Microvalve device and fluid flow control method

Patent metadata

Field	Value
Publication number	US-9689508-B2
Application number	US-201214415383-A
Country	US
Kind code	B2
Filing date	Aug 9, 2012
Priority date	Aug 9, 2012
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer ( 1 ) and a second layer ( 2 ) bonded with the first layer ( 1 ), the second layer ( 2 ) having a plurality of fluid ports ( 7, 8, 9 ); a cavity ( 6 ) disposed between the first layer and the second layer; a plurality of actuators ( 3, 4, 5 ) respectively disposed corresponding to each fluid port, the plurality of actuators ( 3, 4, 5 ) controlling the opening and closing of the plurality of fluid ports ( 7, 8, 9 ). The fluid flow control method comprising: respectively employing a plurality of actuators to independently control the opening and closing of a plurality of fluid ports.

First claim

The invention claimed is:

1. A microvalve device for controlling fluid flow, comprising:
a microvalve body, the microvalve body being composed of multiple layers and including a first layer and a second layer that is bonded with the first layer and has a plurality of fluid ports;
a cavity, disposed between the first layer and the second layer;
a plurality of actuators, respectively disposed corresponding to each fluid port,
wherein, opening and closing of the plurality of fluid ports are controlled by the plurality of actuators independently,
wherein, the plurality of fluid ports comprises a fluid source port, a control port and a backflow port, and
upon the fluid source port and the control port being open and the backflow port being closed, fluid flows from the fluid source port toward the control port; and upon the fluid source port being closed and the control port and the backflow port being open, fluid flows from the control port toward the backflow port.

2. The microvalve device according to claim 1 , wherein,
the plurality of fluid ports are disposed in a region corresponding to the cavity, and the plurality of fluid ports run through the second layer.

3. The microvalve device according to claim 1 , wherein,
each fluid port of the plurality of fluid ports is fully covered by one actuator, and upon the fluid port being in a closed state, the actuator closely contacts with a surface of the second layer surrounding the port, so as to block up the fluid flow through the fluid port.

4. The microvalve device according to claim 1 , wherein,
corresponding one or two ends of each of the actuators are fixed around corresponding ports.

5. The microvalve device according to claim 1 , wherein,
the actuators are configured to be deformed in response to application of opening signals, so that gaps for passing of fluid are formed between the actuators and a surface of the second layer surrounding corresponding ports, for opening of corresponding ports.

6. The microvalve device according to claim 1 , wherein,
the first layer is configured for leadout of electrodes connected to the actuators, so that signals are input to the actuators.

7. The microvalve device according to claim 1 , wherein,
the actuators are configured to be deformed in different degrees in response to size of the applied signals, so that gaps with different sizes are produced between lower surfaces of the actuators and a surface of the second layer surrounding the ports.

8. The microvalve device according to claim 1 , wherein,
the actuators comprise electro-thermal actuators and piezoelectric actuators.

9. The microvalve device according to claim 1 , wherein,
the actuators are metal-piezoelectric bilayer membrane actuators.

10. The microvalve device according to claim 1 , wherein,
the plurality of actuators and the second layer containing the plurality of fluid ports are formed at one time by micromechanical machining processes.

11. The microvalve device according to claim 1 , wherein,
the fluid source port is communicated with a fluid source, and the control port is communicated with a mechanism for control of a main valve.

12. A method of controlling fluid flow with a microvalve device, which comprises a microvalve body composed of multiple layers and including a first layer and a second layer that is bonded with the first layer and has a plurality of fluid ports, with a cavity formed between the first layer and the second layer, the method comprising:
respectively adopting a plurality of actuators to independently control opening and closing of the plurality of fluid ports, so as to realize different combining manners of on/off states of fluid ports in correspondence with different modes in which fluid flows between ports,
wherein, the plurality of fluid ports comprises a fluid source port, a control port and a backflow port, and
upon the fluid source port and the control port being open and the backflow port being closed, fluid flows from the fluid source port toward the control port; and upon the fluid source port being closed and the control port and the backflow port being open, fluid flows from the control port toward the backflow port.

13. The method according to claim 12 , in each of the combining manners of on/off states of fluid ports, the opening degree of each port is controllable independently.

14. The method according to claim 12 , wherein, corresponding ports are controlled by means of applying electric signals to the actuators.

Assignees

• Deng Ning
• Wang Zheyao
• Chen Peiyi
• Zhang Shengchang
• Jiang Tinghou
• Zhejiang Dunan Artificial Env Co Ltd
• Univ Tsinghua

Inventors

• Deng Ning
• Wang Zheyao
• Chen Peiyi
• Zhang Shengchang
• Jiang Tinghou

Classifications

• F16K99/0042

  Electric operating means therefor · CPC title

• F16K2099/009

  Fluid power devices · CPC title

• F16K99/0034 Primary

  Operating means specially adapted for microvalves · CPC title