Method of studying a sample in an ETEM

Patent metadata

Field	Value
Publication number	US-9658246-B2
Application number	US-201213566834-A
Country	US
Kind code	B2
Filing date	Aug 3, 2012
Priority date	Aug 3, 2011
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A method and apparatus is provided for studying the reaction (chemical or physical) of a sample with a gas in the active atmosphere of an instrument such as an Environmental Transmission Electron Microscope (ETEM), optical microscope, X-ray microscope or scanning probe microscope. The sample is exposed to inert gas at a desired temperature before exchanging the inert gas to the active gas to reduce to avoid, or at least minimize, sample drift during image acquisition.

First claim

We claim as follows:

1. A method of imaging gas-solid interactions between an active gas and a sample supported by a side-entry sample holder in a sample chamber of an atomic resolution microscope, the method comprising:
mounting the sample onto the side-entry sample holder, the side-entry sample holder configured to control the temperature of the sample;
positioning the sample mounted on the side-entry sample holder inside the sample chamber;
establishing a desired temperature of the sample, wherein the desired temperature of the sample is different from a temperature of the sample chamber thus creating a temperature gradient along the side-entry sample holder, with the temperature gradient controlled by temperature, pressure and flow rate of a gas inside the sample chamber;
exposing the sample to an inert gas and establishing a first desired temperature gradient by controlling the temperature, the pressure and the flow rate of the inert gas;
replacing the inert gas with the active gas and exposing the sample to the active gas, wherein exposure to the active gas causes the sample to undergo the chemical reaction or physical change;
acquiring an image of the sample during the chemical reaction or physical change,
wherein the temperature gradient along the side-entry sample holder when imaging the sample is close enough to the first temperature gradient established under inert gas conditions so that the drift of the sample over the acquisition time of the image is less than ten times the resolution of said image.

2. The method of claim 1 , in which a reference image is acquired under the inert gas conditions before the active gas is introduced.

3. The method of claim 1 in which the desired temperature of the sample is above 100° C.

4. The method of claim 3 in which the desired temperature of the sample is above 500° C.

5. The method of claim 4 in which the desired temperature of the sample is above 1000° C.

6. The method of claim 1 , in which the desired temperature of the sample is below −20° C.

7. The method of claim 6 , in which the desired temperature of the sample is below −137° C.

8. The method of claim 1 , in which the drift of the sample over the acquisition time of the image is less than twice the resolution of said image.

9. The method of claim 8 , in which the drift of the sample over the acquisition time of the image is less than the resolution of said image.

10. The method of claim 1 , in which controlling the temperature, the pressure, and the flow rate of the inert gas is such that the drift of the sample with respect to the field of view is less than 1 nm/s.

11. The method of claim 10 , in which the drift of the sample with respect to the field of view is less than 0.2 nm/s.

12. The method of claim 11 , in which the drift of the sample with respect to the field of view is less than 0.1 nm/s.

13. The method of claim 1 in which the atomic resolution microscope is an environmental transmission electron microscope (ETEM) or an environmental scanning transmission electron microscope (ESEM).

Assignees

• Konings Stan Johan Pieter
• Kujawa Stephan
• Trompenaars Petrus Hubertus Franciscus
• Fei Co

Inventors

• Konings Stan Johan Pieter
• Kujawa Stephan
• Trompenaars Petrus Hubertus Franciscus

Classifications

• G01Q30/12 Primary

  Fluid environment · CPC title

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• H01J2237/2002

  Controlling environment of sample · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/2001

  Maintaining constant desired temperature · CPC title