Piezoelectric actuating device and valve equipped therewith

Patent metadata

Field	Value
Publication number	US-9698335-B2
Application number	US-201414895393-A
Country	US
Kind code	B2
Filing date	May 22, 2014
Priority date	Jun 8, 2013
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A piezoelectric actuator device, with at least one piezoelectric transducer which has at least one piezoelectric body and an electrode unit assigned to this piezoelectric body, with overall capacitance and including two electrodes lying opposite one another. At least one of the two electrodes of the electrode unit is divided into several individual sub-electrodes, spaced apart from one another and forming with the electrode lying opposite several sub-electrode pairs defining in each case a partial capacitance of the overall capacitance. A separate current-limiting resistor active during charge flow is connected in series to each sub-electrode pair. A valve, for controlling a fluid, is equipped with such an actuator device.

First claim

The invention claimed is:

1. A piezoelectric actuator device, with at least one piezoelectric transducer which has at least one piezoelectric body and an electrode unit assigned to this piezoelectric body, wherein the electrode unit comprises two electrodes mounted on opposite sides of the piezoelectric body and has an overall capacitance, wherein at least one of the two electrodes of the electrode unit is divided into several individual sub-electrodes spaced apart from one another and forming, with the electrode lying opposite, several sub-electrode pairs each defining a partial capacitance of the overall capacitance, wherein a separate current-limiting resistor active during charge flow is connected in series to each sub-electrode pair.

2. A piezoelectric actuator device according to claim 1 , wherein only one of the two electrodes of the electrode unit is divided into several individual sub-electrodes, spaced apart from one another, while the other electrode lying opposite is a unitary electrode and electrode sections of the unitary electrode lying opposite the individual sub-electrodes contribute to forming a sub-electrode pair in each case.

3. A piezoelectric actuator device according to claim 1 , wherein both electrodes of the electrode unit are divided into several individual sub-electrodes, spaced apart from one another, wherein individual sub-electrodes of both electrodes lie opposite in pairs to form sub-electrode pairs.

4. A piezoelectric actuator device according to claim 3 , wherein the two electrodes are divided into an equal number of individual sub-electrodes, wherein each individual sub-electrode of the one electrode lies opposite an individual sub-electrode of the other electrode to form a sub-electrode pair.

5. A piezoelectric actuator device according to claim 3 , wherein the individual sub-electrodes lying opposite one another to form a sub-electrode pair are in each case of equal size.

6. A piezoelectric actuator device according to claim 1 , wherein the individual sub-electrodes belonging to the same electrode lie in a common plane.

7. A piezoelectric actuator device according to claim 1 , wherein the individual sub-electrodes of each electrode divided into individual sub-electrodes are strip-shaped and arranged next to one another on the long side and with lateral clearance.

8. A piezoelectric actuator device according to claim 1 , wherein the piezoelectric transducer is in the form of a bending actuator with an elongated shape, wherein the individual sub-electrodes of each electrode divided into individual sub-electrodes are arranged transversely to the axial direction of the bending actuator, next to and with clearance from one another.

9. A piezoelectric actuator device according to claim 1 , wherein the at least one piezoelectric body is a single part and is made in one piece.

10. A piezoelectric actuator device according to claim 1 , wherein the piezoelectric body is mounted on a piezoelectrically inactive.

11. A piezoelectric actuator device according to claim 10 , wherein the piezoelectrically inactive substrate has electrically conductive properties and directly forms a unitary electrode of the electrode unit.

12. A piezoelectric actuator device according to claim 1 , wherein each sub-electrode pair is contacted by a separate electrical supply lead serving for electrical charge transfer and containing the assigned current-limiting resistor connected in series.

13. A piezoelectric actuator device according to claim 1 , further comprising a voltage source to provide a drive voltage allowing actuation of the at least one piezoelectric transducer and which is connected simultaneously to all sub-electrode pairs.

14. A piezoelectric actuator device according to claim 13 , wherein all sub-electrode pairs are supplied with current from the same voltage source, so that the same drive voltage may be applied to all sub-electrode pairs simultaneously.

15. A valve for controlling a fluid, with a piezoelectric actuator device containing at least one piezoelectric transducer, which has at least one piezoelectric body and an electrode unit assigned to this piezoelectric body, wherein the electrode unit comprises two electrodes mounted on opposite sides of the piezoelectric body and has an overall capacitance, wherein the piezoelectric transducer forms a valve member or a drive element for a valve member, wherein at least one of the two electrodes of the electrode unit is divided into several individual sub-electrodes spaced apart from one another and forming with the electrode lying opposite several sub-electrode pairs each defining a partial capacitance of the overall capacitance, wherein a separate current-limiting resistor active during charge flow is connected in series to each sub-electrode pair.

16. A valve according to claim 15 , wherein only one of the two electrodes of the electrode unit is divided into several individual sub-electrodes, spaced apart from one another, while the other electrode lying opposite is a unitary electrode and electrode sections of the unitary electrode lying opposite the individual sub-electrodes contribute to forming a sub-electrode pair in each case.

17. A valve according to claim 15 , wherein both electrodes of the electrode unit are divided into several individual sub-electrodes, spaced apart from one another, wherein individual sub-electrodes of both electrodes lie opposite in pairs to form sub-electrode pairs.

18. A valve according to claim 17 , wherein the two electrodes are divided into an equal number of individual sub-electrodes, wherein each individual sub-electrode of the one electrode lies opposite an individual sub-electrode of the other electrode to form a sub-electrode pair.

19. A valve according to claim 17 , wherein the individual sub-electrodes lying opposite one another to form a sub-electrode pair are in each case of equal size.

20. A valve according to claim 15 , wherein the individual sub-electrodes belonging to the same electrode lie in a common plane.

21. A valve according to claim 15 , wherein the individual sub-electrodes of each electrode divided into individual sub-electrodes are strip-shaped and arranged next to one another on the long side and with lateral clearance.

22. A valve according to claim 15 , wherein the piezoelectric transducer is in the form of a bending actuator with an elongated shape, wherein the individual sub-electrodes of each electrode divided into individual sub-electrodes are arranged transversely to the axial direction of the bending actuator, next to and with clearance from one another.

23. A valve according to claim 15 , wherein the at least one piezoelectric body is a single part and is made in one piece.

24. A valve according to claim 15 , wherein the piezoelectric body is mounted on a piezoelectrically inactive substrate.

25. A valve according to claim 24 , wherein the piezoelectrically inactive substrate has electrically conductive properties and directly forms a unitary electrode of the electrode unit.

26. A valve according to claim 15 , wherein each sub-electrode pair is contacted by a separate electrical supply lead serving for electrical charge transfer and containing the assigned current-limiting resistor connected in series.

27. A valve according to claim 15 , further comprising a voltage source to provide a drive voltage allowing actuation of the at least one piezoelectric transducer a

Assignees

• Festo Ag & Co Kg

Inventors

• Palermo Gino
• Anderle Jens
• Wirtl Hannes
• Hoitz Gerd

Classifications

• F16K31/005 Primary

  Piezoelectric benders · CPC title

• H01L41/047

  Electricity · mapped topic

• H01L41/09 Primary

  Electricity · mapped topic

• H01L41/0906

  Electricity · mapped topic

• F16K31/007

  Piezoelectric stacks · CPC title