Method for operating an illumination system of a microlithographic projection exposure apparatus

Patent metadata

Field	Value
Publication number	US-9703206-B2
Application number	US-201615146350-A
Country	US
Kind code	B2
Filing date	May 4, 2016
Priority date	Feb 25, 2008
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

A method of operating an illumination system of a microlithographic projection exposure apparatus is provided. A set of illumination parameters that describe properties of a light bundle which converges at a point on a mask to be illuminated by the illumination system is first determined. Optical elements whose optical effect on the illumination parameters can be modified as a function of control commands are furthermore determined, as well as sensitivities with which the illumination parameters react to an adjustment of the optical elements, induced by the control commands. The control commands are then determined while taking the previously determined sensitivities into account, such that deviations of the illumination parameters from predetermined target illumination parameters satisfy a predetermined minimisation criterion. These control commands are applied to the optical elements, before the mask is illuminated.

First claim

What is claimed is:

1. A method for setting an intensity distribution for a pupil of an illumination system of a microlithography tool, the method comprising:
measuring an intensity distribution for the pupil of the illumination system;
determining variations between the measured intensity distribution and a target intensity distribution for the pupil;
characterizing the variations by an intensity modulation and a distortion; and
adjusting at least one element in the illumination system to reduce the variations between the measured and target intensity distributions for the pupil.

2. The method of claim 1 , wherein the measured intensity distribution is described by a parametric model.

3. The method of claim 1 , wherein the variations between the measured intensity distribution and a target intensity distribution for the pupil are described as a perturbation of the target intensity distribution.

4. The method of claim 1 , wherein the intensity modulation is expressed as a combination of first Zernike functions.

5. The method of claim 4 , wherein the distortion is expressed as a combination of second Zernike functions different from the first Zernike functions.

6. The method of claim 5 , wherein the first Zernike functions are Zernike polynomials.

7. The method of claim 6 , wherein the second Zernike functions are vector Zernike polynomials.

8. The method of claim 1 , wherein the intensity modulation is expressed as a combination of first functions and the distortion is expressed by a combination of second functions different from the first functions.

9. The method of claim 1 , wherein the intensity modulation is expressed as a combination of functions based on Zernike polynomials.

10. The method of claim 1 , further comprising illuminating a mask using the illumination system after the at least one element is adjusted.

11. The method of claim 10 , wherein the illumination system comprises and adjustable mirror.

12. The method of claim 11 , wherein the adjustable mirror is configured to increase the dimensions of a light bundle emitted by a light source.

13. The method of claim 11 , wherein adjusting the at least one element of the illumination system comprises changing a rotation or tilt of the at least one optical element.

14. The method of claim 1 , wherein the measured intensity distribution is measured using a sensor.

15. The method of claim 14 , wherein the sensor is positioned at a mask plane of the illumination system or at an image plane of a projection objective in the micro-lithography tool.

16. The method of claim 14 , wherein the sensor is an angle-resolving sensor.

17. The method of claim 1 , wherein the target intensity distribution comprises a plurality of individual regions arranged displaced from an optical axis of the illumination system.

18. The method of claim 17 , wherein the target intensity distribution is a multipole intensity distribution.

19. The method of claim 18 , wherein the multipole intensity distribution is a dipole intensity distribution or a quadrupole intensity distribution.

20. The method of claim 1 , wherein the illumination system is arranged to illuminate a mask in the microlithography tool and the target intensity distribution is selected so that the mask is only illuminated obliquely.

21. The method of claim 1 , wherein the illumination system is arranged to illuminate a mask in the microlithography tool and the target intensity distribution is selected to illuminate the mask optimally based on properties of the mask.

22. The method of claim 1 , wherein the at least one element is adjusted in response to a control command generated based on the determined variations.

23. The method of claim 22 , wherein the at least one element is adjusted using a manipulator which receives the control command.

24. The method of claim 23 , wherein the control command is generated by a computer based on the determined variation, the computer being in communication with the manipulator.

25. The method of claim 1 , wherein the illumination system further comprises an optical integrator arranged in or in the immediate vicinity of the pupil plane.

26. A method for setting an intensity distribution for pupil of an illumination system of a microlithography tool, the method comprising;
measuring an intensity distribution for the pupil of the illumination system;
determining variations between the measured intensity distribution and a target intensity distribution for the pupil, the variations being characterized by an intensity modulation and a distortion; and
adjusting at least one element in the illumination system to reduce the variations between the measured and target intensity distributions for pupil,
wherein the variations between the measured intensity distribution and a target intensity distribution for the pupil are described as a perturbation of the target intensity distribution, where the perturbation is expressed as coefficients and at least some of the coefficients correspond to a characteristic of the pupil.

27. The method of claim 26 , wherein the characteristics include one or more of the characteristics selected from the group consisting of a geometrical telecentricity, a geometrical ellipse, an enlargement of the pupil, and a rotation of the pupil.

28. A microlithography tool, comprising:
an illumination system arranged to direct light from a light source to a mask plane during operation of the microlithography tool, the illumination system defining an intensity distribution for a pupil of the illumination system and comprising at least one element coupled to a manipulator;
a projection objective arranged to image structures on a mask positioned at the mask plane to an image plane during operation of the microlithography tool;
a sensor configured to measure an intensity distribution for the pupil of the illumination system; and
a computer in communication with the sensor and the manipulator, the computer being programmed to determine variations between the measured intensity distribution and a target intensity distribution for the pupil, and characterize the variations by an intensity modulation and a distortion,
the computer being further programmed to cause the manipulator to adjust the at least one element to reduce variations between the measured and target intensity distributions for the pupil.

29. The microlithography tool of claim 28 , wherein the illumination system comprises an adjustable mirror.

30. The microlithography tool of claim 28 , wherein the sensor is positioned at the mask plane of the illumination system or at the image plane of the projection objective.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Natt Oliver
• Schlesener Frank

Classifications

• G03F7/70125

  Use of illumination settings tailored to particular mask patterns (details of setting means G03F7/70091) · CPC title

• G03F7/70091 Primary

  Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA] · CPC title

• G03F7/70141

  Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system · CPC title

• G03F7/70191

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title

• G03F7/70133 Primary

  Measurement of illumination distribution, in pupil plane or field plane · CPC title