Compositions comprising base-reactive component and processes for photolithography

Patent metadata

Field	Value
Publication number	US-9696627-B2
Application number	US-96692810-A
Country	US
Kind code	B2
Filing date	Dec 13, 2010
Priority date	Dec 11, 2009
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprise one or more materials that have base-reactive groups. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.

First claim

What is claimed is:

1. A method for processing a photoresist composition, comprising:
(a) applying on a substrate a photoresist composition comprising:
(i) one or more resins that 1) are at least substantially free of aromatic groups and 2) comprise photoacid-labile groups,
(ii) a photoactive component, and
(iii) one or more materials that comprise 1) base-reactive groups and 2) one or more fluorine atoms or fluorine-substituted groups, the one or more materials distinct from the one or more resins (i);

wherein the one or more materials comprise a resin that comprises a repeat unit that comprises multiple base reactive moieties that can react with base to provide hydroxy or sulfonic acid groups; and
(b) immersion exposing the applied photoresist layer to radiation activating for the photoresist composition.

2. The method of claim 1 wherein the one or more materials are substantially non-mixable with the one or more resins (i).

3. The method of claim 1 wherein the one or more materials migrate toward upper portions of the photoresist composition layer during the applying.

4. The method of claim 1 wherein the (iii) one or more materials have a lower surface energy than the (i) one or more resins.

5. The method of claim 1 wherein the one or more materials comprise groups that react with base to provide hydroxy groups.

6. The method of claim 1 wherein the one or more materials comprise groups that react with aqueous alkaline developer to provide hydroxyl groups.

7. The method of claim 1 wherein the one or more materials are resins.

8. The method of claim 1 wherein the one or more materials comprises photoacid-labile groups.

9. The method of claim 1 further comprising developing the exposed photoresist layer with aqueous alkaline developer whereby the multiple base-reactive groups undergo a bond-breaking reaction to provide hydroxyl or sulfonic acid polar groups.

10. The method of claim 9 wherein the photoresist layer after development has a water contact receding angle of less than 30° , and/or the photoresist layer prior to development has a water contact receding angle of in excess of 40° .

11. The method of claim 1 wherein the one or more materials comprise groups that react with base to provide sulfonic acid groups.

12. The method of claim 1 wherein the one or more materials comprise groups that react with aqueous alkaline developer to provide sulfonic acid groups.

13. The method of claim 1 wherein the one or more resins (i) contain less than 5 mole percent aromatic groups.

14. The method of claim 1 wherein the one or more resins (i) contain less than 2 mole percent aromatic groups.

15. The method of claim 1 wherein the one or more resins (i) are completely free of aromatic groups.

16. A method for processing a photoresist composition, comprising:
(a) applying on a substrate a photoresist composition comprising:
(i) one or more resins that 1) are at least substantially free of aromatic groups and 2) comprise photoacid-labile groups,
(ii) a photoactive component, and
(iii) one or more resins that comprise base-reactive groups,
wherein the (iii) one or more resins 1) are distinct from the (i) one or more resins; and 2) comprise a repeat unit that comprises multiple base reactive moieties that can react with base to provide hydroxy or sulfonic acid groups; and

(b) immersion exposing the applied photoresist layer to radiation activating for the photoresist composition.

17. The method of claim 16 wherein the (iii) one or more resins are substantially non-mixable with the (i) one or more resins.

18. The method of claim 16 wherein the (iii) one or more resins comprises photoacid-labile groups.

Assignees

• Wang Deyan
• Liu Jinrong
• Liu Cong
• Kang Doris
• Zampini Anthony
• Xu Cheng-Bai
• Rohm & Haas Elect Mat

Inventors

• Wang Deyan
• Liu Jinrong
• Liu Cong
• Kang Doris
• Zampini Anthony
• Xu Cheng-Bai

Classifications

• G03F7/322

  Aqueous alkaline compositions · CPC title

• G03F7/0397

  the macromolecular compound having an alicyclic moiety in a side chain · CPC title

• G03F7/0046 Primary

  with perfluoro compounds, e.g. for dry lithography (G03F7/0048 takes precedence) · CPC title

• G03F7/2041 Primary

  in the presence of a fluid, e.g. immersion; using fluid cooling means · CPC title

• G03F7/0392

  the macromolecular compound being present in a chemically amplified positive photoresist composition · CPC title