Reagent for enhancing generation of chemical species

Patent metadata

Field	Value
Publication number	US-9650357-B2
Application number	US-201414392352-A
Country	US
Kind code	B2
Filing date	Jun 23, 2014
Priority date	Jun 24, 2013
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

First claim

The invention claimed is:

1. A composition, comprising:
a reagent;
a first compound able to react with a chemical species to cause a deprotection reaction of the first compound; and
a precursor,
wherein the reagent is selected from the group consisting of a first reagent, a second reagent, and a third reagent,
the first reagent being represented by one of formula (I),

wherein
R 1 is a hydrogen atom;
R 2 is a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom; and
R 3 is a hydrogen atom, a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom,

the second reagent being represented by one of formula (II),

wherein
R 1 is a hydrogen atom;
R 2 is a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom;
R 3 is a hydrogen atom, a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom; and
R 4 is a protective group for a hydroxyl group or a group containing a carbon atom; and

the third reagent includes a hydroxyl group and a first cyclic moiety that contains a carbon atom bonded to the hydroxyl group and a hydrogen atom;
wherein:
an intermediate is generated from the reagent by a feed energy;
the intermediate enhances a generation of the chemical species from a precursor;
a product resulting from the intermediate has a conjugation length longer than a conjugation length of the reagent;
wherein the feed energy is carried out by a first irradiation of the reagent or an acceptor receiving the energy with at least one of a light, the wavelength of which is shorter than or equal to 15 nm and an electron beam; and
wherein the generation of the chemical species from the precursor is improved by a second irradiation with a light, the wavelength of which is longer than or equal to 300 nm.

2. The composition according to claim 1 , wherein a reaction of the chemical species with a first compound or the precursor regenerates the chemical species.

3. The composition according to claim 1 , wherein the intermediate has a reducing character.

4. The composition according to claim 1 , wherein the intermediate is a radical.

5. The composition according to claim 1 , wherein the intermediate discharges at least one of a hydrogen atom and hydrogen ion that have reducing characters.

6. The composition according to claim 1 , wherein the intermediate is a ketyl radical.

7. The composition according to claim 1 , wherein the chemical species is acid.

8. The composition according to claim 1 , wherein R 2 is connected to R 3 through at least one bond.

9. The composition according to claim 1 , wherein at least one of R 2 and R 3 is an aromatic group.

10. The composition according to claim 1 , wherein the product is formed by oxidation of the intermediate.

11. The composition according to claim 1 , wherein:
the reagent further includes a second cyclic moiety; and
the first cyclic moiety contains at least two atoms which are also contained in the second cyclic moiety.

12. The composition according to claim 1 , wherein R 4 is one of an ester group, alkyl group and tetrahydropyranyl group.

13. A method for manufacturing a device, the method comprising:
applying a solution of the composition according to claim 1 to a substrate such that a coating film including the composition is formed on the substrate;
a first irradiating the coating film with at least one of a first electromagnetic ray and a first particle ray such that a first portion of the coating film is irradiated with the at least one of the electromagnetic ray and the particle ray while a second portion of the coating film is not irradiated with the at least one of the electromagnetic ray and the particle ray;
a second irradiating the coating film with at least one of a second electromagnetic ray and a second particle ray;
removing the first portion; and
etching the substrate such that a third portion of the substrate on which the first portion has been present is etched.

Assignees

• Toyo Gosei Co Ltd
• Univ Osaka

Inventors

• Enomoto Satoshi

Classifications

• H10P76/20

  of masks comprising organic materials · CPC title

• H10P50/692

  characterised by their composition, e.g. multilayer masks or materials · CPC title

• G03F7/36

  Imagewise removal not covered by groups G03F7/30 - G03F7/34, e.g. using gas streams, using plasma · CPC title

• G03F7/2051

  Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source (G03F7/70 takes precedence) · CPC title

• G03F7/16

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title