Piezoelectric ceramic, method for manufacturing piezoelectric ceramic, piezoelectric element, and electronic device

Patent metadata

Field	Value
Publication number	US-9660175-B2
Application number	US-201314388717-A
Country	US
Kind code	B2
Filing date	Mar 21, 2013
Priority date	Mar 30, 2012
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A piezoelectric ceramic contains a main component, Mn as a first auxiliary component, and a second auxiliary component containing at least one element selected from the group consisting of Cu, B, and Si. The main component contains a perovskite metal oxide having the following general formula (1):

(Ba 1-x Ca x ) a (Ti 1-y Zr y )O 3 (0.100≦ x ≦0.145,0.010≦ y ≦0.039)  (1)

The amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048≦b≦0.0400, the second auxiliary component content on a metal basis is 0.001 parts by weight or more and 4.000 parts by weight or less per 100 parts by weight of the metal oxide, and the value a of the general formula (1) is in the range of 0.9925+b≦a≦1.0025+b.

First claim

The invention claimed is:

1. A piezoelectric ceramic, comprising: a main component containing a perovskite metal oxide having the following general formula (1); Mn as a first auxiliary component; and a second auxiliary component containing at least one element selected from the group consisting of Cu, B, and Si,
(Ba 1-x Ca x ) a (Ti 1-y Zr y )O 3 (0.100≦ x≦ 0.145,0.010≦ y≦ 0.039)  (1)

wherein the amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048≦b≦0.0400, the second auxiliary component content on a metal basis is 0.001 parts by weight or more and 4.000 parts by weight or less per 100 parts by weight of the metal oxide, and the value a of the general formula (1) is in the range of 0.9925+b≦a≦1.0025+b.

2. The piezoelectric ceramic according to claim 1 , wherein the average equivalent circular diameter of a plurality of crystal grains of the piezoelectric ceramic is 1 μm or more and 10 μm or less, and crystal grains having an equivalent circular diameter of 25 μm or less constitute 99 percent by number or more of the total crystal grains.

3. The piezoelectric ceramic according to claim 1 , wherein the piezoelectric ceramic has a relative density of 90% or more and 100% or less.

4. A method for manufacturing the piezoelectric ceramic according to claim 1 , comprising: sintering a compact containing Ba, Ca, Ti, Zr, Mn, and at least one metallic element selected from the group consisting of Cu, B, and Si at a temperature of 1200° C. or less.

5. A piezoelectric element, comprising: a piezoelectric ceramic; a first electrode; and a second electrode, wherein the piezoelectric ceramic is the piezoelectric ceramic according to claim 1 .

6. A multilayered piezoelectric element, comprising: piezoelectric ceramic layers and electrode layers alternately stacked on top of one another, the electrode layers including an internal electrode, wherein the piezoelectric ceramic layers are formed of the piezoelectric ceramic according to claim 1 .

7. The multilayered piezoelectric element according to claim 6 , wherein the internal electrode contains Ag and Pd, and the weight ratio M1/M2 of the weight M1 of Ag to the weight M2 of Pd is in the range of 0.25≦M1/M2≦4.0.

8. The multilayered piezoelectric element according to claim 6 , wherein the internal electrode contains at least one of Ni and Cu.

9. A method for manufacturing the multilayered piezoelectric element according to claim 6 , comprising: (A) preparing a slurry of a metallic compound powder containing at least Ba, Ca, Ti, Zr, Mn, and at least one element selected from the group consisting of Cu, B, and Si; (B) forming a compact from the slurry; (C) forming an electrode on the compact; and (D) sintering a plurality of the compacts at a temperature of 1200° C. or less to manufacture the multilayered piezoelectric element.

10. The method for manufacturing the multilayered piezoelectric element according to claim 9 , wherein the slurry contains a perovskite metal oxide containing at least one of Ba and Ca and at least one of Ti and Zr.

11. A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber has a vibrating unit that includes the piezoelectric element according to claim 5 .

