Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element

Patent metadata

Field	Value
Publication number	US-9684252-B2
Application number	US-201113281138-A
Country	US
Kind code	B2
Filing date	Oct 25, 2011
Priority date	Jun 14, 2005
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

An optical element ( 14 ) transparent for radiation with a wavelength λ in the ultraviolet wavelength range below 250 nm, in particular at 193 nm, comprises a substrate ( 17 ) with a refractive index n s larger than 1.6, and an antireflection coating ( 16 ) formed on at least part of the surface of the substrate ( 17 ) between the substrate ( 17 ) and an ambient medium with a refractive index n A , preferably with n A =1.0. The antireflection coating ( 16 ) consists of a single layer of a material with a refractive index n L of about n L =√{square root over (n A n S )}, in particular n L >1.3, and the optical thickness d L of the single layer is about λ/4. The optical element ( 14 ) is preferably part of a projection objective ( 5 ) in a microlithography projection exposure apparatus ( 1 ) and located adjacent to a light-sensitive substrate ( 10 ).

First claim

The invention claimed is:

1. Optical element transparent for radiation with a wavelength λ in the ultraviolet wavelength range below 250 nm, comprising:
a substrate with a refractive index n s no larger than 1.8, and
an antireflection coating formed on at least part of the surface of the substrate between the substrate and an ambient medium with a refractive index n A ,
wherein the antireflection coating comprises low refractive index layers alternating with medium refractive index layers, such that a first low refractive index layer is provided adjacent to the substrate and at least one further low refractive index layer alternates with at least one medium refractive index layer, and such that the first low refractive index layer lies closer to the substrate than do any of the medium refractive index layers,
wherein all the medium refractive index layers have optical thicknesses that differ from each other, and all the low refractive index layers have optical thicknesses that differ from each other,
wherein the optical thickness of the first low refractive index layer is less than 0.45λ, where λ is 193 nm,
wherein the optical thickness of a second low refractive index layer is between 0.26λ and 0.34λ, where λ is 193 nm, and where the second low refractive index layer is arranged on the first low refractive index layer with a medium refractive index layer arranged between the first low refractive index layer and the second low refractive index layer,
wherein the optical thicknesses of all the medium and low refractive index layers are such that reflection of the radiation is minimized, and
wherein the substrate comprises a material selected from the group consisting of: barium fluoride (BaF 2 ), silicon oxide (SiO 2 ), and potassium chloride (KCl).

2. Optical element according to claim 1 , wherein the medium refractive index layers have a refractive index between 1.58 and 1.8, and the low refractive index layers have a refractive index smaller than 1.58.

3. Optical element according to claim 1 , wherein a material of the low refractive index layers is selected from the group consisting of: chiolithe (Na 5 AI 3 F 14 ), cryolite (Na 3 AIF 6 ), aluminium fluoride (AIF 3 ), magnesium fluoride (MgF 2 ), silicon oxide (SiO 2 ), calcium fluoride (CaF 2 ), lithium fluoride (LiF), sodium fluoride (NaF), and strontium fluoride (SrF 2 ).

4. Optical element according to claim 1 , wherein a material of the medium refractive index layers is selected from the group consisting of: gadolinium fluoride (GdF 3 ), lanthanum fluoride (LaF 3 ), erbium fluoride (ErF 3 ), yttrium fluoride (YF 3 ), neodymium fluoride (NdF 3 ), dysprosium fluoride (DyF 3 ), holmium fluoride (HoF 3 ), scandium fluoride (ScF 3 ), zirconium fluoride (ZrF 4 ), ytterbium fluoride (YbF 3 ), hafnium fluoride (HfF 4 ), and thorium fluoride (ThF 3 ).

5. Optical element according to claim 1 , wherein the surface is a hemispherical surface.

6. Projection objective for imaging a structure onto a light-sensitive substrate, having at least one optical element according to claim 1 .

7. Projection objective according to claim 6 , wherein the optical element is located adjacent to the light-sensitive substrate.

8. Microlithography projection exposure apparatus with a projection objective according to claim 7 , wherein an immersion liquid is disposed between the light-sensitive substrate and the optical element which is located adjacent to the light-sensitive substrate.

9. Microlithography projection exposure apparatus with a projection objective according to claim 6 , wherein an immersion liquid is disposed between the light-sensitive substrate and the optical element which is located adjacent to the light-sensitive substrate.

10. Optical element transparent for radiation with a wavelength λ in the ultraviolet wavelength range below 250 nm, comprising:
a plano-convex substrate with a refractive index n s no larger than 1.8 and with a convex radiation-entrance surface, and
an antireflection coating formed on at least part of the convex surface of the substrate between the substrate and an ambient medium with a refractive index n A ,
wherein the antireflection coating comprises low refractive index layers alternating with medium refractive index layers, such that a first low refractive index layer is provided directly adjacent to the substrate and at least one further low refractive index layer alternates with at least one medium refractive index layer, and such that the first low refractive index layer lies closer to the substrate than do any of the medium refractive index layers,
wherein all the medium refractive index layers have optical thicknesses that differ from each other, and all the low refractive index layers have optical thicknesses that differ from each other,
wherein the optical thickness of the first low refractive index layer is less than 0.45λ, where λ is 193 nm,
wherein the optical thickness of a second low refractive index layer is between 0.26λ and 0.34λ, where λ is 193 nm, and where the second low refractive index layer is arranged on the first low refractive index layer with a medium refractive index layer arranged between the first low refractive index layer and the second low refractive index layer,
wherein the optical thicknesses of all the medium and low refractive index layers are such that reflection of the radiation is minimized, and
wherein the substrate comprises a material selected from the group consisting of: barium fluoride (BaF 2 ), silicon oxide (SiO 2 ), and potassium chloride (KCl).

11. The optical element according to claim 10 , wherein the medium refractive index layers have a refractive index between 1.58 and 1.8, and the low refractive index layers have a refractive index smaller than 1.58.

12. The optical element according to claim 10 , wherein a material of the low refractive index layers is selected from the group consisting of: chiolithe (Na 5 AI 3 F 14 ), cryolite (Na 3 AIF 6 ), aluminium fluoride (AIF 3 ), magnesium fluoride (MgF 2 ), silicon oxide (SiO 2 ), calcium fluoride (CaF 2 ), lithium fluoride (LiF), sodium fluoride (NaF), and strontium fluoride (SrF 2 ).

13. The optical element according to claim 10 , wherein a material of the medium refractive index layers is selected from the group consisting of: gadolinium fluoride (GdF 3 ), lanthanum fluoride (LaF 3 ), erbium fluoride (ErF 3 ), yttrium fluoride (YF 3 ), neodymium fluoride (NdF 3 ), dysprosium fluoride (DyF 3 ), holmium fluoride (HoF 3 ), scandium fluoride (ScF 3 ), zirconium fluoride (ZrF 4 ), ytterbium fluoride (YbF 3 ), hafnium fluoride (HfF 4 ), and thorium fluoride (ThF 3 ).

Assignees

• Zaczek Christoph
• Pazidis Alexandra
• Zeiss Carl Smt Gmbh

Inventors

• Zaczek Christoph
• Pazidis Alexandra

Classifications

• G03F7/70941

  Stray fields and charges, e.g. stray light, scattered light, flare, transmission loss · CPC title

• G03F7/70341

  Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041) · CPC title

• G02B1/113

  using inorganic layer materials only · CPC title

• G03F7/70958 Primary

  Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties · CPC title

• G02B1/02

  made of crystals, e.g. rock-salt, semi-conductors (G02B1/08 takes precedence) · CPC title