Probe station for the simultaneous measurement of thermal and electrical characteristics of thermoelectric module

Patent metadata

Field	Value
Publication number	US-9696370-B2
Application number	US-201514792696-A
Country	US
Kind code	B2
Filing date	Jul 7, 2015
Priority date	Jul 25, 2014
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

Provided is a probe station system which can measure thermal distribution and thermographic images. More particularly, a probe station is provided which can detect an electrical characteristics change according to the supply of heat to an element, for example a thermoelectric element to measure the characteristics of the element. The probe station for the simultaneous measurement of thermal and electrical characteristics of a thermoelectric element includes: a chamber, a base, a platform, a probe unit, a heat source, and an infrared image detection unit and the thermographic image and the voltage signal of the element are synchronized in real time.

First claim

What is claimed is:

1. A probe station for the simultaneous measurement of thermal and electrical characteristics of a thermoelectric element, comprising:
a chamber including an inward receiving unit having a window, the inward receiving unit being configured to be seated inwardly of the chamber through a chamber cover opening formed on one surface thereof;
a base disposed within the chamber;
a platform disposed on the base and configured to allow the element to be disposed thereon so that a voltage of the element is detected, the platform being configured to allow a platform terminal for detecting a voltage signal of the element to be disposed thereon;
a probe unit disposed at one end thereof within the chamber and including a probe tip that can be connected to the platform terminal;
a heat source disposed within the chamber and configured to provide heat to the element so that the voltage signal of the element can be detected; and
an infrared image detection unit at least partially disposed in the inward receiving unit so that a thermographic image of the element, which is generated by reaction due to heat provided from the heat source, can be acquired through the window, and
wherein the thermographic image and the voltage signal of the element are synchronized in real time.

2. The probe station according to claim 1 , wherein the window is a Ge window configured to allow an infrared ray to transmit therethrough.

3. The probe station according to claim 1 , wherein the platform is disposed on the base and comprises a platform plate for allowing the platform terminal to be disposed thereon, and
wherein the platform terminal comprises:
a terminal line configured to form a pair so as to be disposed opposed to each other on one surface of the platform plate, and configured to allow the element to be disposed between the pair of terminal lines; and
a terminal tip disposed at an end of the terminal line and configured to allow the probe tip to be brought into close contact therewith.

4. The probe station for according to claim 3 , wherein the heat source is a joule heater disposed on the platform plate, and
wherein the heat source comprises:
a heater line disposed at the outside of the terminal line, which is disposed on one surface of the platform plate so that the element can be disposed on the terminal line; and
a heater tip disposed at and end of the heater line and configured to allow an electrical signal to be applied thereto.

5. The probe station according to claim 4 , wherein the heat source forms a pair so as to be disposed opposed to each other relative to the center of the terminal line so that heat can be outputted individually.

6. The probe station according to claim 1 , further comprising:
a storage unit for storing the thermographic image and the electrical characteristics of the element in response to a storage control signal, and pre-stored temperature reference data that enables a temperature state of the thermographic image to be grasped;
a control unit for in real time, synchronizing the thermographic image and the voltage signal of the element, which are previously stored in the storage unit, and calculating a heat temperature difference occurring at both ends of the element based on the thermographic image and the pre-stored temperature reference data; and
an arithmetic unit for calculating the characteristics of the element in response to an arithmetic control signal from the control unit based on the heat temperature difference and the voltage signal of both ends of the element.

7. The probe station according to claim 1 , wherein the inward receiving unit comprises:
an inward receiving body fixedly mounted in the chamber cover opening;
an inward receiving plate disposed spaced apart from the inward receiving body and configured to be movable toward the inside of the chamber, with the window formed in the inward receiving plate; and
an inward receiving bellows connected at one end thereof to the inward receiving body and connected at the other end thereof to the inward receiving plate so that the inward receiving bellows can be folded depending on the position of the inward receiving plate.

8. The probe station according to claim 7 , further comprising a receiving unit guide connected at one end thereof to the inward receiving plate through the inward receiving body and disposed at the other end thereof at the outside of the chamber to allow the receiving unit guide to be adjusted in length through the other end of the receiving unit guide so that the inward receiving plate is adjusted in position.

9. The probe station according to claim 1 , wherein the image detection unit comprises:
an image detection sensor for acquiring a thermographic image of the element through the window; and
an image detection holding part for allowing the image detection sensor to be maintained at the outside of the chamber.

10. The probe station according to claim 9 , wherein the mage detection holding part comprises:
a detection holder disposed so as to be connected to an end of the image detection sensor;
a detection holder around formed extending radially outwardly from an outer circumferential surface of the detection holder; and
a detection holder housing disposed at the outside of the detection holder around to enable the longitudinal relative displacement between the detection holder housing and detection holder around.

11. The probe station according to claim 10 , wherein the detection holder around comprises a holder around guide formed on the outer peripheral surface thereof, and
wherein the detection holder housing comprises a holder housing guide formed on the inner peripheral surface thereof so as to be engaged with the holder around guide to enable the relative movement between the holder housing guide and the holder around guide.

12. The probe station according to claim 10 , wherein the detection holder around comprises a through-hole formed therein, and
wherein the detection holder housing comprises a holder housing shaft disposed penetratingly in the through-hole of the detection holder around so that the image detection sensor can be moved longitudinally.

13. The probe station according to claim 10 , wherein the image detection unit comprises an image detection drive unit configured to drive the image detection holding part to provide a driving force for displacing the image detection sensor to the detection holder, and
wherein the image detection drive unit comprises:
a detection driver for generating the driving force for displacing the image detection sensor; and
a detection drive transfer unit connected at one end thereof to the detection driver and connected at the other end thereof to the detection holder to transfer the driving force generated from the detection driver to the detection holder.

Assignees

• Univ Korea Res & Bus Found

Inventors

• Kim Sangsig
• Cho Kyoungah
• Choi Jinyong
• Lee Jonggoo

Classifications

• G01J2005/0077

  Imaging · CPC title

• G01R31/2601 Primary

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title

• G01J5/0096 Primary

  for measuring wires, electrical contacts or electronic systems · CPC title

• G01N25/72

  Investigating presence of flaws · CPC title

• G01R31/308

  using non-ionising electromagnetic radiation, e.g. optical radiation {(investigating or analysing materials by the use of optical means G01N21/00; image analysis G06T7/00)} · CPC title