Method of manufacturing a semiconductor heteroepitaxy structure

Patent metadata

Field	Value
Publication number	US-9647094-B2
Application number	US-201313957480-A
Country	US
Kind code	B2
Filing date	Aug 2, 2013
Priority date	Aug 2, 2013
Publication date	May 9, 2017
Grant date	May 9, 2017

Abstract

A method of manufacturing a semiconductor structure includes the steps of depositing a layer of semiconductor oxide on a base semiconductor layer, scavenging oxygen from the layer of semiconductor oxide and recrystallizing the oxygen scavenged layer of semiconductor oxide as a semiconductor heteroepitaxy layer.

First claim

What is claimed:

1. A method of manufacturing a semiconductor heteroepitaxy structure, comprising forming a structure precursor by:
(a) depositing ex situ a layer of semiconductor silicon oxide on a base semiconductor substrate layer, wherein said base semiconductor substrate layer comprises a III-V semiconductor with native oxides, wherein thickness of the layer of silicon oxide is less than 1.5 nm;
(b) depositing ex situ a layer of oxygen-permeable insulator on said layer of silicon oxide, wherein the layer of oxygen-permeable insulator comprises hafnium oxide;
(c) depositing ex situ a layer of oxygen-gettering metal onto said insulator layer, wherein said layer of oxygen-gettering material is hafnium, titanium or mixtures thereof;
(d) depositing ex situ a layer of gate metal or a protecting dielectric material comprising a titanium nitride-polysilicon mixture on said layer of oxygen-gettering metal, said layer of gate metal or said protecting dielectric material deposited to protect said oxygen-gettering metal from oxidation caused by oxygen diffusing from ambient air, thereby forming the structure precursor; and
annealing the structure precursor at a predetermined temperature so that (1) oxygen atoms from said silicon oxide layer are scavenged, moved to and reacted with said layer of oxygen-gettering metal and (2) silicon atoms in the scavenged layer are rearranged and crystallized to form a strained, silicon epitaxy film on said base semiconductor substrate layer, thereby removing the native oxides and providing the semiconductor heteroepitaxy structure.

2. The method of claim 1 , including using atomic layer deposition to deposit said layer of silicon oxide.

3. The method of claim 1 , including using chemical vapor deposition to deposit said layer of silicon oxide.

4. The method of claim 1 , including using a material selected from a group consisting of InGaAs, GaAs, InAs, InSb, InGaSb, InAsSb, GaN, InGaN, GaP, InGaP, and mixtures thereof for said base semiconductor substrate layer.

5. The method of claim 1 , including completing said annealing at said predetermined temperature of between 300 to 1000° C. for a time of between 1 to 600 seconds.

6. The method of claim 1 , wherein said layer of silicon oxide has a thickness of between 0.5 nm and 10 nm.

7. The method of claim 6 , wherein said base semiconductor substrate layer has a thickness of between 100 μm and 600 μm.

8. The method of claim 7 , wherein said insulator layer has a thickness of between 1 nm and 10 nm.

9. The method of claim 8 , wherein said oxygen-gettering layer has a thickness of between 1 nm and 100 nm.

10. The method of claim 9 , wherein said gate metal layer has a thickness of between 80 nm and 200 nm.

11. The method of claim 10 , wherein said strained, silicon epitaxy film has a thickness of between 0.2 nm and 5 nm.

12. The method of claim 1 , wherein said gate metal layer has a thickness of between 80 nm and 200 nm.

13. The method of claim 1 , wherein said layer of oxygen-gettering metal and said gate metal layer are selected from different metals.

Assignees

• The Univ Of Kentucky Res Found
• Univ Kentucky Res Found

Inventors

• Chen Zhi David

Classifications

• H10P36/03

  within silicon bodies · CPC title

• H01L29/66969 Primary

  Electricity · mapped topic

• H01L21/3221

  Electricity · mapped topic

• H10D99/00 Primary

  Subject matter not provided for in other groups of this subclass · CPC title

• H10P95/402 Primary

  of silicon bodies · CPC title