Manufacturing method of diffraction grating

Patent metadata

Field	Value
Publication number	US-9678253-B2
Application number	US-201113330748-A
Country	US
Kind code	B2
Filing date	Dec 20, 2011
Priority date	Dec 20, 2010
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

A manufacturing method of a Blazed diffraction grating configured to diffract incident light and made of a CdTe or CdZnTe crystal material includes the step of forming a plurality of grating grooves in a processed surface of a work through machining using a processing machine for the Blazed diffraction grating. The forming step forms the grating grooves so that among surfaces of gratings formed by the forming step, a surface that receives the incident light most is set to a (110) plane as a crystal orientation of the crystal material.

First claim

What is claimed is:

1. A manufacturing method of a Blazed diffraction grating configured to diffract incident light and made of a CdTe or CdZnTe crystal material, the manufacturing method comprising the step of:
forming a plurality of grating grooves in a processed surface of a work through machining to form the Blazed diffraction grating,
wherein each of the plurality of gratings has a short side surface and a long side surface that intersect each other to constitute one of the plurality of grating grooves, each of the short side surface and the long side surface extending along a groove direction of the plurality of grating grooves, the groove direction being different from a Blazed direction,
wherein the short side surface has a short side of a triangular sectional shape on a section that contains the Blazed direction,
wherein the long side surface has a long side, which is longer than the short side, of the triangular sectional shape on the section, and
wherein one of the short side surface or the long side surface is a (110) plane of the crystal material.

2. The manufacturing method according to claim 1 , wherein the short side surface of the short side receives the incident light most, and is the (110) plane of the crystal material.

3. The manufacturing method according to claim 1 , wherein each grating groove has an opening angle of 90°.

4. The manufacturing method according to claim 1 , wherein the forming step forms the grating grooves using a diamond tool and a Shaper method.

5. The manufacturing method according to claim 1 , wherein the Blazed diffraction grating is an immersed diffraction grating.

6. The manufacturing method according to claim 2 , further comprising the step of mounting the work onto a processing machine performing the machining so that the short side surface that receives the incident light most.

7. A manufacturing method of a Blazed diffraction grating configured to diffract incident light and made of a CdTe or CdZnTe crystal material, the manufacturing method comprising the step of:
forming a plurality of grating grooves in a processed surface of a work through machining for the Blazed diffraction grating,
wherein each of the plurality of gratings has a short side surface and a long side surface that intersect each other to constitute one of the plurality of grating grooves, each of the short side surface and the long side surface extending along a groove direction of the plurality of grating grooves, the groove direction being different from a Blazed direction,
wherein the short side surface has a short side of a triangular sectional shape on a section that contains the Blazed direction,
wherein the long side surface has a long side, which is longer than the short side, of the triangular sectional shape on the section, and
wherein the forming step forms the grating grooves so that one of the short side surface or the long side surface of the triangular sectional shape of each grating formed by the forming step is a (110) plane of the crystal material.

8. A Blazed diffraction grating made of a CdTe or CdZnTe crystal material, the Blazed grating comprising:
a plurality of gratings, each having a triangular sectional shape on a section that contains a Blazed direction, providing a plurality of grating grooves,
wherein each of the plurality of gratings has a short side surface and a long side surface that intersect each other to constitute one of the plurality of grating grooves, each of the short side surface and the long side surface extending along a groove direction of the plurality of grating grooves, the groove direction being different from the Blazed direction,
wherein the short side surface has a short side of the triangular sectional shape on the section,
wherein the long side surface has a long side, which is longer than the short side, of the triangular sectional shape on the section, and
wherein one of the short side surface or the long side surface is a (110) plane of the crystal material.

9. The Blazed diffraction grating according to claim 8 , wherein the short side surface and the long side surface both are the (110) plane of the crystal material.

10. The Blazed diffraction grating according to claim 8 , wherein the grating has an asymmetrical triangular sectional shape on the respective section.

11. The Blazed diffraction grating according to claim 8 , wherein the Blazed diffraction grating is an immersed diffraction grating.

Assignees

• Sukegawa Takashi
• Sugiyama Shigeru
• Canon Kk

Inventors

• Sukegawa Takashi
• Sugiyama Shigeru

Classifications

• G02B5/1861

  Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials (G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence) · CPC title

• G02B5/1852 Primary

  using mechanical means, e.g. ruling with diamond tool, moulding · CPC title

• G02B5/1857

  using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams · CPC title

• C01B19/007

  Tellurides or selenides of metals (C01B19/002 takes precedence) · CPC title

• H10F77/1696

  the films including Group II-VI materials, e.g. CdTe or CdS · CPC title