12. A liquid discharge apparatus, comprising: a recording medium conveying unit; and the liquid discharge head according to claim 11 .

13. An ultrasonic motor, comprising: a vibrating member that includes the piezoelectric element according to claim 5 and a moving body in contact with the vibrating member.

14. An optical apparatus, comprising the ultrasonic motor according to claim 13 in a drive unit.

15. A vibratory apparatus, comprising a vibrating member that includes the piezoelectric element according to claim 5 .

16. A dust removing device, comprising the vibratory apparatus according to claim 15 .

17. An image pickup apparatus, comprising: the dust removing device according to claim 16 and an image pickup element unit, wherein the dust removing device includes a vibrating member on the light incident side of the image pickup element unit.

18. An electronic device, comprising a piezoelectric acoustic component that includes the piezoelectric element according to claim 5 .

19. A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber has a vibrating unit that includes the multilayered piezoelectric element according to claim 6 .

20. A liquid discharge apparatus, comprising: a recording medium conveying unit; and the liquid discharge head according to claim 19 .

21. An ultrasonic motor, comprising: a vibrating member that includes the multilayered piezoelectric element according to claim 6 ; and a moving body in contact with the vibrating member.

22. An optical apparatus, comprising the ultrasonic motor according to claim 21 in a drive unit.

23. A vibratory apparatus, comprising a vibrating member that includes the multilayered piezoelectric element according to claim 6 .

24. A dust removing device, comprising the vibratory apparatus according to claim 23 .

25. An image pickup apparatus, comprising: the dust removing device according to claim 24 and an image pickup element unit, wherein the dust removing device includes a vibrating member on the light incident side of the image pickup element unit.

26. An electronic device, comprising a piezoelectric acoustic component that includes the multilayered piezoelectric element according to claim 6 .

27. A piezoelectric material comprising:
a perovskite metal oxide containing Ba, Ca, Ti, Zr, Mn, and at least one element selected from the group consisting of Cu, B, and Si,
wherein the ratio x of the amount of Ca (mol) to the sum of the amounts of Ba and Ca (mol) is in the range of 0.100≦x≦0.145, and
the ratio y of the amount of Zr (mol) to the sum of the amounts of Ti and Zr (mol) is in the range of 0.010≦y≦0.039, and
wherein the amount b (mol) of Mn per 100 parts by weight of the perovskite metal oxide is in the range of 0.0048≦b≦0.0400,
the amount (parts by weight) of the at least one element selected from the group consisting of Cu, B, and Si is 0.001 parts by weight or more and 4.000 parts by weight or less, and
the ratio a of the sum of the amounts of Ba and Ca (mol) to the sum of the amounts of Ti and Zr (mol) is in the range of 0.9925+b≦a≦1.0025+b.

28. A piezoelectric element comprising:
a first electrode;
a piezoelectric material portion; and
a second electrode,
wherein the piezoelectric material portion comprises the piezoelectric material according to claim 27 .

29. A multilayered piezoelectric element comprising:
piezoelectric material layers; and
electrode layers including an internal electrode,
wherein the piezoelectric material layers and the electrode layers are alternately stacked, and
the piezoelectric material layers comprise the piezoelectric material according to claim 27 .

30. An electronic apparatus comprising the piezoelectric element according to claim 28 .

31. An electronic apparatus comprising the multilayered piezoelectric element according to claim 29 .

Assignees

• Canon Kk

Inventors

• Saito Hiroshi
• Murakami Shunsuke
• Ueda Miki
• Tanaka Hidenori
• Matsuda Takanori
• Watanabe Takayuki
• Kubota Makoto

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• C04B2235/6567

  Treatment time · CPC title

• C04B35/64

  Burning or sintering processes (C04B33/32 takes precedence {; powder metallurgy B22F}) · CPC title

• H04N23/811

  by dust removal, e.g. from surfaces of the image sensor or processing of the image signal output by the electronic image sensor · CPC title

• B41J2/14233

  of film type, deformed by bending and disposed on a diaphragm · CPC title