Composite polishing pad and method for making the same

Patent metadata

Field	Value
Publication number	US-9682457-B2
Application number	US-201414500227-A
Country	US
Kind code	B2
Filing date	Sep 29, 2014
Priority date	Oct 1, 2013
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

The present invention relates to a composite polishing pad and a method for making the same. The composite polishing pad includes a cushion layer and a polishing layer. The cushion layer includes a first polymeric elastomer with a hardness of 10 to 70 shore D, and is attached to the polishing layer directly. The polishing layer includes a second polymeric elastomer with a hardness of 30 to 90 shore D, and has a polishing surface for polishing a workpiece. Whereby, the polishing layer will not peel off from the cushion layer easily, so that the polishing quality is raised.

First claim

What is claimed is:

1. A method for making a composite polishing pad, comprising the following steps:
(a) forming a first resin coating on a release paper;
(b) pre-baking the first resin coating at a first temperature of 40° C. to 130° C. to a semi-ripening state;
(c) forming a second resin coating on the semi-ripened first resin coating, so that the second resin coating directly contacts with the semi-ripened first resin coating;
(d) drying the first resin coating and the second resin coating at a second temperature of 100° C. to 140° C., so that the first resin coating becomes a cushion layer and the second resin coating becomes a polishing layer, wherein the second temperature is higher than the first temperature, the cushion layer has a hardness of 10 to 70 shore D, and the polishing layer has a hardness of 30 to 90 Shore D; and
(e) removing the release paper to form a composite polishing pad, wherein the composite polishing pad comprises the cushion layer and the polishing layer.

2. The method of claim 1 , wherein in the step (a), the first resin coating comprises a first polymeric elastomer and a first solvent, the first polymeric elastomer comprises a first ingredient and a second ingredient, the first ingredient has a hydroxyl group, an amino group, a mixture thereof or an oligomer thereof, and the second ingredient has a diisocyanate group; in the step (b), a part or all of the first solvent is volatilized, so that the first resin coating becomes a jellylike state; in the step (c), the second resin coating comprises a second polymeric elastomer and a second solvent, the second polymeric elastomer comprises a first ingredient and a second ingredient, the first ingredient has a hydroxyl group, an amino group, a mixture thereof or an oligomer thereof, and the second ingredient has a diisocyanate group; and in the step (d), the cushion layer and the polishing layer are combined through chemical bonding.

3. The method of claim 1 , wherein in the step (a), the release paper is a continuous release paper and is continuously provided; after the step (d) or the step (e), a cutting step is further performed to form a plurality of composite polishing pads.

Assignees

• San Fang Chemical Ind Co Ltd

Inventors

• Feng Chung-Chih
• Yao I-Peng
• Wu Wen-Chieh
• Hung Yung-Chang

Classifications

• B24D11/003

  without embedded abrasive particles (B24D11/005 takes precedence) · CPC title

• B24B37/22 Primary

  characterised by a multi-layered structure · CPC title

• B24B37/24

  characterised by the composition or properties of the pad materials · CPC title