Amplified dual-gate bio field effect transistor

Patent metadata

Field	Value
Publication number	US-9689835-B2
Application number	US-201313831106-A
Country	US
Kind code	B2
Filing date	Mar 14, 2013
Priority date	Oct 31, 2011
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

The present disclosure provides a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device may include a substrate; a gate structure disposed on a first surface of the substrate and an interface layer formed on the second surface of the substrate. The interface layer may allow for a receptor to be placed on the interface layer to detect the presence of a biomolecule or bio-entity. An amplification factor of the BioFET device may be provided by a difference in capacitances associated with the gate structure on the first surface and with the interface layer formed on the second surface.

First claim

What is claimed is:

1. A semiconductor device, comprising:
a substrate having a well region therein such that the substrate and the well region have at least one vertical interface therebetween extending from a first surface of the substrate to a second surface of the substrate opposite the first surface, the well region having disposed therein:
a source region, a channel region, and a drain region, wherein the well region has a dopant type opposite a dopant type of the source region and the drain region;

a first gate structure disposed on the first surface of the substrate, the first gate structure including a conductive layer and a first dielectric layer, wherein a portion of the source region is free of the first gate structure and a portion of the drain region is free of the first gate structure;
a second gate structure disposed on the second surface of the substrate, the second gate structure including an interface layer disposed on the second surface, wherein the interface layer is configured to bind a target molecule and the interface layer includes a second dielectric layer,
wherein the source region, the channel region, and the drain region extend an entire thickness of the substrate measured from the first surface to the second surface;
a third dielectric layer disposed on the second surface of the substrate and extending through a trench in the substrate to an interconnect structure disposed on the first surface of the substrate; and
a first interconnect conductor disposed on the third dielectric layer and extending through the trench in the substrate to electrically couple to a second interconnect conductor of the interconnect structure.

2. The semiconductor device of claim 1 , wherein an effective thickness of the first dielectric layer is smaller than an effective thickness of the second dielectric layer.

3. The semiconductor device of claim 1 , wherein the first dielectric layer is formed from a first material and the second dielectric layer is formed from a second material.

4. The semiconductor device of claim 1 , wherein a dielectric constant of the second dielectric layer is greater than a dielectric constant of the first dielectric layer.

5. The semiconductor device of claim 1 , wherein a transconductance associated with the second gate structure is greater than a transconductance associated with the first gate structure.

6. The semiconductor device of claim 1 , wherein a sub-threshold swing associated with the second gate structure is less than a sub-threshold swing associated with the first gate structure.

7. The semiconductor device of claim 1 , wherein a dopant implantation concentration of the source region is different from a dopant implantation concentration of the drain region.

8. The semiconductor device of claim 1 , wherein the conductive layer of the first gate structure includes polysilicon.

9. The semiconductor device of claim 1 , wherein a sidewall of the first gate structure is substantially aligned with a sidewall of the second gate structure.

10. A bio-entity sensing device, comprising:
a first semiconductor device that includes:
a substrate having a well region that includes: a source region, a channel region, and a drain region, wherein the well region and the substrate have at least one interface therebetween that extends an entire thickness of the substrate, wherein the well region extends beyond the source region, the channel region, and the drain region, and wherein the well region has a dopant type opposite a dopant type of the source region and the drain region,
a first gate structure disposed on a first surface of the substrate, the first gate structure including a first dielectric layer disposed on the first surface and a conductive layer disposed on the first dielectric layer, wherein the first gate structure extends over a portion of each of the source region and the drain region such that the source region and the drain region extend beyond the first gate structure,
a second gate structure disposed on a second surface of the substrate, the second gate structure including a second dielectric layer disposed on the second surface and a receptor material disposed on the second dielectric layer, wherein the source region, the channel region, and the drain region extend from the first surface to the second surface, and
a third dielectric layer disposed on the second surface of the substrate, wherein the third dielectric layer includes an opening substantially aligned with the first gate structure, and further wherein the second gate structure is disposed on the second surface within the opening; and

a sense amplifier coupled to the first semiconductor device.

11. The bio-entity sensing device of claim 10 , further comprising:
a second semiconductor device connected to the first semiconductor device by a first line;
a third semiconductor device connected to a second line; and
a fourth semiconductor device connected to the second line, wherein the first, second, third and fourth semiconductor devices are disposed in an array configuration.

12. The bio-entity sensing device of claim 11 , wherein the first and second lines are configured to carry a signal resulting from a detection of a target by the first semiconductor device.

13. The bio-entity sensing device of claim 10 , wherein the first gate structure and the second gate structure are substantially aligned.

14. The bio-entity sensing device of claim 10 , further comprising an interconnect structure disposed on the first surface of the substrate.

15. A semiconductor device, comprising:
a substrate having a well region containing: a source region, a channel region, and a drain region, wherein the well region extends horizontally beyond the source region, the channel region, and the drain region, wherein the well region includes a dopant of a first type, and wherein each of the source region and the drain region includes a dopant of a second type that is different from the first type;
a first gate structure disposed over the channel region on a first surface of the substrate, the first gate structure including a first dielectric layer disposed on the first surface and a conductive layer disposed on the first dielectric layer, wherein the first gate structure extends over a portion of each of the source region and the drain region, such that the source region and the drain region extend beyond the first gate structure;
a second gate structure disposed over the channel region on a second surface of the substrate, the second gate structure including a second dielectric layer disposed on the second surface, wherein the second gate structure is positioned within a fluidic channel that a solution within the fluidic channel is maintained in contact with a portion of the second gate structure, and wherein the source region, the channel region, and the drain region extend from the first surface to the second surface, and wherein a capacitance associated with the first gate structure is different than a capacitance associated with the second gate structure;
an isolation layer disposed on the second surface of the substrate and extending through a trench in the substrate; and
an interconnect layer disposed on the isolation layer and extending through the trench in the substrate.

16. The semiconductor device of claim 15 , wherein the second gate structure further comprises a receptor material layer disposed on the second dielectric layer.

17. The semiconductor device of claim 15 , wherein an effective thickness of the first dielectric layer is smaller than an effective thickness

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Liu Yi-Shao
• Bashir Rashid
• Lai Fei-Lung
• Cheng Chun-Wen

Classifications

• G01N27/414 Primary

  Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS · CPC title

• H01L29/66477

  Electricity · mapped topic

• G01N27/4148

  Integrated circuits therefor, e.g. fabricated by CMOS processing · CPC title

• H01L51/0093

  Electricity · mapped topic

• G01N27/4145 Primary

  specially adapted for biomolecules, e.g. gate electrode with immobilised receptors · CPC title