Processing systems and methods for halide scavenging

Patent metadata

Field	Value
Publication number	US-9659792-B2
Application number	US-201514808904-A
Country	US
Kind code	B2
Filing date	Jul 24, 2015
Priority date	Mar 15, 2013
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

Systems, chambers, and processes are provided for controlling process defects caused by moisture contamination. The systems may provide configurations for chambers to perform multiple operations in a vacuum or controlled environment. The chambers may include configurations to provide additional processing capabilities in combination chamber designs. The methods may provide for the limiting, prevention, and correction of aging defects that may be caused as a result of etching processes performed by system tools.

First claim

What is claimed is:

1. A method of removing contaminants on a substrate having an exposed silicon oxide region and an exposed non-oxide region, the method comprising:
flowing a fluorine-containing precursor into a remote plasma region of a substrate processing chamber fluidly coupled with a substrate processing region of the substrate processing chamber while forming a plasma in the remote plasma region to produce fluorine-containing plasma effluents;
etching the exposed non-oxide region utilizing the plasma effluents, wherein fluorine species comprising a portion of the fluorine-containing plasma effluents are incorporated with the silicon oxide region;
flowing a first treatment precursor into the remote plasma region of a substrate processing chamber to produce treatment plasma effluents, wherein the treatment precursor comprises a precursor selected from the group consisting of nitrogen, helium, argon, and xenon;
flowing at least one additional treatment precursor into the substrate processing region, wherein the at least one additional treatment precursor comprises hydrogen (H 2 ), and wherein the at least one additional treatment precursor bypasses the remote plasma region; and
exposing the silicon oxide region to a combination of the treatment precursors including treatment plasma effluents to remove residual fluorine species from the silicon oxide region.

2. The method of claim 1 , wherein the exposed non-oxide region comprises silicon, silicon nitride, or a metal.

3. The method of claim 1 , wherein the treatment plasma effluents at least partially dissociate the at least one additional treatment precursor in the substrate processing region.

4. The method of claim 3 , wherein the at least partially dissociated at least one additional treatment precursor interacts and bonds with the fluorine species incorporated with the silicon oxide region.

5. The method of claim 1 , wherein the treatment precursor comprises helium.

6. The method of claim 1 , wherein the exposure causes a portion of the silicon oxide material to be removed.

7. The method of claim 1 , wherein the exposure removes at least a portion of the fluorine species while maintaining or essentially maintaining the silicon oxide material.

8. The method of claim 1 , wherein the method is performed in a single chamber environment.

9. The method of claim 1 , wherein the exposure is performed at a temperature between about 0° C. and about 800° C.

10. The method of claim 1 , wherein the exposure is performed at a pressure between about 1 mTorr and about 700 Torr.

11. A method of removing contaminants on a substrate having an exposed silicon oxide region and an exposed non-oxide region, the method comprising:
flowing a fluorine-containing precursor into a remote plasma region of a substrate processing chamber fluidly coupled with a substrate processing region of the substrate processing chamber while forming a plasma in the remote plasma region to produce fluorine-containing plasma effluents;
etching the exposed non-oxide region utilizing the plasma effluents, wherein fluorine species comprising a portion of the fluorine-containing plasma effluents are incorporated within a film atomic matrix of the silicon oxide region;
exposing the silicon oxide region to ultra-violet light; and
reducing the incorporated fluorine species to an atomic percentage below about 20%.

12. The method of claim 11 , wherein the process temperature during the exposure is greater than or about 350° C.

13. The method of claim 11 , wherein the exposure is performed for over 200 seconds.

Assignees

• Applied Materials Inc

Inventors

• Wang Anchuan
• Chen Xinglong
• Li Zihui
• Hamana Hiroshi
• Chen Zhijun
• Hsu Ching-Mei
• Huang Jiayin
• Ingle Nitin K
• Lubomirsky Dmitry
• Venkataraman Shankar
• Thakur Randhir

Classifications

• H10P70/20

  Cleaning during device manufacture · CPC title

• H10P50/268

  of silicon-containing layers · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title