Workpiece handling system and methods of workpiece handling

Patent metadata

Field	Value
Publication number	US-9694989-B2
Application number	US-201213658512-A
Country	US
Kind code	B2
Filing date	Oct 23, 2012
Priority date	Nov 2, 2011
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

One embodiment of this workpiece handling system has conveyor belts and a load lock. A first swap robot holds and transports workpieces between a build station and the load lock. A gantry robot transports the workpieces between each of the conveyor belts and the first swap robot. In one instance, processed workpieces are transported from the first swap robot to a first conveyor belt and unprocessed workpieces are transported from a second conveyor belt to the first swap robot using the gantry robot. A second swap robot also may be used with the first swap robot to load and unload workpieces from the load lock.

First claim

What is claimed is:

1. A workpiece handling system comprising:
a plurality of conveyor belts;
a load lock;
a gantry robot, configured to move in x,y,z and tilt directions, comprising an end effector having a plurality of grippers, wherein said plurality of grippers are configured to pick up a plurality of workpieces from one of said plurality of conveyor belts and wherein said gantry robot is configured to transport said plurality of workpieces, as a linear array, between each of said plurality of conveyor belts and a build station, wherein said plurality of workpieces form part of a two dimensional matrix of workpieces built at said build station; and
a first swap robot and a second swap robot, each comprising a plurality of blades configured to hold a plurality of workpieces, wherein said first swap robot and said second swap robot are each configured to transport a respective matrix of workpieces between said build station and said load lock, wherein said first swap robot is disposed above the second swap robot, and wherein the first swap robot and the second swap robot are movable in exactly two directions, and are configured to move independently of each other in a horizontal direction and wherein the first swap robot and second swap robot are configured to move together in a vertical direction,
such that the first swap robot is configured to be moved in the horizontal direction to a parked position when said gantry robot is loading or unloading a matrix associated with said second swap robot.

2. The workpiece handling system of claim 1 , further comprising a camera having a field of view configured to image said plurality of conveyor belts.

3. The workpiece handling system of claim 2 , wherein the end effector uses information from the camera to correct the position or orientation of the workpieces as the workpieces are transported between the build station and the plurality of conveyor belts.

4. The workpiece handling system of claim 1 , wherein said plurality of conveyor belts comprises three conveyor belts, each configured to load and unload said workpieces.

5. The workpiece handling system of claim 1 , further comprising a second load lock, wherein said first swap robot and said second swap robot are configured to transport said matrix of workpieces between said build station and said load lock and said second load lock.

6. The workpiece handling system of claim 1 , wherein the swap robot is configured to move in y and z directions.

7. The workpiece handling system of claim 1 , wherein the gantry robot is configured to transport processed workpieces from the build station to a first of the plurality of conveyor belts, move to a second conveyor belt and then pick up unprocessed workpieces from the second conveyor belt and transport the unprocessed workpieces to the build station.

8. The workpiece handling system of claim 7 , wherein the gantry robot is configured to place the unprocessed workpieces in a location in the build station vacated by the processed workpieces that were transported to the first conveyor belt.

9. The workpiece handling system of claim 1 , wherein the first swap robot is configured to remove processed workpieces from the load lock and the second swap robot is configured to subsequently place unprocessed workpieces into the load lock.

10. The workpiece handling system of claim 1 , wherein the second swap robot is configured to place a matrix of unprocessed workpieces into the load lock after the first swap robot removes a matrix of processed workpieces from the load lock.

11. The workpiece handling system of claim 10 , wherein the second swap robot is disposed in a parked position beneath the first swap robot when said gantry robot is loading or unloading a matrix associated with said first swap robot, and the first swap robot is configured to place a matrix of unprocessed workpieces into the load lock after the second swap robot removes a matrix of processed workpieces from the load lock.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Schaller Jason M
• Vopat Robert Brent
• Carlson Charles T
• Daniel Malcolm N
• Webb Aaron P
• Weaver William T

Classifications

• H10P72/3311

  Horizontal transfer of a batch of workpieces · CPC title

• H10P72/3222

  Loading to or unloading from a conveyor · CPC title

• H10P72/3221

  Overhead conveying · CPC title

• H10P72/0471 Primary

  comprising at least one ion or electron beam chamber · CPC title

• B65G2203/041

  Camera · CPC title