Optical waveguide for guiding illumination light

Patent metadata

Field	Value
Publication number	US-9671548-B2
Application number	US-201514833954-A
Country	US
Kind code	B2
Filing date	Aug 24, 2015
Priority date	Mar 14, 2013
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.

First claim

The invention claimed is:

1. A method, comprising:
using a device to detect a variable characteristic of a partial beam of light generated by a waveguide,
wherein the waveguide comprises:
a main body configured to guide light from a first end of the main body to a second end of the main body so that the light exits the main body via the second end of the main body; and
a mirror,

wherein:
the second end of the main body is in an exit plane;
the mirror is in a plane that is: a) in the exit plane; b) near the exit plane; or c) conjugate with the exit plane; and
the mirror extends beyond the exit plane in a direction away from the main body so that at least a portion of mirror is external to the main body;
the mirror is configured to reflect a partial beam of light after the partial beam of light exits the second end of the main body to separate the partial beam of light from a rest of the light after the rest of the light exits the second end of the main body;
a cross section of the partial beam of light is a part of a cross section of the light that exits the second end of the main body;
the mirror is configured so that the cross section of the partial beam of light is incident on the mirror with an angle of incidence that is greater than 70°; and
the method is used to inspect a wafer or a mask.

2. The method of claim 1 , wherein the method is used to inspect a mask.

3. The method of claim 1 , wherein the method is used to inspect a wafer.

4. The method of claim 1 , wherein:
the device comprises a sensor in a region of a plane in which a ratio h 1 to h 3 is less than one;
h 1 is a distance between rays of the same order of reflection in the partial beam of light proceeding from an identical point in a waveguide entrance region; and
h 3 is a maximum distance between rays of zero order of reflection in the partial beam of light passing through a same point in a waveguide exit region.

5. An optical assembly, comprising:
a waveguide comprising:
a main body configured to guide light from a first end of the main body to a second end of the main body so that the light exits the main body via the second end of the main body; and
a mirror,
wherein:
the second end of the main body is in an exit plane;
the mirror is in a plane that is: a) in the exit plane; b) near the exit plane; or c) conjugate with the exit plane; and
the mirror extends beyond the exit plane in a direction away from the main body so that at least a portion of mirror is external to the main body;
the mirror is configured to reflect a partial beam of light after the partial beam of light exits the second end of the main body to separate the partial beam of light from a rest of the light after the rest of the light exits the second end of the main body;
a cross section of the partial beam of light is a part of a cross section of the light that exits the second end of the main body; and
the mirror is configured so that the cross section of the partial beam of light is incident on the mirror with an angle of incidence that is greater than 70°; and

a device configured to detect a variable characteristic of the partial beam of light,
wherein:
the device comprises a sensor in a region of a plane in which a ratio h 1 to h 3 is less than one
h 1 is a distance between rays of the same order of reflection in the partial beam of light proceeding from an identical point in a waveguide entrance region; and
h 3 is a maximum distance between rays of zero order of reflection in the partial beam of light passing through a same point in a waveguide exit region.

6. The optical assembly of claim 5 , wherein a mirror surface of the mirror faces the rest of the light beam.

7. The optical assembly of claim 5 , wherein a mirror surface of the mirror faces away from the rest of the light beam.

8. The optical assembly of claim 5 , wherein the main body comprises a hollow optical waveguide having a tubular main body with a continuous waveguide cavity.

9. The optical assembly of claim 5 , wherein the main body comprises a solid body that is transmissive to the light.

10. The optical assembly of claim 5 , wherein the sensor is configured to detect a beam segment of the partial beam of light.

11. The optical assembly of claim 5 , comprising a plurality of sensors.

12. An apparatus, comprising:
an illumination optical unit comprising an assembly according to claim 5 ;
a light source configured to generate the light; and
a projection lens having an image plane,
wherein the apparatus is configured so that, during use of the apparatus:
the partial beam of light follows a path from the light source, through the waveguide and to the device; and
the rest of the light follows a path from the light source, through the illumination optical unit to an illumination field, and through the projection lens to the image plane of the projection lens.

13. The optical assembly of claim 5 , wherein the mirror is located in the exit plane.

14. The optical assembly of claim 5 , wherein the mirror is located near the exit plane.

15. The optical assembly of claim 5 , wherein the mirror is located in a plane that is conjugate with the exit plane.

16. The optical assembly of claim 5 , wherein the main body is tubular with a continuous waveguide cavity comprising an internal reflective inner wall.

17. The optical assembly of claim 5 , wherein the main body is a solid body that is transparent to the light or transmissive to the light.

18. An apparatus, comprising:
an illumination optical unit comprising an assembly, the assembly comprising:
a waveguide comprising:
a main body configured to guide light from a first end of the main body to a second end of the main body so that the light exits the main body via the second end of the main body; and
a mirror,
wherein:
the second end of the main body is in an exit plane;
the mirror is in a plane that is: a) in the exit plane; b) near the exit plane; or c) conjugate with the exit plane; and
the mirror extends beyond the exit plane in a direction away from the main body so that at least a portion of mirror is external to the main body;
the mirror is configured to reflect a partial beam of light after the partial beam of light exits the second end of the main body to separate the partial beam of light from a rest of the light after the rest of the light exits the second end of the main body;
a cross section of the partial beam of light is a part of a cross section of the light that exits the second end of the main body; and

the mirror is configured so that the cross section of the partial beam of light is incident on the mirror with an angle of incidence that is greater than 70°; and
a first device configured to detect a measurement variable characteristic of the partial beam of light;

a light source configured to generate the light; and
a second device configured to detect an illumination field,
wherein the apparatus is configured so that, during use of the apparatus:
the partial beam of light follows a path from the light source, through the waveguide and to the first device;
the rest of the light follows a path from the light source, through the illumination optical unit and to the illumination field so that the rest of the light is detectable via the second device; and
the apparatus is configured to inspect a wafer or a mask.

19. The apparatus of claim 18 , wherein the apparatus is configured to inspect a wafer.

20. The apparatus of claim 18 , wherein the apparatus is config

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Wald Christian
• Schaff Stefan
• Deguenther Markus
• Runde Daniel

Classifications

• G02B6/262

  Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements · CPC title

• G02B6/0096

  the lights guides being of the hollow type · CPC title

• G02B6/0053

  Prismatic sheet or layer; Brightness enhancement element, sheet or layer · CPC title

• G02B27/0994 Primary

  Fibers, light pipes (optical fibers per se G02B6/02) · CPC title

• G03F7/70075

  Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection · CPC title