Ion source, and mass analysis apparatus including same

Patent metadata

Field	Value
Publication number	US-9673035-B2
Application number	US-201314442283-A
Country	US
Kind code	B2
Filing date	Aug 20, 2013
Priority date	Nov 12, 2012
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

According to one embodiment of the present invention, an ion source includes: an anode tube in which gas flowing in through one side is ionized and discharged to the other side and in which a slit is formed on the outer circumference thereof; a filament which emits thermal electrons toward the slit so as to ionize the gas; and a diffusion-preventing body arranged between the filament and the slit and having at least one hole through which the thermal electrons can pass so as to reduce the diffusion of the thermal electrons flowing into the anode tube.

First claim

The invention claimed is:

1. An ion source, comprising:
an anode tube including a slit formed on a lateral portion thereof and configured to ionize gas introduced thereinto through one side and to discharge the ionized gas to the other side;
a filament configured to emit thermal electrons toward the slit so as to ionize the gas; and
a diffusion-preventing body having a plurality of holes and coupled to the anode tube through which the thermal electrons pass so as to reduce diffusion of the thermal electrons flowing into the anode tube;
wherein the slit is formed to penetrate through an outer circumference and an inner circumference of the anode tube; and
wherein the diffusion-preventing body is coupled to an inner circumference or an outer circumference of the anode tube to cover the formed slit.

2. The ion source of claim 1 , wherein the diffusion-preventing body is formed of a conductive material and is formed to have a mesh shape.

3. The ion source of claim 1 , wherein the filament is spaced from the slit so as to maintain a distance from the slit, and is connected to a first electrode and a second electrode, and
wherein the filament is connected to a common electrode on one point between the first and second electrodes.

4. The ion source of claim 3 , wherein the slit is positioned to face the filament formed between the first electrode and the common electrode, or the slit is positioned to face the filament formed between the second electrode and the common electrode.

5. The ion source of claim 1 , wherein the slit is formed on an outer circumference of the anode tube in plurality in number.

6. The ion source of claim 3 , wherein an electric current is selectively applicable to the first electrode or the second electrode.

7. A mass spectrometer, comprising:
the ion source of claim 1 configured to ionize gas introduced thereinto through one side and to discharge the ionized gas to the other side;
a mass filter unit configured to filter ions discharged from the ion source on the basis of a mass; and
a detector configured to detect the filtered ions.

Assignees

• Korea Res Inst Standards & Sci
• Korea Res Insitute Of Standards And Science

Inventors

• Park Chang Joon
• Ahn Jong Rok
• Han Cheolsu
• Ahn Sang Jung

Classifications

• H01J49/147 Primary

  with electrons, e.g. electron impact ionisation, electron attachment (H01J49/145 takes precedence) · CPC title

• H01J49/067

  Ion lenses, apertures, skimmers · CPC title

• H01J49/16

  using surface ionisation, e.g. field-, thermionic- or photo-emission · CPC title

• H01J49/10

  Ion sources; Ion guns · CPC title

• H01J49/26 Primary

  Mass spectrometers or separator tubes · CPC title