Methods for high precision microelectronic die integration

Patent metadata

Field	Value
Publication number	US-9685421-B2
Application number	US-201514727205-A
Country	US
Kind code	B2
Filing date	Jun 1, 2015
Priority date	Jun 3, 2013
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

The subject matter of the present description relates to methods for the precise integration of microelectronic dice within a multichip package which substantially reduce or eliminate any misalign caused by the movement of the microelectronic dice during the integration process. These methods may include the use of a temporary adhesive in conjunction with a carrier having at least one recess for microelectronic die alignment, the use of a precision molded carrier for microelectronic die alignment, the use of magnetic alignment of microelectronic dice on a reusable carrier, and/or the use of a temporary adhesive with molding processes on a reusable carrier.

First claim

What is claimed is:

1. A method comprising:
providing a reusable carrier having a first surface and a second surface;
disposing a die-bonding adhesive layer on the reusable carrier first surface;
placing at least one magnetic holding structure proximate the reusable carrier second surface;
providing at least one microelectronic die having an active surface and an opposing back surface with at least one sidewall extending therebetween and having a plurality of interconnection structures extending from the microelectronic die active surface, wherein the at least one microelectronic die includes at least one dummy magnetic column disposed on at least one of the microelectronic die active surface and the microelectronic die back surface;
aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure and the at least one microelectronic die dummy magnetic columns;
adhering the plurality of interconnection structures to the die-bonding adhesive layer;
disposing an encapsulant material over the at least one microelectronic die;
attaching a backside carrier to the encapsulant material with an adhesive layer; and
removing the reusable carrier and the die-bonding adhesive layer.

2. The method of claim 1 , wherein placing the at least one magnetic holding structure proximate the reusable carrier second surface comprises placing the at least one magnetic holding structure proximate the reusable carrier second surface, wherein the at least one magnetic holding structure includes at least one permanent magnetic column.

3. The method of claim 2 , wherein aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure and the at least one microelectronic die dummy magnetic columns comprises aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure permanent magnetic column and the at least one microelectronic die dummy magnetic column.

4. The method of claim 1 , further including planarizing the encapsulant material to expose the back surface of the at least one microelectronic die.

5. The method of claim 4 , wherein planarizing the encapsulant material to expose the back surface of the at least one microelectronic die occurs prior to attaching the backside carrier and wherein attaching a backside carrier to the encapsulant material with an adhesive layer further includes attaching backside carrier to the at least one microelectronic die back surface with the adhesive layer.

6. A method comprising:
providing a reusable carrier having a first surface and a second surface;
disposing a die-bonding adhesive layer on the reusable carrier first surface;
placing at least one magnetic holding structure proximate the reusable carrier second surface;
providing at least one microelectronic die having an active surface and an opposing back surface with at least one sidewall extending therebetween and having a plurality of interconnection structures extending from the microelectronic die active surface, wherein the at least one microelectronic die includes at least one dummy magnetic column disposed on the microelectronic die active surface adjacent to the plurality of interconnection structures;
aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure and the at least one microelectronic die dummy magnetic columns;
adhering the plurality of interconnection structures to the die-bonding adhesive layer;
disposing an encapsulant material over the at least one microelectronic die;
attaching a backside carrier to the encapsulant material with an adhesive layer; and
removing the reusable carrier and the die-bonding adhesive layer.

7. The method of claim 6 , wherein the at least one dummy magnetic column is adjacent the at least one side wall of the at least one microelectronic die.

8. The method of claim 6 , wherein placing the at least one magnetic holding structure proximate the reusable carrier second surface comprises placing the at least one magnetic holding structure proximate the reusable carrier second surface, wherein the at least one magnetic holding structure includes at least one permanent magnetic column.

9. The method of claim 8 , wherein aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure and the at least one microelectronic die dummy magnetic columns comprises aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure permanent magnetic column and the at least one microelectronic die dummy magnetic column.

10. The method of claim 6 , further including planarizing the encapsulant material to expose the back surface of the at least one microelectronic die.

11. The method of claim 10 , wherein planarizing the encapsulant material to expose the back surface of the at least one microelectronic die occurs prior to attaching the backside carrier and wherein attaching a backside carrier to the encapsulant material with an adhesive layer further includes attaching backside carrier to the at least one microelectronic die back surface with the adhesive layer.

12. A method comprising:
providing a reusable carrier having a first surface and a second surface;
disposing a die-bonding adhesive layer on the reusable carrier first surface;
placing at least one magnetic holding structure proximate the reusable carrier second surface;
providing at least one microelectronic die having an active surface and an opposing back surface with at least one sidewall extending therebetween and having a plurality of interconnection structures extending from the microelectronic die active surface, wherein the at least one microelectronic die includes at least one dummy magnetic column disposed on the microelectronic die back surface adjacent the at least one side wall of the at least one microelectronic die;
aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure and the at least one microelectronic die dummy magnetic columns;
adhering the plurality of interconnection structures to the die-bonding adhesive layer;
disposing an encapsulant material over the at least one microelectronic die;
attaching a backside carrier to the encapsulant material with an adhesive layer; and
removing the reusable carrier and the die-bonding adhesive layer.

13. The method of claim 12 , wherein placing the at least one magnetic holding structure proximate the reusable carrier second surface comprises placing the at least one magnetic holding structure proximate the reusable carrier second surface, wherein the at least one magnetic holding structure includes at least one permanent magnetic column.

14. The method of claim 13 , wherein aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure and the at least one microelectronic die dummy magnetic columns comprises aligning the at least one microelectronic die with a magnetic force between the at least one magnetic holding structure permanent magnetic column and the at least one microelectronic die dummy magnetic column.

15. The method of claim 12 , further including planarizing the encapsulant material to expose the back surface of the at least one microelectronic die.

16. The method of claim 15 , wherein planarizing the encapsulant material to expose the back surface of the at least one microelectronic die occu

Assignees

• Intel Corp

Inventors

• Aleksov Aleksandar
• Mahajan Ravindranath V
• Karhade Omkar
• Deshpande Nitin

Classifications

• H10W74/00

  Encapsulations, e.g. protective coatings · CPC title

• H10W70/682

  comprising holes having chips therein · CPC title

• H10W70/099

  Connecting interconnections to insulating or insulated package substrates, interposers or redistribution layers · CPC title

• H10W72/0198

  batch processes · CPC title

• H10W72/874

  On different surfaces · CPC title