Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

Patent metadata

Field	Value
Publication number	US-9324539-B2
Application number	US-201414481390-A
Country	US
Kind code	B2
Filing date	Sep 9, 2014
Priority date	Aug 2, 2010
Publication date	Apr 26, 2016
Grant date	Apr 26, 2016

Abstract

A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.

First claim

The invention claimed is:

1. A sample holder for an electron microscope, said sample holder comprising a sample holder body and a sample holder lid, wherein the sample holder body comprises a deep pocket having a deep pocket bottom and deep pocket walls for the positioning of a first microelectronic device therein and a shallow pocket having a shallow pocket bottom and shallow pocket walls for the positioning of a second microelectronic device therein, wherein the shallow pocket fully encloses the deep pocket and wherein at least one electrical contact point is positioned on the shallow pocket bottom.

2. The sample holder of claim 1 , wherein the sample holder body and the sample holder lid have a hole for passage of an electron beam through the sample holder.

3. The sample holder of claim 1 , wherein the sample holder body comprises at least one component selected from the group consisting of:
(a) at least one inlet supply line;
(b) at least one outlet supply line;
(c) at least one sealing means;
(d) securing means for securing the sample holder lid to the sample holder body; and
(e) combinations of (a)-(d) thereof.

4. The sample holder of claim 1 , wherein the sample holder lid comprises at least one component selected from the group consisting of:
(a) at least one sealing means;
(b) securing means for securing the sample holder lid to the sample holder body; and
(c) combinations of (a) and (b) thereof.

5. The sample holder of claim 3 , wherein the sealing means comprises an o-ring.

6. The sample holder of claim 3 , wherein the securing means comprise screws.

7. The sample holder of claim 3 , wherein a first sealing means is positioned at the deep pocket bottom and surrounds a deep pocket bottom hole such that a seal is formed around the deep pocket bottom hole when pressure is applied to the first and second microelectronic devices.

8. The sample holder of claim 1 , wherein the sample holder lid covers the sample holder body, and wherein the sample holder lid has a greater depth above the shallow pocket length and width such that the greater depth of the sample holder lid can be inserted into the shallow pocket for better alignment.

9. The sample holder of claim 1 , wherein the first microelectronic device comprises a window device.

10. The sample holder of claim 1 , wherein the first and second microelectronic devices are aligned so that the electron beam passes through the sample holder having the microelectronic devices therein.

11. The sample holder of claim 1 , wherein the second microelectronic device comprises a thermal device or an electrical biasing device.

12. The sample holder of claim 1 , wherein the length and width of the second microelectronic device is greater than the length and width of the first microelectronic device.

13. The sample holder of claim 8 , wherein a second sealing means is positioned in the sample holder lid and surrounds a sample holder lid hole such that a seal is formed around the sample holder lid hole when pressure is applied to the first and second microelectronic devices.

14. The sample holder of claim 11 , wherein at least one contact pad on the second microelectronic device is aligned with the at least one electrical contact point positioned on the shallow pocket bottom.

15. A method of imaging a sample in a liquid and/or gaseous environment in an electron microscope, said method comprising inserting a sample in a sample holder, inserting the sample holder comprising the sample in an electron microscope, introducing a liquid and/or gas to the sample in the sample holder, and imaging the sample in the electron microscope, wherein the sample holder comprises a deep pocket having a deep pocket bottom and deep pocket walls for the positioning of a first microelectronic device therein and a shallow pocket having a shallow pocket bottom and shallow pocket walls for the positioning of a second microelectronic device therein, wherein the shallow pocket fully encloses the deep pocket and wherein at least one electrical contact point is positioned on the shallow pocket bottom.

16. The method of claim 15 , wherein the first microelectronic device comprises a window device.

17. The method of claim 15 , wherein the second microelectronic device comprises a heating device or an electrical biasing device.

18. The method of claim 15 , wherein the sample holder lid covers the sample holder body, and wherein the sample holder lid has a greater depth above the shallow pocket length and width such that the greater depth of the sample holder lid can be inserted into the shallow pocket for better alignment.

19. The method of claim 15 , wherein a second sealing means is positioned in the sample holder lid and surrounds a sample holder lid hole such that a seal is formed around the sample holder lid hole when pressure is applied to the first and second microelectronic devices, and wherein a first sealing means is positioned at the deep pocket bottom and surrounds a deep pocket bottom hole such that a seal is formed around the deep pocket bottom hole when pressure is applied to the first and second microelectronic devices.

20. The method of claim 19 , wherein the first microelectronic device is a window device and the second microelectronic device is a thermal device or an electrical biasing device, and wherein attaching the sample holder lid to the sample holder body results in (a) the compression of the first and second sealing means thus forming a seal and (b) the formation of an electrical contact between the at least one contact point positioned on the shallow pocket bottom and at least one contact pad on the second microelectronic device.

21. The sample holder of claim 1 , wherein the first microelectronic device is a window device and the second microelectronic device is a thermal device or an electrical biasing device, wherein a first sealing means is positioned at the deep pocket bottom and surrounds a deep pocket bottom hole and a second sealing means is positioned in the sample holder lid and surrounds a sample holder lid hole, and wherein attaching the sample holder lid to the sample holder body results in (a) the compression of the first and second sealing means thus forming a seal and (b) the formation of an electrical contact between the at least one contact point positioned on the shallow pocket bottom and at least one contact pad on the second microelectronic device.

Assignees

• Protochips Inc

Inventors

• Damiano Jr John
• Nackashi David P
• Mick Stephen E

Classifications

• H01J2237/2007

  Holding mechanisms · CPC title

• H01J2237/2003

  Environmental cells · CPC title

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J37/16

  Vessels; Containers · CPC title

• H01J37/30

  Electron-beam or ion-beam tubes for localised treatment of objects · CPC title