Charged-particle radiation apparatus

Patent metadata

Field	Value
Publication number	US-9685301-B2
Application number	US-201314433891-A
Country	US
Kind code	B2
Filing date	Oct 11, 2013
Priority date	Oct 16, 2012
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

The present invention provides a charged-particle radiation apparatus with a defect observation device for observing defects on a sample, the apparatus including a control unit and a display unit. The control unit is configured to execute a drift correction process on one or more images acquired with the defect observation device under a plurality of correction conditions, and display the plurality of correction conditions and a plurality of corrected images obtained through execution of the drift correction process in association with each other, as a first screen on the display unit.

First claim

The invention claimed is:

1. A charged-particle beam apparatus with a defect observation device for observing a defect on a sample, the apparatus comprising:
a control unit; and
a display unit,
wherein the control unit is configured to:
acquire a plurality of frame images to be integrated from the defect observation device,
generate a plurality of integrated images having different numbers of frames while executing a drift correction process, and
display (i) the plurality of integrated images, and (ii) at least one of the number of frames for each integrated image and a time required for image processing in association with each other, as a first screen on the display unit, wherein the time varies depending on the number of frames.

2. The charged-particle beam apparatus according to claim 1 , wherein the control unit is configured to execute an automatic defect observation process on the plurality of corrected images, and display on the first screen defect positions detected through the automatic defect observation process such that the defect positions are laid over the respective corrected images.

3. The charged-particle beam apparatus according to claim 2 , wherein the control unit is configured to display on the first screen throughput information on the automatic defect observation process executed on the plurality of corrected images in association with the respective correction conditions.

4. The charged-particle beam apparatus according to claim 2 , wherein the control unit is configured to display at least one of a cumulative frequency of results determined to be optimal by the user for a plurality of evaluated samples by the plurality of correction conditions and a detection rate of the automatic defect observation process for each of the plurality of correction conditions, as a second screen on the display unit.

5. The charged-particle beam apparatus according to claim 4 , wherein the control unit is configured to display on the second screen at least one of an execution time of the drift correction process on the one or more images and throughput information on the automatic defect observation process executed on each of the plurality of corrected images.

6. The charged-particle beam apparatus according to claim 1 , wherein the control unit is configured to execute an automatic defect classification process on the plurality of corrected images, and display on the first screen classification results obtained through the automatic defect classification process in association with the respective corrected images.

7. The charged-particle beam apparatus according to claim 6 , wherein the control unit is configured to display on the first screen throughput information on the automatic defect classification process executed on the plurality of corrected images in association with the respective correction conditions.

8. The charged-particle beam apparatus according to claim 6 , wherein the control unit is configured to display at least one of a cumulative frequency of results determined to be optimal by the user for a plurality of evaluated samples by the plurality of correction conditions and an accuracy rate of the automatic defect classification process for each of the plurality of correction conditions, as a second screen on the display unit.

9. The charged-particle beam apparatus according to claim 8 , wherein the control unit is configured to display on the second screen at least one of an execution time of the drift correction process on the one or more images and throughput information on the automatic defect classification process executed on each of the plurality of corrected images.

10. The charged-particle beam apparatus according to claim 1 , wherein the control unit is configured to display on the first screen an execution time of the drift correction process on the one or more images in association with each of the plurality of correction conditions.

11. The charged-particle beam apparatus according to claim 1 , wherein the control unit is configured to display on the first screen the one or more images before the drift correction process in association with the each of the plurality of correction conditions.

12. The charged-particle beam apparatus according to claim 1 , wherein the control unit is configured to display a cumulative frequency of results determined to be optimal by the user for a plurality of evaluated samples by the plurality of correction conditions as a second screen on the display unit.

13. The charged-particle beam apparatus according to claim 12 , wherein the control unit is configured to display on the second screen an execution time of the drift correction process on the one or more images in association with the distribution of the plurality of correction conditions.

14. The charged-particle beam apparatus according to claim 1 , wherein
the control unit is configured to execute an automatic defect observation process on the plurality of corrected images, and display on the first screen defect positions obtained through the automatic defect observation process such that the defect positions are laid over the respective corrected images, and
the control unit is configured to execute an automatic defect classification process on the plurality of corrected images, and display on the second screen classification results obtained through the automatic defect classification process in association with the respective corrected images.

15. The charged-particle beam apparatus according to claim 14 , wherein the control unit is configured to separately display on the second screen throughput information on the automatic defect observation process executed on each of the plurality of corrected images and throughput information on the automatic defect classification process executed on each of the plurality of corrected images.

16. A charged-particle beam apparatus with a defect observation device for observing a defect on a sample, the apparatus comprising:
a control unit; and
a display unit,
wherein the control unit is configured to:
acquire a plurality of frame images to be integrated from the defect observation device,
generate a plurality of integrated images having different numbers of frames while executing a drift correction process,
detect at least one of a defect area and defect coordinates from each of the plurality of integrated images,
display (i) the plurality of integrated images, and (ii) at least one of the defect area and the defect coordinates in an overlaid manner, and
display (i) the plurality of integrated images, and (ii) at least one of the number of frames for each integrated image and a time required for image processing in association with each other, on the display unit, wherein the time varies depending on the number of frames.

17. A charged-particle beam apparatus with a defect observation device for observing a defect on a sample, the apparatus comprising:
a control unit; and
a display unit,
wherein the control unit is configured to:
acquire a plurality of frame images to be integrated from the defect observation device,
generate a plurality of integrated images having different numbers of frames while executing a drift correction process,
detect at least one of a defect area and defect coordinates from each of the plurality of integrated images,
classify the detected defects by type of defect, and
display the plurality of integrated images and information of the classified defect in association with each other, on the display unit.

Assignees

• Hitachi High Tech Corp

Inventors

• Hirai Takehiro
• Nakagaki Ryo
• Obara Kenji

Classifications

• H01J2237/24592

  Inspection and quality control of devices · CPC title

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title