Piezoelectric actuator
US-2017222125-A1 · Aug 3, 2017 · US
US10801637B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10801637-B2 |
| Application number | US-201816104252-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 17, 2018 |
| Priority date | Sep 15, 2017 |
| Publication date | Oct 13, 2020 |
| Grant date | Oct 13, 2020 |
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A gas transportation device includes an inlet plate, a substrate, a resonance plate, an actuating plate, a piezoelectric component and an outlet plate stacked sequentially. The gas transportation device includes a valve disposed within at least one of the inlet of the inlet plate and the outlet of the outlet plate. A first chamber is formed between the resonance plate and the actuating plate, and a second chamber is formed between the actuating plate and the outlet plate. When the piezoelectric component drives the actuating plate, a pressure gradient is formed between the first and second chambers and the valve is opened. Accordingly, gas is inhaled into the convergence chamber via the inlet, transported into the first chamber through a central aperture of the resonance plate, transported into the second chamber through a vacant space of the actuating plate, and then discharged out from the outlet, so as to transport the gas.
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What is claimed is: 1. A gas transportation device comprising: an inlet plate having at least one inlet; a substrate; a resonance plate having a central aperture, wherein a convergence chamber is formed between the resonance plate and the inlet plate; an actuating plate having a suspension part, an outer frame and at least one vacant space; a piezoelectric component attached on a surface of the suspension part of the actuating plate; an outlet plate having at least one outlet; and at least one valve disposed within at least one of the inlet and the outlet, wherein the inlet plate, the substrate, the resonance plate, the actuating plate, the piezoelectric component and the outlet plate are stacked sequentially, a gap between the resonance plate and the actuating plate is formed as a first chamber, and a second chamber is formed between the actuating plate and the outlet plate, wherein while the piezoelectric component drives the actuating plate to generate a bending vibration in resonance, a pressure gradient is formed between the first chamber and the second chamber, and the at least one valve is opened, whereby gas is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber through the central aperture of the resonance plate, transported into the second chamber through the at least one vacant space, and then discharged out from the outlet of the outlet plate, so as to transport the gas, wherein the at least one valve comprises a holding component, a sealing component and a valve plate, wherein an accommodation space is maintained between the holding component and the sealing component, and the valve plate is disposed within the accommodation space, wherein the holding component has at least two orifices and the valve plate has at least two orifices corresponding to the at least two orifices of the holding component that the at least two orifices of the holding component are aligned with the orifices of the valve plate, and wherein the sealing component has at least one orifice misaligned with the at least two orifices of the holding component, wherein the holding component is electrically connected to a control circuit, and the at least one valve is controlled to be opened or closed by the control circuit. 2. The gas transportation device according to claim 1 , wherein the valve plate is made of a charged material, and the holding component is made of a bipolar conductive material and controlled by the control circuit to change electrical polarity thereof, wherein while the valve plate and the holding component are maintained in opposite polarity, the valve plate moves toward the holding component so that the valve is in an open state, and while the valve plate and the holding component are maintained in the same polarity, the valve plate moves toward the sealing component so that the valve is in a closed state. 3. The gas transportation device according to claim 1 , wherein the valve plate is made of a magnetic material, and the holding component is made of an electromagnet material and controlled by the control circuit to change magnetic polarity thereof, wherein while the valve plate and the holding component are maintained in opposite polarity, the valve plate moves toward the holding component so that the valve is in an open state, and while the valve plate and the holding component are maintained in the same polarity, the valve plate moves toward the sealing component so that the valve is in a closed state. 4. The gas transportation device according to claim 1 , wherein the holding component, the sealing component or the valve plate are made of a graphene material. 5. The gas transportation device according to claim 1 , wherein the valve plate is made of a charged material, and the holding component is made of a bipolar conductive material and controlled by the control circuit to change electrical polarity thereof, wherein while the valve plate and the holding component are maintained in opposite polarity, the valve plate moves toward the holding component so that the valve is in an open state, and while the valve plate and the holding component are maintained in the same polarity, the valve plate moves toward the sealing component so that the valve is in a closed state. 6. The gas transportation device according to claim 1 , wherein the valve plate is made of a magnetic material, and the holding component is made of an electromagnet material and controlled by the control circuit to change magnetic polarity thereof, wherein while the valve plate and the holding component are maintained in opposite polarity, the valve plate moves toward the holding component so that the valve is in an open state, and while the valve plate and the holding component are maintained in the same polarity, the valve plate moves toward the sealing component so that the valve is in a closed state. 7. The gas transportation device according to claim 1 , wherein the valve plate is a flexible membrane, and the flexible membrane is attached on a surface of the holding component. 8. The gas transportation device according to claim 7 , wherein the holding component is made of a thermal expansion material and controlled by the control circuit for heating thereof, wherein while the holding component is heated and expanded, the flexible membrane moves toward and contacts the sealing component so as to seal the at least one orifice of the sealing component, so that the valve is in a closed state, and while the holding component is free of thermal expansion, the accommodation space between the sealing component and the holding component is maintained so that the valve is in an open state. 9. The gas transportation device according to claim 7 , wherein the holding component is made of a piezoelectric material and controlled by the control circuit for deforming thereof, wherein while the holding component is deformed, the flexible membrane moves toward and contacts the sealing component so as to seal the at least one orifice of the sealing component, so that the valve is in a closed state, and while the holding component is free of deformation, the accommodation space between the sealing component and the holding component is maintained so that the valve is in an open state. 10. A gas transportation device comprising: at least one inlet plate having at least one inlet; at least one substrate; at least one resonance plate having at least one central aperture, wherein at least one convergence chamber is formed between the resonance plate and the inlet plate; at least one actuating plate having at least one suspension part, at least one outer frame and at least one vacant space; at least one piezoelectric component attached on a surface of the suspension part of the actuating plate; at least one outlet plate having at least one outlet; and at least one valve disposed within at least one of the inlet and the outlet, wherein the inlet plate, the substrate, the resonance plate, the actuating plate, the piezoelectric component and the outlet plate are stacked sequentially, at least one gap between the resonance plate and the actuating plate is formed as at least one first chamber, and at least one second chamber is formed between the actuating plate and the outlet plate, wherein while the piezoelectric component drives the actuating plate to generate a bending vibration in resonance, at least one pressure gradient is formed between the first chamber and the second chamber, and the at least one valve is opened, whereby gas is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber through the central aperture of the resonance plate, transported into the sec
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