Selector-based non-volatile cell fabrication utilizing IC-foundry compatible process

Patent metadata

Field	Value
Publication number	US-9685483-B2
Application number	US-201615066504-A
Country	US
Kind code	B2
Filing date	Mar 10, 2016
Priority date	Jul 9, 2014
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

A circuit operable as a non-volatile memory cell, formed in part from a volatile selection device, is provided. The circuit can be fabricated utilizing Integrated Circuit (IC)-Foundry compatible processes to simplify manufacturing, reduce cost and improve yield. For instance, the circuit can comprise a set of transistors fabricated at least in part with front-end-of-line IC processes, and can comprise the volatile selection device and a set of interconnects fabricated at least in part with back-end-of-line IC processes. In further embodiments, the volatile selection device can be a two-terminal, volatile resistive-switching device connected at one end to a gate of an n-well transistor, and connected at a second end to a gate of a p-well transistor.

First claim

What is claimed is:

1. A method of fabricating a non-volatile memory device, comprising:
forming a first transistor and a second transistor in a substrate;
forming conductive interconnects as a backend-of-line (BEoL) process overlying the substrate, which further comprises:
forming a first of the conductive interconnects having a first end thereof in electrical contact with a first gate of the first transistor;
forming a second of the conductive interconnects having a first end thereof in electrical contact with a second gate of the second transistor;
forming a volatile, resistive-switching selection device in electrical contact with a second end of the first of the conductive interconnects;
forming a contact in electrical contact with a second end of the second of the conductive interconnects; and
forming a metal layer overlying and in electrical contact with both the volatile selection device and the contact.

2. The method of claim 1 , further comprising forming the volatile, resistive-switching selection device between a first metal line of a first BEoL metal layer, and a second BEoL metal layer.

3. The method of claim 2 , further comprising forming the contact between a second metal line of the first BEoL metal layer, and the second BEoL metal layer.

4. The method of claim 2 , wherein the second BEoL metal layer comprises the metal layer.

5. The method of claim 2 , wherein forming the metal layer in electrical contact with both the volatile, resistive-switching selection device and the contact further comprises forming a series electrical connection between a terminal of the selection device and the contact.

6. The method of claim 1 , further comprising forming the first transistor as a p-well transistor.

7. The method of claim 1 , further comprising forming the second transistor as an n-well transistor.

8. The method of claim 1 , wherein forming the volatile, resistive-switching selection device further comprises forming a bottom electrode from a first metal material, forming a selection layer from an insulating medium, and forming a top electrode from a second metal material.

9. The method of claim 8 , further comprising selecting the insulating medium to be at least in part permeable to both the first metal material and the second metal material.

10. The method of claim 8 , further comprising selecting the first metal material or the second metal material from a noble metal.

11. The method of claim 8 , further comprising selecting the first metal material or the second metal material from a group consisting of: a noble metal, a noble metal alloy, Al, an Al-alloy, Cu, and a Cu-alloy.

12. The method of claim 8 , further comprising forming the contact and the top electrode to have respective surfaces that share or substantially share a common plane.

13. The method of claim 12 , further comprising forming the metal layer to be in electrical contact with the respective surfaces of the contact and the top electrode.

14. A non-volatile memory, comprising:
a first three-terminal transistor having a source, a drain and a gate formed in a substrate or a dielectric of the non-volatile memory;
a volatile selection device having a first terminal, a second terminal and a selection layer, wherein the first terminal is connected electrically in serial to the gate of the first three-terminal transistor; and
a second three-terminal transistor having a second source, a second drain and a second gate, wherein the second terminal of the volatile selection device is connected to the second gate of the second three-terminal transistor.

15. The non-volatile memory of claim 14 , wherein the first three-terminal transistor is a p-well transistor.

16. The non-volatile memory of claim 14 , wherein the second three-terminal transistor is an n-well transistor.

17. The non-volatile memory of claim 14 , wherein the volatile selection device is formed at least in part among backend-of-line metal layers of the non-volatile memory.

18. The non-volatile memory of claim 14 , wherein the selection layer comprises an insulating material at least in part permeable to particles of the first terminal and the second terminal, and is configured to have a low density of defect sites suitable for trapping the particles of the first terminal and the second terminal suitable to facilitate formation of a conductive filament of the particles of a few particles in width, or less.

19. The non-volatile memory of claim 14 , wherein the second terminal or the first terminal is selected from a group consisting of: a noble metal, a noble metal alloy, Cu, Co, Ni, Al and Fe.

20. The non-volatile memory of claim 14 , wherein the selection layer is selected from a group consisting of: SiOx, TiOx, AlOx, WOx, TixNyOz, HfOx, TaOx, NbOx where x, y, and z are positive numbers selected to provide non-stoichiometric values of oxygen or nitrogen.

Assignees

• Crossbar Inc

Inventors

• Nazarian Hagop
• Jo Sung Hyun
• Gee Harry Yue

Classifications

• G11C2213/79

  Array wherein the access device being a transistor · CPC title

• G11C2213/53

  Structure wherein the resistive material being in a transistor, e.g. gate · CPC title

• G11C14/0045

  and the nonvolatile element is a resistive RAM element, i.e. programmable resistors, e.g. formed of phase change or chalcogenide material · CPC title

• G11C13/004

  Reading or sensing circuits or methods · CPC title

• G11C13/0069

  Writing or programming circuits or methods · CPC title