Workpiece dividing method

Patent metadata

Field	Value
Publication number	US-9649775-B2
Application number	US-201313871125-A
Country	US
Kind code	B2
Filing date	Apr 26, 2013
Priority date	May 9, 2012
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

A workpiece dividing method for dividing a platelike workpiece into a plurality of individual chips. The workpiece dividing method includes a workpiece preparing step of preparing the platelike workpiece, at least one side of the workpiece being formed as a mat surface, a holding step of holding the workpiece on a holding surface of a chuck table in the condition where the mat surface of the workpiece is exposed, a cut groove forming step of cutting the mat surface of the workpiece held on the holding surface of the chuck table by using a cutting blade to thereby form a cut groove with a remaining portion, and a laser cutting step of applying a laser beam to the workpiece along the cut groove to thereby cut the remaining portion.

First claim

What is claimed is:

1. A workpiece dividing method for dividing a workpiece into a plurality of individual chips, said workpiece having a front side, a back side opposite the front side, and a plurality of crossing parallel division lines formed on the front side, said workpiece dividing method comprising:
a workpiece preparing step of preparing substantially said entire workpiece so that an irregular mat surface is formed on the front side of said workpiece; followed by
a holding step of holding said workpiece on a holding surface of a chuck table in the condition where the back side of said workpiece is contacted with the holding surface of said chuck table and said mat surface of said workpiece is exposed; followed by
a cut groove forming step of cutting said mat surface of said workpiece along the division lines after said workpiece is held on said holding surface of said chuck table by using a cutting blade to thereby form a cut groove extending from the front side towards the back side to a remaining portion having a predetermined thickness measured from the back side of said workpiece; followed by
a laser cutting step of applying a laser beam having an absorption wavelength to said workpiece from the front side along said cut groove formed by said cut groove forming step to thereby cut entirely through the predetermined thickness of said remaining portion;
whereby chipping occurring in cutting the front side of said workpiece by using said cutting blade is suppressed by said mat surface; and
debris generated in said laser cutting step is accommodated in said cut groove to suppress the exposure of said debris to the front side of said workpiece.

2. The workpiece dividing method according to claim 1 , wherein a surface roughness Ra of said mat surface of said workpiece is set in the range of 0.5 to 5.0 μm.

Assignees

• Disco Corp

Inventors

• Kumazawa Satoshi

Classifications

• B23K26/364 Primary

  for making a groove or trench, e.g. for scribing a break initiation groove · CPC title

• B23K26/0093 Primary

  combined with mechanical machining or metal-working covered by other subclasses than B23K · CPC title

• B23K26/40

  taking account of the properties of the material involved · CPC title

• B23K26/60

  Preliminary treatment · CPC title

• Y10T83/0215

  Including use of rotary scoring blade · CPC title