Substrate storing container

Patent metadata

Field	Value
Publication number	US-9698033-B2
Application number	US-201214435093-A
Country	US
Kind code	B2
Filing date	Oct 12, 2012
Priority date	Oct 12, 2012
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A substrate storing container is provided with a lid-body-side substrate support section that can support the edges of a plurality of substrates when a container main body opening is occluded by the lid body. The lid-body-side substrate support section is provided with: a lid-body-side substrate receiving section and a pair of lid-body-side leg sections respectively connected to one end and the other end of the lid-body-side substrate receiving section. One lid-body-side leg section of the pair of lid-body-side leg sections is fixed at the outside of a concavity for fixing a lid-body leg section, and the other lid-body-side leg section of the pair of lid-body-side leg sections is fixed within the concavity for fixing a lid-body leg section.

First claim

The invention claimed is:

1. A substrate storing container comprising:
a container main body having a substrate storing space that can store a plurality of substrates formed inside thereof, and having an opening circumferential portion at which a container main body opening portion that is in communication with the substrate storing space is formed at one end portion thereof;
a lid body that is removably attached to the opening circumferential portion and can close the container main body opening portion;
a lid body side substrate support portion which is arranged at a portion of the lid body that is a part opposing the substrate storing space when the container main body opening portion is closed by the lid body, and can support edge portions of the plurality of substrates when the container main body opening portion is closed by the lid body; and
a back-side substrate support portion that is arranged so as to form a pair with the lid body side substrate support portion inside the substrate storing space, that can support the edge portions of the plurality of substrates, and that supports the plurality of substrates in cooperation with the lid body side substrate support portion when the container main body opening portion is closed by the lid body,
wherein the lid body side substrate support portion includes a lid body side substrate receiving portion and a pair of lid body side leg portions respectively connected to one end portion and another end portion of the lid body side substrate receiving portion,
a lid-body-leg portion fixing concave portion that is concave in a direction opposite to a depth direction is formed at a part of an inner face of the lid body that is a portion which closes the container main body opening portion, and
one lid body side leg portion among the pair of lid body side leg portions is fixed outside the lid-body-leg portion fixing concave portion and the other lid body side leg portion of the pair of lid body side leg portions is fixed inside the lid-body-leg portion fixing concave portion, wherein the lid body side substrate receiving portion is configured to swing with a part of the one lid body side leg portion that is fixed to the lid body as an axial center for swinging and an inner face of the lid body has an inner face left/right end portion flat face and a portion of the one lid body side leg portion that occupies at least two-thirds of the one lid body side leg portion extends in parallel with the inner face left/right end portion flat face.

2. The substrate storing container according to claim 1 , wherein
the lid body side substrate receiving portion is not arranged inside the lid-body-leg portion fixing concave portion, and is arranged more toward a back side than the lid-body-leg portion fixing concave portion in the depth direction.

3. The substrate storing container according to claim 1 , wherein
the lid body includes a sealing member installation portion,
the substrate storing container further comprises a sealing member that is installed into the sealing member fitting portion, that can abut with the opening circumferential portion, and that closes the container main body opening portion by the lid body in an air tight state, by being interposed between the opening circumferential portion and the lid body so as to tightly abut with the opening circumferential portion,
the one lid body side leg portion is fixed to a part of the lid body that is a portion more toward a back side than the sealing member installation portion in a depth direction which is a direction from one end portion of the container main body to the other end portion with respect to the one end portion, and the other lid body side leg portion is fixed to a part of the lid body that is a portion more toward a forward direction than the sealing member installation portion in the depth direction.

4. The substrate storing container according to claim 1 , wherein
the lid body side substrate receiving portion is arranged so as to form a pair of the lid body side substrate receiving portions in a direction orthogonal to a direction connecting one end portion and the other end portion of the container main body, and
the lid body side leg portion connected to one lid body side substrate receiving portion among the lid body side substrate receiving portions forming the pair of the lid body side leg portions and the lid body side leg portion connected to another lid body side substrate receiving portion among the lid body side substrate receiving portions forming the pair are configured separately.

5. The substrate storing container according to claim 2 , wherein
the lid body side substrate receiving portion is arranged so as to form the pair of the lid body side substrate receiving portions in a direction orthogonal to a direction connecting one end portion and the other end portion of the container main body, and
the lid body side leg portion connected to one lid body side substrate receiving portion among the lid body side substrate receiving portions forming the pair of the lid body side leg portions and the lid body side leg portion connected to another lid body side substrate receiving portion among the lid body side substrate receiving portions forming the pair are configured separately.

6. The substrate storing container according to claim 3 , wherein
the lid body side substrate receiving portion is arranged so as to form the pair of the lid body side substrate receiving portions in a direction orthogonal to a direction connecting one end portion and the other end portion of the container main body, and
the lid body side leg portion connected to one lid body side substrate receiving portion among the lid body side substrate receiving portions forming the pair of the lid body side leg portions and the lid body side leg portion connected to another lid body side substrate receiving portion among the lid body side substrate receiving portions forming the pair are configured separately.

Assignees

• Miraial Co Ltd
• Shinetsu Polymer Co

Inventors

• Matsutori Chiaki
• Nagashima Tsuyoshi
• Oyama Takaharu
• Inoue Shuichi
• Shida Hiroyuki
• Yamagishi Hiroki
• Ohnuki Kazumasa

Classifications

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1912 Primary

  characterised by shock absorbing elements, e.g. retainers or cushions · CPC title

• H10P72/14

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• H10P72/1916 Primary

  characterised by sealing arrangements · CPC title

• H01L21/67376 Primary

  Electricity · mapped topic