Group management system and recording medium

Patent metadata

Field	Value
Publication number	US-9703284-B2
Application number	US-201414454752-A
Country	US
Kind code	B2
Filing date	Aug 8, 2014
Priority date	Aug 12, 2013
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

There is provided a group management system including one or more manufacturing devices and one or more server devices. Each of the manufacturing devices includes a manufacturing device display unit configured to display information on the specified process, an acquiring unit configured to acquire information of respective parts of each of the manufacturing devices and an acquired information transmitting unit configured to transmit the acquired information to the server devices. Each of the server devices includes a storage unit configured to store the information transmitted from the acquired information transmitting unit, an analysis unit configured to analyze the stored information and a server device display unit configured to display the stored information and the analyzed information. Each of the manufacturing devices further includes a remote operation function unit configured to directly operate the server device display unit from the manufacturing device display unit.

First claim

What is claimed is:

1. A group management system, comprising:
one or more semiconductor manufacturing devices configured to perform a specified process with respect to a workpiece; and
one or more server devices connected to the one or more semiconductor manufacturing devices,
wherein each of the one or more semiconductor manufacturing devices includes:
a manufacturing device display unit configured to display information on the specified process;
an acquiring unit configured to acquire information including temperatures, pressures, flow rates and electric powers of respective parts of each of the one or more semiconductor manufacturing devices; and
an acquired information transmitting unit configured to transmit the information acquired by the acquiring unit to the server devices, and wherein each of the server devices includes:
a storage unit configured to store the information transmitted from the acquired information transmitting unit;
an analysis unit configured to analyze the information stored in the storage unit; and
a server device display unit configured to display the information stored in the storage unit and information analyzed in the analysis unit,

each of the one or more semiconductor manufacturing devices further including a remote operation function unit configured to directly operate the server device display unit from the manufacturing device display unit,
wherein the remote operation function unit is configured to operate all display screens displayed on the server device display unit from the manufacturing device display unit of each of the one or more semiconductor manufacturing devices.

2. The system of claim 1 , wherein the remote operation function unit includes:
a data request information producing unit configured to produce data request information that requests transmission of data relating to the information stored in the storage unit; and
a data request information transmitting unit configured to transmit the produced data request information to the server devices,
wherein each of the server devices further includes a display screen information generating unit configured to generate information to be displayed on a display screen based on the data request information, and a display screen information transmitting unit configured to transmit the generated information to be displayed on the display screen to the manufacturing devices.

3. The system of claim 1 , wherein each of the server devices is configured to store process-related information including recipes and processing parameters, which are used in the manufacturing devices.

4. The system of claim 1 , further comprising:
one or more client devices connected to the server devices.

5. A non-transitory computer-readable recording medium storing a program that cause a computer to perform a process for serving as a group management system comprising one or more semiconductor manufacturing devices configured to perform a specified process with respect to a workpiece and one or more server devices connected to the one or more semiconductor manufacturing devices,
the program configured to enable the computer to cause each of the one or more semiconductor manufacturing devices to serve as a manufacturing device display unit configured to display information on the specified process, an acquiring unit configured to acquire information including temperatures, pressures, flow rates and electric powers of respective parts of each of the one or more semiconductor manufacturing devices, and an acquired information transmitting unit configured to transmit the information acquired by the acquiring unit to the server devices,
the program configured to enable the computer to cause each of the server devices to serve as a storage unit configured to store the information transmitted from the acquired information transmitting unit, an analysis unit configured to analyze the information stored in the storage unit, and a server device display unit configured to display the information stored in the storage unit and the information analyzed in the analysis unit, and
the program configured to enable the computer to cause each of the one or more semiconductor manufacturing devices to serve as a remote operation function unit configured to directly operate the server device display unit from the manufacturing device display unit,
wherein the remote operation function unit is configured to operate all display screens displayed on the server device display unit from the manufacturing device display unit of each of the one or more semiconductor manufacturing devices.

Assignees

• Tokyo Electron Ltd

Inventors

• Koyama Noriaki

Classifications

• G05B19/4185 Primary

  characterised by the network communication · CPC title

• Y02P90/18

  Cross-Sectional Technologies · mapped topic

• G05B2219/31208

  Server node to watch, store message, variable, data between lon, network · CPC title

• H04L67/36

  Electricity · mapped topic

• G05B2219/31443

  Keep track of nc program, recipe program · CPC title