Devices and methods of forming epi for aggressive gate pitch

Patent metadata

Field	Value
Publication number	US-9685384-B1
Application number	US-201615210012-A
Country	US
Kind code	B1
Filing date	Jul 14, 2016
Priority date	Jul 14, 2016
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

Devices and methods of fabricating integrated circuit devices for forming epi for aggressive gate pitch are provided. One method includes: obtaining an intermediate semiconductor device having a substrate, a fin structure, a plurality of stacks; etching the spacer between the plurality of stacks; growing, epitaxially, undoped silicon on a top surface of the fin structure between the plurality of stacks; depositing a liner over the undoped silicon and the plurality of stacks; etching to remove the liner and narrow the spacers, wherein the etching forms a wider portion of the spacer at the base of the stacks; etching between the plurality of stacks to remove the undoped silicon and form recesses in the fin structure; and growing, epitaxially, doped silicon between the plurality of stacks and in the fin structure. Also disclosed is an intermediate device formed by the method.

First claim

What is claimed is:

1. A method comprising:
obtaining an intermediate semiconductor device having a substrate, a fin structure, a plurality of stacks, and a spacer deposited over the fin structure and the stacks, the stacks comprising a layer of amorphous silicon and a hardmask;
etching the spacer between the plurality of stacks;
growing, epitaxially, undoped silicon on a top surface of the fin structure between the plurality of stacks;
depositing a liner over the undoped silicon and the plurality of stacks;
etching to remove the liner and narrow the spacers, wherein the etching forms a wider portion of the spacer at the base of the stacks than the top of the stacks;
etching between the plurality of stacks to remove the undoped silicon and form recesses in the fin structure; and
growing, epitaxially, doped silicon or doped silicon germanium between the plurality of stacks and in the fin structure.

2. The method of claim 1 , wherein the hardmask comprises a nitride hardmask and an oxide hardmask.

3. The method of claim 1 , wherein the spacer includes SiBCN, SiOCN, or SiOC.

4. The method of claim 1 , wherein the etching to remove the liner comprises one of wet etching or dry etching.

5. The method of claim 1 , wherein the etching between the plurality of stacks comprises a silicon etch.

6. The method of claim 1 , wherein the doped silicon comprises one of n-doped silicon or p-doped silicon.

7. The method of claim 1 , wherein the removing of the liner comprises HFEG exposure.

8. A method comprising:
obtaining an intermediate semiconductor device having a substrate, an NFET fin structure having a plurality of NFET stacks, and a spacer deposited over the fin structure and the NFET stacks, the NFET stacks comprising a layer of amorphous silicon, a nitride hardmask, and an oxide hardmask; and a PFET fin structure having a plurality of PFET stacks, and a spacer deposited over the fin structure and the PFET stacks, the PFET stacks comprising a layer of amorphous silicon and a hardmask;
etching the spacer between the plurality of NFET stacks and the PFET stacks;
growing, epitaxially, undoped silicon on a top surface of the fin structure between the plurality of NFET and PFET stacks;
depositing a liner over the undoped silicon and the plurality of NFET and PFET stacks;
depositing an optical planarization layerover the liner of the NFET fin structure;
depositing a SiARC layer over the optical planarization layer;
etching to remove the SiARC layer over the NFET fin structure and the liner over the PFET fin structure, narrowing the PFET spacers, wherein the etching forms a wider portion of the spacer at the base of the PFET stacks than the top of the PFET stacks;
etching between the plurality of PFET stacks to remove the undoped silicon and form recesses in the fin structure;
stripping the optical planarization layer;
growing, epitaxially, p-doped silicon or silicon germanium between the plurality of PFET stacks and in the fin structure of the PFET fin structure;
removing the liner over the NFET fin structure;
depositing a liner over the undoped silicon of the NFET fin structure, the plurality of NFET stacks, the plurality of PFET stacks, and the p-doped silicon of the PFET fin structure;
depositing an optical planarization layerover the liner of the PFET fin structure;
depositing a SiARC layer over the optical planarization layer;
etching to remove the SiARC layer over the PFET fin structure and the liner over the NFET fin structure, narrowing the spacers over the NFET fin structure, wherein the etching forms a wider portion of the spacer at the base of the NFET stacks than the top of the NFET stacks;
etching between the plurality of NFET stacks to remove the undoped silicon and form recesses in the fin structure;
stripping the optical planarization layer;
growing, epitaxially, n-doped silicon or doped silicon between the plurality of NFET stacks and in the fin structure of the NFET fin structure;
removing the liner over the PFET fin structure.

9. The method of claim 8 , wherein the hardmask comprises a nitride hardmask and an oxide hardmask.

10. The method of claim 8 , wherein the spacer includes SiBCN, SiOCN, or SiOC.

11. The method of claim 8 , wherein the etching to remove the liner comprises one of wet etching or dry etching.

12. The method of claim 8 , wherein the etching between the plurality of stacks comprises a silicon etch.

13. The method of claim 8 , wherein the removing of the liner comprises HFEG exposure.

Assignees

• Globalfoundries Inc

Inventors

• Xie Ruilong
• Prindle Christopher
• Seo Soon-Cheon
• Pranatharthiharan Balasubramanian
• Montanini Pietro
• Mochizuki Shogo

Classifications

• H10P50/694

  characterised by their behaviour during the process, e.g. soluble masks or redeposited masks · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10D30/024

  of fin field-effect transistors [FinFET] · CPC title

• H01L21/3085

  Electricity · mapped topic

• H01L29/6656

  Electricity · mapped topic