Optical arrangement, in particular lithography system
US-10809636-B2 · Oct 20, 2020 · US
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Schaff Stefan patents
Schaff Stefan is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Schaff Stefan |
| Total patents | 6 |
| First publication | Dec 17, 2015 |
| Latest publication | Oct 20, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Optical arrangement, in particular lithography system
US-2019339626-A1 · Nov 7, 2019 · US
Optical waveguide for guiding illumination light
US-10254466-B2 · Apr 9, 2019 · US
Optical waveguide for guiding illumination light
US-2017261680-A1 · Sep 14, 2017 · US
Optical waveguide for guiding illumination light
US-9671548-B2 · Jun 6, 2017 · US
Optical Waveguide for Guiding Illumination Light
US-2015362660-A1 · Dec 17, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70075 | 4 |
| G02B6/0096 | 4 |
| G02B6/0053 | 4 |
| G02B6/0055 | 4 |
| G02B6/262 | 4 |