Thermal spray powder and film that contain rare-earth element, and member provided with film

Patent metadata

Field	Value
Publication number	US-9670099-B2
Application number	US-201214346553-A
Country	US
Kind code	B2
Filing date	Sep 26, 2012
Priority date	Sep 26, 2011
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

A thermal spray powder of the present invention contains a rare earth element and a group 2 element, which belongs to group 2 of the periodic table. The thermal spray powder, which contains a rare earth element and a group 2 element, is formed, for example, from a mixture of a rare earth element compound and a group 2 element compound or from a compound or solid solution containing a rare earth element and a group 2 element. The thermal spray powder may further contain a diluent element that is not a rare earth element or a group 2 element and is not oxygen, which is at least one element selected, for example, from titanium, zirconium, hafnium, vanadium, niobium, tantalum, zinc, boron, aluminum, gallium, silicon, molybdenum, tungsten, manganese, germanium, and phosphorus.

First claim

The invention claimed is:

1. A coating obtained by thermal spraying a thermal spray powder comprising a rare earth element, a group 2 element, which belongs to group 2 of the periodic table, and an optional diluent element that is not any rare earth element or any group 2 element and is not oxygen, wherein
each of the rare earth element, the group 2 element, and the optional diluent element is present in the form of an oxide in the thermal spray powder,
the rare earth element is scandium, yttrium, cerium, praseodymium, promethium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, or lutetium,
the rare earth element oxide is contained in the thermal spray powder in an amount of 25% by mol or more of the mixture of the rare earth element oxide, the group 2 element oxide, and the optional diluent element oxide,
the group 2 element oxide is contained in the thermal spray powder in an amount of 3% by mol or more of the mixture of the rare earth element oxide, the group 2 element oxide, and the optional diluent element oxide,
the thermal spray powder is produced by granulating and then sintering a raw material powder containing a powder of a compound or simple substance of a rare earth element, a powder of a compound or a simple substance of a group 2 element, and a powder of a compound or simple substance of the optional diluent element,
the coating comprises rare earth element compound portions having a size of 20 μm 2 or less.

2. The coating according to claim 1 , wherein the optional diluent element is at least one element selected from the group consisting of titanium, zirconium, hafnium, vanadium, niobium, tantalum, zinc, boron, aluminum, gallium, silicon, molybdenum, tungsten, manganese, germanium, and phosphorus.

3. The coating according to claim 2 , wherein the optional diluent element oxide is contained in the thermal spray powder in an amount of 10% by mol or more and 60% by mol or less of the mixture of the rare earth element oxide, the group 2 element oxide, and the optional diluent element oxide.

4. A member comprising the coating according to claim 3 on its surface.

5. The coating according to claim 1 , wherein the optional diluent element is a combination of zirconium and at least one element that is not any rare earth element or any group 2 element and is not oxygen or zirconium.

6. A member comprising the coating according to claim 1 on its surface.

7. The coating according to claim 1 , wherein the size of the rare earth element compound portions is 0.2 μm 2 or less.

8. The coating according to claim 1 , wherein the rare earth element oxide is contained in the thermal spray powder in an amount of 35% by mol or more and 60% by mol or less of the mixture of the rare earth element oxide, the group 2 element oxide, and the optional diluent element oxide.

9. The coating according to claim 1 , wherein the group 2 element oxide is contained in the thermal spray powder in an amount of 4.5% by mol or more and 10% by mol or less of the mixture of the rare earth element oxide, the group 2 element oxide, and the optional diluent element oxide.

10. The coating according to claim 1 , wherein the granulating is by spray granulation, rolling granulation or compression granulation.

Assignees

• Fujimi Inc
• Tokyo Electron Ltd

Inventors

• Mizuno Hiroaki
• Kitamura Junya
• Kobayashi Yoshiyuki

Classifications

• Y10T428/12944

  Ni-base component · CPC title

• C04B2235/3232

  Titanium oxides or titanates, e.g. rutile or anatase · CPC title

• Y10T428/12951

  Fe-base component · CPC title

• Y10T428/12611

  Oxide-containing component · CPC title

• Y10T428/12931

  Co-, Fe-, or Ni-base components, alternative to each other · CPC title