadata

Field	Value
Publication number	US-9704706-B2
Application number	US-201414422850-A
Country	US
Kind code	B2
Filing date	Jun 11, 2014
Priority date	Jun 11, 2013
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

A novel bulk GaAs with an increased carrier lifetime of at least 10 microseconds has been produced. This novel GaAs has many uses to improve optical and electrical devices. The method of producing the GaAs crystal involves using a technique called low pressure hydride vapor phase epitaxy (LP-HVPE). In this technique, a gas containing Ga (typically GaCl) is reacted with a gas containing As (typically AsH 3 ) at the surface of a GaAs substrate. When grown under the proper conditions, the epitaxial, vapor grown GaAs crystal has ultra-long free carrier lifetimes of at least one order of magnitude greater than that of the previous art of 1 microsecond. This very long free carrier lifetime GaAs will be particularly useful as a semiconductor radiation detector material and is also expected to be useful for many other applications than include medical imaging, solar cells, diode lasers, and optical limiters and other applications.

First claim

What is claimed is:

1. A bulk GaAs product having a carrier lifetime of at least 10microseconds wherein the bulk GaAs product is grown in a low pressure hydride vapor phase epitaxy system and prepared by a process comprising the steps of:
providing an arsine source;
providing a gallium chloride source;
providing a substrate having a growth surface;
delivering arsine from the arsine source to the substrate in a direction substantially parallel to the growth surface;
delivering gallium chloride from the gallium chloride source to the substrate in a direction substantially perpendicular to the growth surface; and
mixing and effecting the reaction of the gallium chloride with the arsine directly at the growth surface.

2. The bulk GaAs product of the process of claim 1 , wherein the bulk GaAs is adapted for use in at least one of the group of: an electrical device, an optical device, a medical imaging application, a photovoltaic application, a laser diode application, a radiation detector, and an optical limiting application.

3. The bulk GaAs product of the process of claim 1 , wherein the substrate is a monocrystalline wafer of GaAs.

4. The bulk GaAs product of the process of claim 1 wherein the carrier lifetime is at least 50 microseconds.

5. The bulk GaAs product of the process of claim 1 wherein the carrier lifetime is at least 100 microseconds.

6. The bulk GaAs product of the process of claim 1 wherein the carrier lifetime is at least 400 microseconds.

7. The bulk GaAs product of the process of claim 1 wherein the carrier lifetime is at least 500 microseconds.

8. The bulk GaAs product of the process of claim 1 wherein the carrier lifetime is at least 1000 microseconds.

9. The bulk GaAs product of the process of claim 1 , wherein the process further comprises growing the bulk GaAs to a thickness of at least 500 micrometers.

10. The bulk GaAs product of the process of claim 9 wherein the bulk GaAs is greater than 2.5 millimeters thick.

11. The bulk GaAs product of the process of claim 1 , wherein the process further comprises growing the bulk GaAs at a growth rate in a range from 85 μm/hr to 200 μm/hr.

12. The bulk GaAs product of the process of claim 1 , wherein the process further comprises growing the bulk GaAs product at a growth temperature in a range from 680° C. and 710° C.

13. The bulk GaAs product of the process of claim 1 , wherein the process further comprises growing the bulk GaAs product at a growth pressure of at most about 20 mbar.

14. The bulk GaAs product of the process of claim 1 , wherein a V/III ratio during GaAs growth is in a range of 1-3.

15. The bulk GaAs product of the process of claim 9 wherein the bulk GaAs is greater than 1.0 millimeter thick.

16. A method comprising:
providing a low pressure hydride vapor epitaxy system having an arsine source and a gallium chloride source adapted to produce a bulk GaAs;
delivering arsine from the arsine source to a substrate within the low pressure hydride vapor epitaxy system, the substrate having a growth surface, wherein the arsine is delivered in a first direction parallel to the growth surface;
delivering gallium chloride from the gallium chloride source within the low pressure hydride vapor epitaxy system, wherein the arsine is delivered in a second direction perpendicular to the growth surface; and
effecting the reaction of the gallium chloride with the arsine directly at the substrate's growth surface to grow a bulk GaAs having a carrier lifetime of at least 10 microseconds.

17. The method of claim 16 , further comprising:
growing the bulk GaAs to a thickness greater than at least 500 micrometers.

18. The method of claim 16 , wherein the substrate is a monocrystalline wafer of GaAs.

Assignees

• Bae Sys Inf & Elect Sys Integ

Inventors

• Schunemann Peter G
• Zawilski Kevin T

Classifications

• H10P14/2911

  Arsenides · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• H10P14/3421 Primary

  Arsenides · CPC title

• H01L21/0262

  Electricity · mapped topic

• C22C28/00

  Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00 · CPC title