X-ray topography apparatus

Patent metadata

Field	Value
Publication number	US-9658174-B2
Application number	US-201414538837-A
Country	US
Kind code	B2
Filing date	Nov 12, 2014
Priority date	Nov 28, 2013
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

Disclosed is an X-ray topography apparatus including an X-ray source, a multilayer film mirror, a slit, a two-dimensional X-ray detector, and a sample moving device that sequentially moves the sample to a plurality of step positions. The X-ray source is a minute focal spot. The multilayer film mirror forms monochromatic, collimated, high-intensity X-rays. The direction in which the multilayer film mirror collimates the X-rays coincides with the width direction of the slit. The step size by which the sample is moved is smaller than the width of the slit. The combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the detector receives X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.

First claim

The invention claimed is:

1. An X-ray topography apparatus that uses X-rays for form two-dimensional images in correspondence with an internal structure of a sample, comprising:
an X-ray source that produces X-rays with which the sample is irradiated;
a multilayer film mirror provided in a position between the sample and the X-ray source;
a slit member provided in a position between the sample and the X-ray source and including a slit that limits a width of the X-rays;
two-dimensional X-ray detection means for two-dimensionally detecting X-rays having exited out of the sample; and
sample moving means for achieving stepwise movement of the sample relative to the X-rays with which the sample is irradiated to sequentially move the sample to a plurality of step positions, wherein:
the X-ray source produces the X-rays from a minute focal spot,
the multilayer film mirror converts the X-rays emitted from the X-ray source into monochromatic, collimated, high-intensity X-rays,
the direction in which the multilayer film mirror collimates the X-rays coincides with a width direction of the slit of the slit member,
the step size by which the sample moving means moves the sample is smaller than a width of the slit, and
the combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the two-dimensional X-ray detection means receives the X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.

2. The X-ray topography apparatus according to claim 1 , further comprising a processor, wherein the processor is configured to:
acquire a two-dimensional cross-sectional image associated with each of the plurality of step positions, wherein the two-dimensional cross-sectional image is produced by irradiating the sample with the X-rays in each of the plurality of step positions for the predetermined period and detecting X-rays having exited out of the sample irradiated with the X-rays with the two-dimensional X-ray detection means, thereby acquiring a plurality of two-dimensional cross-sectional images,
form a three-dimensional image by arranging the plurality of two-dimensional cross-sectional images, and
acquire a second two-dimensional image by extracting data along a flat plane different from measurement planes associated with the three-dimensional image.

3. The X-ray topography apparatus according to claim 2 , wherein the processor is further configured to calculate dislocation density based on the second two-dimensional image.

4. The X-ray topography apparatus according to claim 3 , wherein the minute focal spot comprises a focal spot so sized as to fall within a circle having a diameter of 100 μm, and the width of the slit ranges from 10 to 50 μm.

5. The X-ray topography apparatus according to claim 4 , wherein the multilayer film mirror comprises a parabolic form, so as to allow X-rays incident on the sample to be diffracted in parallel to each other.

6. The X-ray topography apparatus according to claim 5 , wherein interplanar spacing of lattice planes in the multilayer film mirror is so differentiated from each other location-to-location that the X-rays incident at different angles of incidence are reflected off the entire surface of the multilayer film mirror.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Omote Kazuhiko
• Morikawa Keiichi
• Ueji Yoshinori
• Tsuchiya Masahiro
• Fujimura Takeshi
• Kiku Atsunori

Classifications

• G01N23/20025

  Sample holders or supports therefor · CPC title

• G01N23/20016

  Goniometers · CPC title

• G01N23/20

  by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials · CPC title

• G01N2223/6462

  microdefects · CPC title

• G01N23/207 Primary

  Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions · CPC title