Methods of removing a material layer from a substrate using water vapor treatment

Patent metadata

Field	Value
Publication number	US-9653327-B2
Application number	US-201113291286-A
Country	US
Kind code	B2
Filing date	Nov 8, 2011
Priority date	May 12, 2011
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

Embodiments of the invention generally relate to methods of removing and/or cleaning a substrate surface having different material layers disposed thereon using water vapor plasma treatment. In one embodiment, a method for cleaning a surface of a substrate includes positioning a substrate into a processing chamber, the substrate having a dielectric layer disposed thereon forming openings on the substrate, exposing the dielectric layer disposed on the substrate to water vapor supplied into the chamber to form a plasma in the water vapor, maintaining a process pressure in the chamber at between about 1 Torr and about 120 Torr, and cleaning the contact structure formed on the substrate.

First claim

We claim:

1. A method for cleaning a surface of a substrate, comprising:
positioning a substrate into a processing chamber, the substrate having a dielectric layer disposed thereon and openings defined in the dielectric layer disposed on the substrate, wherein the openings expose a contact structure including at least a contact metal, a contact metal silicide layer or a contact silicon nitride layer formed on the substrate and the openings have aspect ratio greater than 20:1;
supplying water vapor to the dielectric layer disposed on the substrate and the openings formed in the dielectric layer in the chamber to form a plasma in the water vapor;
maintaining a process pressure in the chamber at between about 40 Torr and 70 Torr while supplying the water vapor to the dielectric layer; and
cleaning the dielectric layer disposed on the substrate by the plasma formed from the water vapor.

2. The method of claim 1 , wherein the dielectric layer used to form the contact structure is selected from a group consisting of undoped silicon glass (USG), boron-silicate glass (BSG), phosphorus-silicate glass (PSG), boron-phosphorus-silicate glass (BPSG) and combinations thereof.

3. The method of claim 1 , wherein supplying the water vapor further comprising:
altering a surface of the dielectric layer to form a hydrophilic surface having a wetting angle less than about 40 degrees.

4. The method of claim 1 , wherein supplying the water vapor further comprising:
supplying an oxygen containing gas or a hydrogen containing gas with the water vapor into the chamber.

5. The method of claim 1 , wherein supplying the water vapor further comprises:
applying a RF power between about 5 watts and about 5000 watts to form the plasma in the water vapor.

6. The method of claim 1 , wherein supplying the water vapor further comprises:
exposing the dielectric layer to a carbon-fluorine containing gas prior to exposing to the water vapor.

7. The method of claim 1 , wherein the water vapor is generated in the presence of argon, helium, or nitrogen.

8. The method of claim 1 , wherein supplying the water vapor further comprises:
supplying the water vapor to the chamber in a pulsed mode.

9. The method of claim 1 , further comprising:
controlling the substrate temperature at between about 0 degrees Celsius and about 760 degrees Celsius.

10. The method of claim 1 , wherein the contact metal, contact metal silicide layer or contact silicon nitride layer are utilized in field effect transistors.

11. The method of claim 10 , wherein the water vapor supplied to the chamber cleans the contact metal or contact metal silicide layer or contact silicon nitride layer as well as the dielectric layer disposed on the substrate.

Assignees

• Lee Kwangduk Douglas
• Rathi Sudha
• Chan Chiu
• Seamons Martin J
• Kim Bok Heon
• Applied Materials Inc

Inventors

• Lee Kwangduk Douglas
• Rathi Sudha
• Chan Chiu
• Seamons Martin J
• Kim Bok Heon

Classifications

• H10P70/234

  the processing being the formation of vias or contact holes · CPC title

• H10P50/285

  of materials not containing Si, e.g. PZT or Al2O3 · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10W20/081

  by forming openings in the dielectric parts · CPC title

• H10P72/0411 Primary

  for wet cleaning or washing · CPC title