Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

Patent metadata

Field	Value
Publication number	US-9666409-B2
Application number	US-201615288239-A
Country	US
Kind code	B2
Filing date	Oct 7, 2016
Priority date	Aug 2, 2010
Publication date	May 30, 2017
Grant date	May 30, 2017

Abstract

A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.

First claim

We claim:

1. A sample holder for an electron microscope, said sample holder comprising:
a sample holder body that defines:
a first pocket for positioning of a first microelectronic device therein; and
a second pocket for positioning of a second microelectronic device therein,
wherein a first seal is positioned about the first pocket and surrounds a hole defined in the sample holder body for allowing passage of an electron beam, and
wherein a second seal is positioned about the second pocket such that fluids are sealed between the first seal and the second seal,
wherein the second pocket encloses the first pocket,
wherein at least one electrical contact extends from the second pocket for electrically coupling to the second microelectronic device;
and

a lid for covering a portion of the sample holder body.

2. The sample holder of claim 1 , wherein the sample holder body and the lid each define a hole for passage of an electron beam through the sample holder.

3. The sample holder of claim 1 , wherein the first seal is a first o-ring and the second seal is a second o-ring.

4. The sample holder of claim 3 , wherein the first o-ring and the second o-ring are concentrically aligned within the sample holder body.

5. The sample holder of claim 1 , wherein the second microelectronic device defines a larger area than the first microelectronic device.

6. The sample holder of claim 1 , wherein a fluid supply is in communication through the sample holder body into an area between the first seal and the second seal.

7. The sample holder of claim 1 , wherein, in operation, the second microelectronic device is positioned above the first microelectronic device.

8. A kit for an electron microscope assembly comprising:
a first microelectronic device;
a second microelectronic device;
a first seal;
a second seal;
a sample holder for an electron microscope, said sample holder including:
a sample holder body that defines:
a first pocket for positioning of the first microelectronic device therein; and
a second pocket for positioning of the second microelectronic device therein,
wherein the second pocket encloses the first pocket,
wherein at least one electrical contact extends from the second pocket,
wherein the first seal is positioned about the first pocket and surrounds a hole defined in the sample holder body for allowing passage of an electron beam, and
wherein the second seal is positioned about the second pocket such that fluids are sealed between the first seal and the second seal;

and

a lid for covering a portion of the sample holder body.

9. The kit of claim 8 , wherein the sample holder body and the lid each define a hole for passage of an electron beam through the sample holder.

10. The kit of claim 8 , wherein the first seal is a first o-ring and the second seal is a second o-ring.

11. The kit of claim 10 , wherein the first o-ring and the second o-ring are concentrically aligned within the sample holder body.

12. The kit of claim 8 , wherein the second microelectronic device defines a larger area than the first microelectronic device.

13. The kit of claim 8 , wherein a fluid supply is in communication through the sample holder body into an area between the first seal and the second seal.

14. The kit of claim 8 , wherein, in operation, the second microelectronic device is positioned above the first microelectronic device.

15. A method comprising:
placing a first microelectronic device into a first pocket defined in a sample holder body;
placing a second microelectronic device into a second pocket defined in the sample holder body;
wherein the second pocket encloses the first pocket,
wherein at least one electrical contact extends from the second pocket such that the contact electrically couples the second microelectronic device after being placed into the second pocket;
wherein a first seal is positioned about the first pocket and surrounds a hole defined in the sample holder body for allowing passage of an electron beam, and
wherein a second seal is positioned about the second pocket such that fluids are sealed between the first seal and the second seal;
positioning a lid into engagement with the sample holder body,
wherein a sample is in engagement with one of the first and second microelectronic devices;
directing the electron beam towards the first and second microelectronic devices in order to image the sample.

16. The method of claim 15 , wherein the sample holder body and the lid each define a hole for passage of an electron beam therethrough.

17. The method of claim 15 , wherein the first seal is a first o-ring and the second seal is a second o-ring.

18. The method of claim 17 , wherein the first o-ring and the second o-ring are concentrically aligned within the sample holder body.

19. The method of claim 15 , wherein the second microelectronic device defines a larger area than the first microelectronic device.

20. The method of claim 15 , wherein, in operation, the second microelectronic device is positioned above the first microelectronic device.

Assignees

• Protochips Inc

Inventors

• Damiano Jr John
• Nackashi David P
• Mick Stephen E

Classifications

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J37/30

  Electron-beam or ion-beam tubes for localised treatment of objects · CPC title

• H01J37/29

  Reflection microscopes · CPC title

• H01J37/16

  Vessels; Containers · CPC title