Atomic flux measurement device

Patent metadata

Field	Value
Publication number	US-9658191-B2
Application number	US-201313733594-A
Country	US
Kind code	B2
Filing date	Jan 3, 2013
Priority date	Jul 5, 2010
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

An atomic flux measurement device for measuring the amount of dissociated atomic flux produced by discharge and emitted from a plasma generation cell into a vacuum camber. The atomic flux measurement device includes a counter electrode body including a pair of first and second sheet-like electrodes that are arranged substantially parallel to each other with a predetermined spacing between them, a direct-current power supply configured to maintain the first sheet-like electrode at a negative potential so that atoms attached to the inner surface of the sheet-like electrode undergo self-ionization and to apply a direct-current voltage between the first and second sheet-like electrodes so that a current flows between the first and second sheet-like electrodes, and a direct-current ammeter configured to measure a current flowing due to electrons emitted by the self-ionization of the dissociated atoms attached to the inner surface of the first sheet-like electrode.

First claim

The invention claimed is:

1. An atomic flux measurement device for measuring an amount of disassociated atomic flux that are emitted from a plasma generation cell to a vacuum chamber maintained at a high vacuum, comprising:
a counter electrode body including a pair of first and second sheet-like electrodes that face each other and are arranged substantially parallel to each other with a predetermined spacing between them;
a first direct-current power supply configured to apply a direct-current voltage between the first and second sheet-like electrodes to cause the atoms attached to an inner surface of the first sheet-like electrode to undergo self-ionization so that a current flows between the first and second sheet-like electrodes;
a direct-current ammeter provided between the first and second sheet-like electrodes and configured to measure a value of the current flowing due to the self-ionization of the atoms attached to the inner surface of the first sheet-like electrode; and
a calculator configured to calculate the amount of disassociated atomic flux based on a table showing a relationship between the value of the current flowing due to the self-ionization of atoms measured by the direct-current ammeter and the amount of disassociated atomic flux emitted to the vacuum chamber,
wherein the first and second sheet-like electrodes are formed of a plurality of plate-like metal mesh sheets having substantially the same shape,
wherein the first and second sheet-like electrodes of the counter electrode body are U-shaped and stacked in an interleaved manner with respect to each other with a predetermined spacing.

2. The atomic flux measurement device according to claim 1 , wherein the counter electrode body includes a third sheet-like electrode that is formed of a metal mesh sheet and is placed on a side of the counter electrode body where an atomic flux enters, and the potential of the third sheet-like electrode is set to be the same as the potential of the second sheet-like electrode.

3. The atomic flux measurement device according to claim 1 , wherein the counter electrode body includes a fourth sheet-like electrode placed outside the first sheet-like electrode, on a side opposite to the side where an atomic flux enters, while being separated from the first sheet-like electrode by a predetermined spacing, and the fourth sheet-like electrode is connected to the first sheet-like electrode.

4. The atomic flux measurement device according to claim 1 , further comprising:
an A/D converter configured to convert the value of the atomic current measured by the direct-current ammeter into digital data;
a memory configured to store the digital data output from the A/D converter;
a display configured to display the digital data stored in the memory; and
a controller configured to write and read data to and from the memory and control operation of the display.

5. The atomic flux measurement device according to claim 4 , wherein the calculator is further configured to:
calculate the amount of flux based on the value of the atomic current measured by the direct-current ammeter,

wherein:
read out a table indicating the relationship between values of atomic currents and amount of flux corresponding to the values of the atomic currents, the table being previously stored in the memory, and
check the value of the atomic current measured by the direct-current ammeter against the values of the atomic currents stored in the memory, to calculate an amount of the flux corresponding to the value of the atomic current measured by the direct-current ammeter.

6. The atomic flux measurement device according to claim 1 , wherein the atomic flux is generated by dissociation of any molecule of hydrogen H 2 , nitrogen N 2 or oxygen O 2 .

Assignees

• The Doshisha
• Arios Inc

Inventors

• Ohachi Tadashi
• Wada Motoi
• Ariyada Osamu
• Yamabe Nobuhiko

Classifications

• C30B23/005

  Controlling or regulating flux or flow of depositing species or vapour · CPC title

• H05H1/0081

  by electric means · CPC title

• G01N27/70 Primary

  and measuring current or voltage · CPC title

• C23C14/543

  using measurement on the vapor source · CPC title

• G06F17/00

  Digital computing or data processing equipment or methods, specially adapted for specific functions (information retrieval, database structures or file system structures therefor G06F16/00) · CPC title