Object information obtaining apparatus, program, and imaging system

Patent metadata

Field	Value
Publication number	US-9702831-B2
Application number	US-201314651187-A
Country	US
Kind code	B2
Filing date	Dec 12, 2013
Priority date	Dec 13, 2012
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

The present invention relates to an object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object. The apparatus includes a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern, a second obtaining unit configured to obtain information about contrast in each region of the interference pattern, a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image, and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object.

First claim

The invention claimed is:

1. An object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object, the apparatus comprising:
a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern;
a second obtaining unit configured to obtain information about contrast in each region of the interference pattern;
a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image; and
a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object.

2. The apparatus according to claim 1 , wherein when the second obtaining unit obtains information indicating that contrast in a second region of the interference pattern is lower than that in a first region of the interference pattern, the third obtaining unit obtains the information about the weighted differential phase image by setting a weighting factor for information which is included in the information about the differential phase image and which is associated with a region corresponding to the second region to be smaller than a weighting factor for information which is included in the information about the differential phase image and which is associated with a region corresponding to the first region.

3. The apparatus according to claim 2 , wherein when the second obtaining unit obtains information indicating that contrast in a third region of the interference pattern is lower than that in the first region and is higher than that in the second region, the third obtaining unit sets a weighting factor for information which is included in the information about the differential phase image and which is associated with a region corresponding to the third region to be equal to the weighting factor for the information associated with the region corresponding to the first region or sets the weighting factor for the information associated with the region corresponding to the third region to be equal to the weighting factor for the information associated with the region corresponding to the second region.

4. The apparatus according to claim 1 , wherein the third obtaining unit compares a value of information about contrast in a first region of the interference pattern to a threshold value and determines a weighing factor for information which is included in the information about the differential phase image and which is associated with a region corresponding to the first region based on a result of comparison.

5. The apparatus according to claim 4 , wherein when values of the information about the contrast in all regions of the interference pattern are greater than or equal to, greater than, less than or equal to, or less than the threshold value, a constant weighting factor is used for the information about the differential phase image.

6. The apparatus according to claims 1 , wherein the third obtaining unit weights the information about the differential phase image using the information about the contrast in each region and a weighting function.

7. The apparatus according to claim 6 , wherein the third obtaining unit weights the information about the differential phase image using the information about the contrast in each region and the weighting function, and
wherein the weighting function is set such that at least when values of the information about the contrast in all of the regions of the interference pattern are greater than or equal to, greater than, less than or equal to, or less than a threshold value, a weighting factor is constant.

8. The apparatus according to claim 6 , further comprising:
a storage unit,
wherein the weighting function is stored in the storage unit.

9. The apparatus according to claim 6 , wherein the weighting function is generated based on the information about the interference pattern by the third obtaining unit.

10. The apparatus according to claim 1 , wherein the information about the contrast in each region of the interference pattern is information about an amplitude of the interference pattern or information about an X-ray dosage of the object in each region corresponding to that of the interference pattern.

11. The apparatus according to claim 10 , wherein the information about the X-ray dosage of the object in each region corresponding to that of the interference pattern is obtained from the information about the interference pattern.

12. The apparatus according to claim 1 , wherein the first obtaining unit obtains the information about the differential phase image of the object by receiving the information from a differential phase imaging device that obtains the information about the differential phase image of the object using the information about the interference pattern.

13. The apparatus according to claim 1 , wherein the information about the phase image and information about an absorption image of the object are combined such that the absorption image is superimposed on a region which is included in the phase image and which corresponds to a region associated with information indicating that the contrast of the interference pattern is low, the information being obtained by the second obtaining unit.

14. An imaging system that includes a shearing interferometer and an object information obtaining apparatus configured to obtain information about a phase image of an object using information about an interference pattern produced by the shearing interferometer, the interference pattern being formed by an electromagnetic wave passed through the object, wherein the object information obtaining apparatus is the object information obtaining apparatus according to claim 1 .

15. The system according to claim 14 , further comprising:
an image display apparatus configured to display an image based on the information about the phase image of the object obtained by the object information obtaining apparatus.

16. The system according to claim 14 , wherein the electromagnetic wave is X-rays.

17. A non-transitory storage medium storing a program that causes a computer to execute a process of obtaining information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object, the process comprising:
obtaining information about a differential phase image of the object using the information about the interference pattern;
obtaining information about contrast in each region of the interference pattern;
weighting the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image; and
integrating the information about the weighted differential phase image to obtain the information about the phase image of the object.

Assignees

• Canon Kk

Inventors

• Nagai Kentaro

Classifications

• G01N23/20

  by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials · CPC title

• H01J37/252

  Tubes for spot-analysing by electron or ion beams; Microanalysers · CPC title

• H01J2237/221

  Image processing · CPC title

• G01N23/04 Primary

  and forming images of the material · CPC title

• G21K1/06 Primary

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title